US5058982A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Illumination system and inspection apparatus including same
Assignee: Orbotech Ltd
•
Filing: 1990-08-10
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Granted: 1991-10-22
•
Expires: 2010-08-10
Abstract
Abstract An illumination system particularly useful for inspecting a workpiece by an optic scanner includes darkfield illumination produced mainly by two elongate light sources each having a reflector focussing member and a lenticular lens sheet spreading the light from its light source over its reflector focussing member to produce an approximate image of its light source on the line to be scanned. The illumination system further includes brightfield illumination produced mainly by a third elongate light source mounted laterally of the scanner optic axis, a refractive focussing member, and a further lenticular lens sheet producing an approximate image of the third light source on the line to be scanned. A beamsplitter aligned with the scanner optic axis reflects the light from the refractive focussing member towards the workpiece, and conducts therethrough both the darkfield and brightfield illumination reflected from the workpiece to the optic scanner.
Inventors
- 👤 Yigal Katzir
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 05:06
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/06; G; G01; G01N; G01N21/00; G01N21/84; G01N21/88; G01N21/8806; G02; G02B; G02B19/00; G02B19/0004; G02B19/0028; G02B19/0033; G02B19/0047; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G01N2021/8822; G01N21/95; G01N21/956; G01N2021/95638; G01N2021/95646; G01N21/9501; Y; Y10; Y10S; Y10S385/00; Y10S385/901
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
144 words
An illumination system for an optic scanner particularly useful for illuminating a line to be scanned on the surface of a workpiece and aligned with the scanner optic axis, comprising: darkfield illumination means and brightfield illumination means for illuminating the line to be scanned; said darkfield illumination means comprising first and second light guides producing, at their output ends, elongate, narrow light sources extending parallel to and on opposite sides of the line to be scanned; and a beam concentrator for each of said light guides located to produce an approximate image of its respective light source on the line to be scanned on the surface of the workpiece; each of said beam concentrators including a reflector focussing member and a lenticular lens sheet between its respective light source and reflector focussing member effective to spread the light over its respective reflector focussing member.
Claim 2
Dependent Claim
144 words
An illumination system for an optic scanner particularly useful for illuminating a line to be scanned on the surface of a workpiece and aligned with the scanner optic axis, comprising: darkfield illumination means and brightfield illumination means for illuminating the line to be scanned; said darkfield illumination means comprising first and second light guides producing, at their output ends, elongate, narrow light sources extending parallel to and on opposite sides of the line to be scanned; and a beam concentrator for each of said light guides located to produce an approximate image of its respective light source on the line to be scanned on the surface of the workpiece; each of said beam concentrators including a reflector focussing member and a lenticular lens sheet between its respective light source and reflector focussing member effective to spread the light over its respective reflector focussing member.
Claim 3
Dependent Claim
28 words
The illumination system according to claim 1, wherein each of said lenticular lens sheets includes an array of cylinder lenses aligned perpendicularly to the respective narrow light source.
Claim 4
Dependent Claim
19 words
The illumination system according to claim 2, wherein said beamsplitter of said brightfield illumination means is a prismatic beamsplitter.
Claim 5
Dependent Claim
104 words
The illumination system according to claim 1, wherein said brightfield illumination means comprises: a third light source mounted laterally of the scanner optic axis; a refractive focussing member for producing an approximate image of said third light source on the line to be scanned on the surface of the workpiece; another lenticular lens for spreading the light from said third light source over said refractive focussing member; and a beamsplitter aligned with said optic axis for reflecting the light from said focussing member towards said workpiece, and for conducting therethrough both the darkfield and brightfield illumination reflected from the workpiece to the optic scanner.
Claim 6
Dependent Claim
25 words
The illumination system according to claim 1, wherein each of said reflector focussing members is a concave reflector defined by the generatrix of a cylinder.
Claim 7
Dependent Claim
38 words
The illumination system according to claim 5, wherein said concave reflectors each subtends an arc of 40°-60° on each side of the optic axis, and are spaced from each other 2°-10° on each side of the optic axis.
Claim 8
Dependent Claim
40 words
The illumination system according to claim 5, wherein said concave reflectors each subtends an arc of approximately 50° on each side of the optic axis, and are spaced from each other approximately 5° on each side of the optic axis.
Claim 9
Dependent Claim
22 words
The illumination system according to claim 1, wherein each of said concave reflectors is defined by the generatrix of an elliptical cylinder.
Claim 10
Dependent Claim
166 words
An illumination system for optic scanners particularly useful for illuminating a line on the surface of a workpiece to be scanned, comprising: first and second light guides producing, at their output ends, elongate, narrow light sources extending parallel to and on opposite sides of the line to be scanned on the surface of the workpiece; a concave light reflector for each of said light guides effective to approximately focus said light sources on the line to be scanned, each of said light reflectors subtending an arc of approximately 40°-60° on each side of the optic axis and being spaced from each other about 2°-10° on each side of the optic axis; and a lenticular lens sheet between each of said first and second light sources and their respective concave reflectors and effective to spread the light from the light sources substantially uniformly over their respective reflectors; each of said lenticular lens sheets including an array of cylindrical lenses aligned perpendicularly to the respective narrow light source.
Claim 11
Dependent Claim
166 words
An illumination system for optic scanners particularly useful for illuminating a line on the surface of a workpiece to be scanned, comprising: first and second light guides producing, at their output ends, elongate, narrow light sources extending parallel to and on opposite sides of the line to be scanned on the surface of the workpiece; a concave light reflector for each of said light guides effective to approximately focus said light sources on the line to be scanned, each of said light reflectors subtending an arc of approximately 40°-60° on each side of the optic axis and being spaced from each other about 2°-10° on each side of the optic axis; and a lenticular lens sheet between each of said first and second light sources and their respective concave reflectors and effective to spread the light from the light sources substantially uniformly over their respective reflectors; each of said lenticular lens sheets including an array of cylindrical lenses aligned perpendicularly to the respective narrow light source.
Claim 12
Dependent Claim
98 words
The illumination system according to claim 9, further comprising: a third light source mounted laterally of said optic axis; a refractive focussing member for producing an at least approximate image of said third light source on said line to be scanned on the surface of the workpiece; a lenticular lens for spreading the light from said third light source over said refractive focussing member; and a beamsplitter aligned with said optic axis for reflecting the light from said refractive focussing member towards said workpiece, and for conducting therethrough the light reflected from the workpiece to the optic scanner.
Claim 13
Dependent Claim
41 words
The illumination system according to claim 9, wherein each of the concave reflectors subtends an arc of 40°-60° on each side of the optic axis, the two reflectors being spaced from each other 2°-10° on each side of the optic axis.
Claim 14
Dependent Claim
33 words
The illumination system according to claim 11, wherein said concave reflectors each subtends an arc of about 50° and are spaced from each other about 5° on each side of the optic axis.
Claim 15
Dependent Claim
18 words
The illumination system according to claim 9, wherein said first and second light guides are fiber-optic light guides.
Claim 16
Dependent Claim
20 words
The illumination system according to claim 9, wherein said concave reflectors are defined by the generatrix of an elliptical cylinder.
Claim 17
Dependent Claim
104 words
Inspection apparatus for optically inspecting the surface of a workpiece, comprising: a memory for storing data relating to the desired features of the workpiece surface; an illumination system according to claim 1 for illuminating the surface of the workpiece; an optic sensor for sensing the light reflected from the illuminated workpiece surface, and for outputting electrical signals corresponding thereto; and a processor including logic circuitry for analyzing the electric signals outputted by said optic sensor, for comparing them with the data stored in said memory, and for providing an indication of the discrepancies with respect thereto indicating a defect in the inspected workpiece surface.
Claim 18
Dependent Claim
104 words
Inspection apparatus according to claim 15, wherein the brightfield illumination system means comprises: a third light source mounted laterally of the scanner optic axis; a refractive focussing member for producing an approximate image of the third light source on the line to be scanned on the surface of the workpiece; another lenticular lens for spreading the light from the third light source over the refractive focussing member; and a beamsplitter aligned with the optic axis for reflecting the light from the lenticular lens towards the workpiece, and for conducting therethrough both the darkfield and brightfield illumination reflected from the workpiece to the optic scanner.
Claim 19
Dependent Claim
17 words
Inspection apparatus according to claim 15, wherein the first and second light guides are fiber-optic light guides.
Claim 20
Dependent Claim
21 words
Inspection apparatus according to claim 15, wherein each of the concave reflectors is defined by the generatrix of an elliptical cylinder.
Claim 21
Dependent Claim
37 words
Inspection apparatus according to claim 15, wherein the concave reflectors each subtends an arc of 40°-60° on each side of the optic axis, and are spaced from each other 2°-10° on each side of the optic axis.
Claim 22
Dependent Claim
18 words
Inspection apparatus according to claim 15, wherein the beamsplitter of the brightfield illumination means is a prismatic beamsplitter.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-10-21 | 1995-04-22 | 1995-10-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-10-21 | 1999-04-22 | 1999-10-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-10-21 | 2003-04-22 | 2003-10-22 | $7700.00 | Window Closed / Lapsed |