US5985679A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Automated endpoint detection system during chemical-mechanical polishing
Assignee: Bell Semiconductor LLC
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Filing: 1997-06-12
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Granted: 1999-11-16
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Expires: 2017-06-12
Abstract
Abstract An automated endpoint detection process includes obtaining a baseline graph of reflected radiation signal versus time of radiation exposure for a standard integrated circuit substrate surface that is substantially free of residual metal, directing radiation generated from a radiation source through a radiation transparent region of a polishing pad such that radiation is incident on at least a portion of a surface of the integrated circuit substrate, detecting a reflected radiation signal from the integrated circuit substrate surface through the radiation transparent region of the polishing pad, comparing an area under a graph of the reflected radiation signal versus time of radiation exposure obtained for the integrated circuit surface to the baseline graph of the standard integrated circuit substrate surface and thereby determining whether residual metal is present on the surface of the integrated circuit substrate and signaling the chemical-mechanical polishing assembly to stop polishing after polishing for a predetermined time, if the area under the graph of the reflected radiation signal versus time of radiation exposure obtained for the integrated circuit surface is substantially equal to the baseline graph of the standard integrated circuit substrate surface.
Inventors
- 👤 Michael J. Berman
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 02:33
CPC Classifications
B; B24; B24B; B24B37/00; B24B37/005; B24B37/013; B24B49/00; B24B49/12; B24D; B24D7/00; B24D7/12; G; G01; G01N; G01N21/00; G01N21/17; G01N21/55; G01N1/00; G01N1/28; G01N1/32
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
214 words
An automated endpoint detection process for detecting residual metal on a surface of an integrated circuit substrate during chemical-mechanical polishing, comprising: obtaining a baseline graph of reflected radiation signal versus time of radiation exposure for a surface on a standard integrated circuit substrate that is substantially free of residual metal; directing radiation generated from a radiation source through a radiation transparent region of a polishing pad such that radiation is incident on at least a portion of a surface of the integrated circuit substrate; detecting a reflected radiation signal from said surface of said integrated circuit substrate through the radiation transparent region of the polishing pad; comparing an area under a graph of said reflected radiation signal versus time of radiation exposure obtained for said surface of said integrated circuit to said baseline graph of said surface of said standard integrated circuit substrate and thereby determining whether residual metal is present on said surface of said integrated circuit substrate; and signaling a chemical-mechanical polishing assembly to stop polishing after polishing for a predetermined time, if said area under said graph of said reflected radiation signal versus time of radiation exposure obtained for said surface of said integrated circuit is substantially equal to said baseline graph of said surface of said standard integrated circuit substrate.
Claim 2
Dependent Claim
214 words
An automated endpoint detection process for detecting residual metal on a surface of an integrated circuit substrate during chemical-mechanical polishing, comprising: obtaining a baseline graph of reflected radiation signal versus time of radiation exposure for a surface on a standard integrated circuit substrate that is substantially free of residual metal; directing radiation generated from a radiation source through a radiation transparent region of a polishing pad such that radiation is incident on at least a portion of a surface of the integrated circuit substrate; detecting a reflected radiation signal from said surface of said integrated circuit substrate through the radiation transparent region of the polishing pad; comparing an area under a graph of said reflected radiation signal versus time of radiation exposure obtained for said surface of said integrated circuit to said baseline graph of said surface of said standard integrated circuit substrate and thereby determining whether residual metal is present on said surface of said integrated circuit substrate; and signaling a chemical-mechanical polishing assembly to stop polishing after polishing for a predetermined time, if said area under said graph of said reflected radiation signal versus time of radiation exposure obtained for said surface of said integrated circuit is substantially equal to said baseline graph of said surface of said standard integrated circuit substrate.
Claim 3
Dependent Claim
46 words
The process of claim 1, wherein the step of comparing the area under the graph of the reflected radiation signal versus time of radiation exposure obtained for the integrated circuit to the baseline graph of the standard integrated circuit substrate is facilitated by a computer system.
Claim 4
Dependent Claim
39 words
The process of claim 1, wherein the step of obtaining the baseline graph of the reflected radiation signal versus time of radiation exposure for the surface on the standard integrated circuit substrate is conducted before the step of polishing.
Claim 5
Dependent Claim
30 words
The process of claim 1, wherein the radiation source comprises an infrared radiation source and the step of detecting comprises using a radiation detector that includes an infrared radiation detector.
Claim 6
Dependent Claim
14 words
The process of claim 1, wherein the integrated circuit substrate comprises a semiconductor wafer.
Claim 7
Dependent Claim
41 words
The process of claim 1, wherein during the step of directing substantially all of the surface of the integrated circuit is exposed to radiation through the radiation transparent region in the polishing pad, which is rotating or in an orbital state.
Claim 8
Dependent Claim
149 words
The process of claim 1, wherein the step of obtaining the baseline graph of reflected radiation signal versus time of radiation exposure comprises: providing radiation to the surface of the standard integrated circuit substrate that is substantially free of residual metal through the radiation transparent region of the polishing pad, which is rotating or in an orbital state, such that radiation is incident on at least a portion of the surface of the standard integrated circuit substrate; detecting the baseline reflected radiation signal from the surface of the standard integrated circuit substrate through the radiation transparent region of the polishing pad over a period of time, during which substantially all of the surface of the standard integrated circuit substrate is scanned by radiation; and storing the baseline graph of reflected radiation signal versus time of radiation exposure from the surface of the integrated circuit substrate on machine readable media.
Claim 9
Dependent Claim
28 words
The process of claim 1, wherein the polishing pad comprises at least one material selected from the group consisting of urethane, polyurethane, felt, polymer and a filler material.
Claim 10
Dependent Claim
30 words
The process of claim 1, wherein the radiation transparent region comprises at least one material selected from the group consisting of silicon dioxide, magnesium oxide, polymetric material, urethane and polyurethane.
Claim 11
Dependent Claim
17 words
The process of claim 1, wherein the step of signaling is carried out by a computer system.
Claim 12
Dependent Claim
17 words
The process of claim 1, wherein the predetermined time comprises between about 2 and about 5 seconds.
Claim 13
Dependent Claim
37 words
The method of claim 1 wherein said reflected radiation is obtained over a period of time during which essentially the entire substrate surface is scanned by radiation passing through the radiation transparent region of the polishing pad.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-11-15 | 2003-05-17 | 2003-11-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-11-15 | 2007-05-17 | 2007-11-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-11-15 | 2011-05-17 | 2011-11-16 | $7700.00 | Window Closed / Lapsed |