US5081796A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for mechanical planarization and endpoint detection of a semiconductor wafer
Assignee: Micron Technology Inc
•
Filing: 1990-08-06
•
Granted: 1992-01-21
•
Expires: 2010-08-06
Abstract
Abstract A method and apparatus for mechanical planarization and endpoint detection of a semiconductor wafer or the like. The apparatus includes a polishing head for rotating the wafer under a controlled pressure against a rotating polishing platen. The polishing head is mounted such that the wafer can be moved across the polishing platen to overhang a peripheral edge of the polishing platen and expose the surface of the wafer. Endpoint detection apparatus in the form of a laser interferometer measuring device is directed at an unpatterned die on the exposed surface of the wafer to detect oxide thickness at that point. The laser light beam is enclosed in a column of liquid to clean the wafer surface at the point of detection and to provide a uniform reference medium for the laser light beam.
Inventors
- 👤 Laurence D. Schultz
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 22:59
CPC Classifications
B; B24; B24B; B24B37/00; B24B37/005; B24B37/013; B24B37/04; B24B49/00; B24B49/12; B24B7/00; B24B7/20; B24B7/22; B24B7/228
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
79 words
A process for polishing a flat wafer comprising: a. holding the wafer in a rotatable polishing head mounted for movement across and over a peripheral edge of a polishing platen; b. rotating a surface of the wafer in a polishing slurry across the polishing platen; c. overhanging a portion of the wafer across a peripheral edge of the polishing platen to expose a surface of the wafer; and d. detecting using endpoint detection means an endpoint of the wafer.
Claim 2
Dependent Claim
79 words
A process for polishing a flat wafer comprising: a. holding the wafer in a rotatable polishing head mounted for movement across and over a peripheral edge of a polishing platen; b. rotating a surface of the wafer in a polishing slurry across the polishing platen; c. overhanging a portion of the wafer across a peripheral edge of the polishing platen to expose a surface of the wafer; and d. detecting using endpoint detection means an endpoint of the wafer.
Claim 3
Dependent Claim
19 words
A process as claimed in claim 1 and wherein the endpoint detection means comprises a laser interferometer measuring device.
Claim 4
Dependent Claim
34 words
A process as claimed in claim 2 and wherein the laser interferometer measuring device is situated to detect the thickness of an oxide on the wafer located on an unpatterned die on the wafer.
Claim 5
Dependent Claim
26 words
A process as claimed in claim 3 and wherein the polishing platen is also rotatably mounted for rotation in the same direction a the polishing head.
Claim 6
Dependent Claim
31 words
A process as claimed in claim 3 and further comprising: directing a column of liquid on the wafer for cleaning the wafer and for providing a reference medium for the laser.
Claim 7
Dependent Claim
109 words
A process for polishing a thin flat semiconductor wafer having an oxide surface comprising: a. holding the semiconductor wafer in a rotatable polishing head mounted for movement across and over a peripheral edge of a polishing platen; b. rotating the wafer in a polishing slurry across the polishing platen; c. overhanging a portion of the wafer across a peripheral edge of the polishing platen to expose a surface of the wafer; and d. detecting a thickness of the oxide coating of the wafer utilizing a laser detection apparatus having a detecting laser beam enclosed in a column of water and directed at an unpatterned die on the wafer surface.
Claim 8
Dependent Claim
109 words
A process for polishing a thin flat semiconductor wafer having an oxide surface comprising: a. holding the semiconductor wafer in a rotatable polishing head mounted for movement across and over a peripheral edge of a polishing platen; b. rotating the wafer in a polishing slurry across the polishing platen; c. overhanging a portion of the wafer across a peripheral edge of the polishing platen to expose a surface of the wafer; and d. detecting a thickness of the oxide coating of the wafer utilizing a laser detection apparatus having a detecting laser beam enclosed in a column of water and directed at an unpatterned die on the wafer surface.
Claim 9
Dependent Claim
22 words
The process as claimed in claim 6 and further comprising: rotating the polishing platen in the same direction as the polishing head.
Claim 10
Dependent Claim
35 words
The process as claimed in claim 6 and further comprising: moving the polishing head across the peripheral edge of the polishing platen to compensate for a velocity differential between different portions of the rotating wafer.
Claim 11
Dependent Claim
22 words
The process as claimed in claim 8 and wherein: the wafer, polishing head, and polishing platen are each generally circular in shape.
Claim 12
Dependent Claim
21 words
The process as claimed in claim 8 and wherein: the unpatterned die includes a metallic film having an oxide coating thereon.
Claim 13
Dependent Claim
149 words
A process for polishing a thin flat generally circular shaped semiconductor wafer having an oxide coating and for detecting the thickness of the oxide coating, comprising: a. holding the semiconductor wafer in a rotatable polishing head; b. rotating the semiconductor wafer over a rotating polishing platen under pressure from the polishing head in a polishing slurry; c. overhanging a portion of a surface of the semiconductor wafer over the polishing platen to expose the surface for endpoint detection of an oxide on the semiconductor wafer; d. directing a laser beam enclosed in a column of liquid at an unpatterned die on the wafer, for detecting using laser interferometry a thickness of an oxide coating on the wafer; and e. moving the wafer across the peripheral edge of the polishing platen for overhanging the wafer and for compensating for velocity differentials on different potions of the generally circular shaped wafer.
Claim 14
Dependent Claim
149 words
A process for polishing a thin flat generally circular shaped semiconductor wafer having an oxide coating and for detecting the thickness of the oxide coating, comprising: a. holding the semiconductor wafer in a rotatable polishing head; b. rotating the semiconductor wafer over a rotating polishing platen under pressure from the polishing head in a polishing slurry; c. overhanging a portion of a surface of the semiconductor wafer over the polishing platen to expose the surface for endpoint detection of an oxide on the semiconductor wafer; d. directing a laser beam enclosed in a column of liquid at an unpatterned die on the wafer, for detecting using laser interferometry a thickness of an oxide coating on the wafer; and e. moving the wafer across the peripheral edge of the polishing platen for overhanging the wafer and for compensating for velocity differentials on different potions of the generally circular shaped wafer.
Claim 15
Dependent Claim
32 words
The process as claimed in claim 11 and wherein: the semiconductor wafer is formed of silicon having a silicide surface and the unpatterned die includes a tungsten film with an oxide coating.
Claim 16
Dependent Claim
84 words
Apparatus for mechanically planarizing a thin flat wafer comprising: a. polishing means including a polishing platen and an abrasive slurry; b. a polishing head for holding the wafer and mounted for rotating and for moving the wafer across the polishing platen and past a peripheral edge of the polishing platen under a controlled pressure; and c. endpoint detection means including a laser interferometer with a laser beam contained in a column of liquid for detecting an endpoint on an exposed surface of the wafer.
Claim 17
Dependent Claim
84 words
Apparatus for mechanically planarizing a thin flat wafer comprising: a. polishing means including a polishing platen and an abrasive slurry; b. a polishing head for holding the wafer and mounted for rotating and for moving the wafer across the polishing platen and past a peripheral edge of the polishing platen under a controlled pressure; and c. endpoint detection means including a laser interferometer with a laser beam contained in a column of liquid for detecting an endpoint on an exposed surface of the wafer.
Claim 18
Dependent Claim
21 words
Apparatus as claimed in claim 13 and wherein: the polishing platen is rotated in the same direction as said polishing head.
Claim 19
Dependent Claim
65 words
Apparatus as claimed in claim 14 and wherein: the laser interferometer detection device includes a laser light beam, a return light conduit, and a liquid conduit which is arranged to direct a liquid at the exposed surface of the wafer to surround the laser light beam and clean a surface of the wafer and to provide a uniform reference medium for the laser light beam.
Claim 20
Dependent Claim
21 words
Apparatus as claimed in claim 15 and wherein: the laser light beam is directed at an unpatterned die on the wafer.
Claim 21
Dependent Claim
21 words
Apparatus as claimed in claim 16 and wherein: the unpatterned die includes a metallic film having an oxide coating formed thereon.
Claim 22
Dependent Claim
20 words
Apparatus as claimed in claim 17 and wherein: said metallic film is tungsten and said oxide film is a silicide.
Claim 23
Dependent Claim
131 words
Apparatus for mechanically planarizing a thin flat semiconductor wafer comprising: a. polishing means including a rotating generally circular shaped polishing platen and an abrasive slurry; b. a polishing head for holding the semiconductor wafer and mounted for rotation and for moving the wafer across a peripheral circumferential edge of the polishing platen under a controlled pressure to expose a surface of the wafer; and c. endpoint detection means including a laser interferometer measuring device having a laser light beam directed at an unpatterned die on the surface of the wafer and including a control unit, a light return conduit, and a liquid conduit circumjacent to the laser light beam for directing a liquid at the wafer surface to clean the surface and provide a reference medium for the laser light beam.
Claim 24
Dependent Claim
131 words
Apparatus for mechanically planarizing a thin flat semiconductor wafer comprising: a. polishing means including a rotating generally circular shaped polishing platen and an abrasive slurry; b. a polishing head for holding the semiconductor wafer and mounted for rotation and for moving the wafer across a peripheral circumferential edge of the polishing platen under a controlled pressure to expose a surface of the wafer; and c. endpoint detection means including a laser interferometer measuring device having a laser light beam directed at an unpatterned die on the surface of the wafer and including a control unit, a light return conduit, and a liquid conduit circumjacent to the laser light beam for directing a liquid at the wafer surface to clean the surface and provide a reference medium for the laser light beam.
Claim 25
Dependent Claim
19 words
Apparatus as claimed in claim 19 and wherein: said unpatterned die includes a metallic film coated with an oxide.
Claim 26
Dependent Claim
21 words
Apparatus as claimed in claim 19 and wherein: said polishing platen is rotated in the same direction as the polishing head.
Claim 27
Dependent Claim
18 words
Apparatus as claimed in claim 21 and wherein: said liquid for surrounding the laser light beam is water.
References Cited (Backward Citations)
US3841031A
Cited
US4083272A
Cited
US4193226A
Cited
US4365301A
Cited
US4811522A
Cited
US4930262A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-01-20 | 1995-07-22 | 1996-01-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-01-20 | 1999-07-22 | 2000-01-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-01-20 | 2003-07-22 | 2004-01-21 | $7700.00 | Window Closed / Lapsed |