US5672091A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Polishing apparatus having endpoint detection device
Assignee: Ebara Corp
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Filing: 1995-12-22
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Granted: 1997-09-30
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Expires: 2015-12-22
Abstract
Abstract A polishing apparatus has an automated endpoint detection device to determine if an endpoint of polishing has been reached without removing the wafer from a top ring of the polishing apparatus. When a pre-determined inspection time is reached in a process of polishing, the wafer is moved laterally along the turntable and the current surface condition of the wafer is determined by comparing the current surface condition with an initial surface condition, having an oxide film for example, determined from surface reflection measurement data carried out opto-electronically on the wafer before polishing. The endpoint detection device can be used to remove the surface oxide film so that the apex of the underlying device elements are just exposed. By eliminating the need for removing the wafer from the top ring for inspection, the cost of handling the wafer for polishing is reduced significantly, and enables reduction in the cost of manufactured devices. The endpoint determination device is applicable to any type of flat objects, such as LCD panels, requiring a high degree of polishing precision.
Inventors
- 👤 Tsutomu Takahashi
- 👤 Keiichi Tohyama
- 👤 Tamami Takahashi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 20:11
CPC Classifications
B; B24; B24B; B24B37/00; B24B37/005; B24B37/013; B24B49/00; B24B49/02; B24B49/12
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
214 words
A polishing apparatus having a turntable, top ring means for pressing an object to be polished onto said turntable during polishing of a surface of the object, and an endpoint detection means for detecting an endpoint for stopping polishing of the surface of the object, said endpoint detection means comprising: beam emitting means for projecting light beams onto an exposed portion of the surface of the object being held by said top ring means; beam receiving means for receiving reflected beams reflected from the exposed portion of the surface; and endpoint judging means for determining a current surface condition of the surface from analysis of said reflected beams, said endpoint judging means comprising an electrical amplifier for amplifying analogue electrical signals received by said beam receiving means, analogue signal filtering means for filtering noise from the thus amplified analogue electrical signals, analogue-to-digital conversion means for converting said amplified analogue electrical signals to digital signals of surface data, computing means for computing an absolute value of a difference between an initial surface data of the surface in an initial unpolished state and current surface data and for comparing said absolute value with a predetermined threshold value to obtain comparison data, and controlling means for controlling operation of said polishing apparatus based on said comparison data.
Claim 2
Dependent Claim
214 words
A polishing apparatus having a turntable, top ring means for pressing an object to be polished onto said turntable during polishing of a surface of the object, and an endpoint detection means for detecting an endpoint for stopping polishing of the surface of the object, said endpoint detection means comprising: beam emitting means for projecting light beams onto an exposed portion of the surface of the object being held by said top ring means; beam receiving means for receiving reflected beams reflected from the exposed portion of the surface; and endpoint judging means for determining a current surface condition of the surface from analysis of said reflected beams, said endpoint judging means comprising an electrical amplifier for amplifying analogue electrical signals received by said beam receiving means, analogue signal filtering means for filtering noise from the thus amplified analogue electrical signals, analogue-to-digital conversion means for converting said amplified analogue electrical signals to digital signals of surface data, computing means for computing an absolute value of a difference between an initial surface data of the surface in an initial unpolished state and current surface data and for comparing said absolute value with a predetermined threshold value to obtain comparison data, and controlling means for controlling operation of said polishing apparatus based on said comparison data.
Claim 3
Dependent Claim
64 words
A polishing apparatus as claimed in claim 1, wherein said beam emitting means and beam receiving means are provided at a location outwardly of said turntable, and said polishing apparatus further comprises a drive mechanism for moving said top ring means and the object relative to said turntable so as to expose the exposed portion of the surface of the object at said location.
Claim 4
Dependent Claim
33 words
A polishing apparatus as claimed in claim 1, wherein said endpoint judging means determines an endpoint on a basis of changes in intensities of reflected beams reflected from the surface of the object.
Claim 5
Dependent Claim
109 words
A polishing apparatus as claimed in claim 1, wherein said beam emitting means of said endpoint detection means comprise a plurality of emitter elements disposed at a common distance from the surface, and said beam receiving means of said endpoint detection means comprise a plurality of corresponding receiver elements disposed at a common distance from the surface, and said computing means is provided with comparing means for computing an absolute value of a difference between an added value or an averaged value of said initial surface data and an added value or an averaged value of said current surface data, and comparing said difference with said predetermined threshold value.
Claim 6
Dependent Claim
59 words
A polishing apparatus as claimed in claim 4, wherein said plurality of emitter elements is arranged so as to produce a linear line of incident points on the surface, and said plurality of receiver elements is arranged linearly so as to correspond with respective of said emitter elements and at an equal distance from the surface of the object.
Claim 7
Dependent Claim
178 words
A polishing apparatus having a turntable, top ring means for pressing an object to be polished onto said turntable during polishing of a surface of the object, and an endpoint detection means for detecting an endpoint for stopping polishing of the surface of the object, said endpoint detection means comprising: beam emitting means for projecting light beams onto an exposed portion of the object being held by said top ring means, said beam emitting means comprising a plurality of emitter elements disposed at a common distance from the surface; beam receiving means for receiving reflected beams reflected from the exposed portion of the surface, said beam receiving means comprising a plurality of receiver elements, corresponding said plurality of emitter elements and disposed at a common distance from the surface; and endpoint judging means for determining a current surface condition of the surface from analysis of said reflected beams, said endpoint judging means comprising computing means for computing an added value or an averaged value of current surface data corresponding to added or averaged intensity of said reflected beams.
Claim 8
Dependent Claim
178 words
A polishing apparatus having a turntable, top ring means for pressing an object to be polished onto said turntable during polishing of a surface of the object, and an endpoint detection means for detecting an endpoint for stopping polishing of the surface of the object, said endpoint detection means comprising: beam emitting means for projecting light beams onto an exposed portion of the object being held by said top ring means, said beam emitting means comprising a plurality of emitter elements disposed at a common distance from the surface; beam receiving means for receiving reflected beams reflected from the exposed portion of the surface, said beam receiving means comprising a plurality of receiver elements, corresponding said plurality of emitter elements and disposed at a common distance from the surface; and endpoint judging means for determining a current surface condition of the surface from analysis of said reflected beams, said endpoint judging means comprising computing means for computing an added value or an averaged value of current surface data corresponding to added or averaged intensity of said reflected beams.
Claim 9
Dependent Claim
74 words
A polishing apparatus as claimed in claim 6, wherein said beam emitting means and beam receiving means are provided at a location outwardly of said turntable, and said polishing apparatus further comprises a drive mechanism for moving said top ring means and the object relative to said turntable so as to expose at least a portion of the surface of the object to said plurality of emitter elements and said plurality of receiver elements.
Claim 10
Dependent Claim
73 words
A polishing apparatus as claimed in claim 6, wherein said computing means has a computing section for computing an absolute value of a difference between an initial surface data of the surface in an initial unpolished state and a current surface data and for comparing said absolute value with a predetermined threshold value to obtain comparison data, and a controlling section for controlling operation of said polishing apparatus based on said comparison data.
Claim 11
Dependent Claim
61 words
A polishing apparatus as claimed in claim 8, wherein said computing section is provided with a comparing section for computing an absolute value of a difference between an added value or an averaged value of said initial surface data and an added value or an averaged value of said current surface data, and comparing said difference with said predetermined threshold value.
Claim 12
Dependent Claim
59 words
A polishing apparatus as claimed in claim 6, wherein said plurality of emitter elements is arranged so as to produce a linear line of incident points on the surface, and said plurality of receiver elements is arranged linearly so as to correspond with respective of said emitter elements and at an equal distance from the surface of the object.
Claim 13
Dependent Claim
56 words
A polishing apparatus as claimed in claim 6, wherein said endpoint judging means further comprises an electrical amplifier for amplifying analogue electrical signals received by said receiver elements, analogue signal filtering means for filtering noise from the thus amplified analogue electrical signals, and analogue-to-digital conversion means for converting said amplified analogue electrical signals to digital signals.
Claim 14
Dependent Claim
165 words
A polishing apparatus having a turntable, top ring means for pressing an object to be polished onto said turntable during polishing of a surface of the object, and an endpoint detection means for detecting an endpoint for stopping polishing of the surface on the object, said endpoint detection means comprising: beam emitting means for projecting light beams onto an exposed portion of the surface of the object being held by said top ring means; beam receiving means for receiving reflected beams reflected from the exposed portion of the surface; endpoint judging means for determining a current surface condition of the surface from analysis of said reflected beams; and a drive mechanism for moving said top ring means and the object relative to said turntable so as to expose the exposed portion of the surface of the object, said drive mechanism being operable to drive said top ring means while maintaining constant a distance between the surface of the object and a surface of said turntable.
Claim 15
Dependent Claim
165 words
A polishing apparatus having a turntable, top ring means for pressing an object to be polished onto said turntable during polishing of a surface of the object, and an endpoint detection means for detecting an endpoint for stopping polishing of the surface on the object, said endpoint detection means comprising: beam emitting means for projecting light beams onto an exposed portion of the surface of the object being held by said top ring means; beam receiving means for receiving reflected beams reflected from the exposed portion of the surface; endpoint judging means for determining a current surface condition of the surface from analysis of said reflected beams; and a drive mechanism for moving said top ring means and the object relative to said turntable so as to expose the exposed portion of the surface of the object, said drive mechanism being operable to drive said top ring means while maintaining constant a distance between the surface of the object and a surface of said turntable.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-09-29 | 2001-03-31 | 2001-09-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-09-29 | 2005-03-31 | 2005-09-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-09-29 | 2009-03-31 | 2009-09-30 | $7700.00 | Window Closed / Lapsed |