US4498742A
Expired / Lapsed
US
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Illumination optical arrangement
Assignee: Nikon Corp
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Filing: 1982-09-08
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Granted: 1985-02-12
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Expires: 2002-09-08
Abstract
Abstract Disclosed is an illumination optical arrangement including light source means for supplying a substantially collimated light beam, and optical means for shifting the collimated light beam from the light source means toward the central axis of the light beam. The optical means includes an entrance surface axis-symmetrically disposed with a predetermined inclination with respect to the central axis to cause the collimated light beam to be refracted toward the central axis substantially at the same angle, and an exit surface axis-symmetrically disposed with said predetermined inclination with respect to the central axis to cause the light beam from the entrance surface to be refracted in a direction parallel to the central axis.
Inventors
- 👤 Makoto Uehara
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 16:44
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70058; G03F7/70091; G02; G02B; G02B21/00; G02B21/06
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
251 words
An illumination optical arrangement comprising: (a) light source means for supplying a substantially collimated light beam; and (b) optical means for shifting the collimated light beam from said light source means toward the central axis of said light beam, said optical means including an entrance surface axis-symmetrically disposed with a predetermined inclination with respect to said central axis to cause said collimated light beam to be refracted toward said central axis substantially at the same angle, and an exit surface axis-symmetrically disposed with said predetermined inclination with respect to said central axis to cause the light beam from said entrance surface to be refracted in a direction parallel to said central axis, wherein said optical means includes a prism having said entrance surface and exit surface, said entrance surface is formed by a conical convex surface, said exit surface is formed by a conical concave surface, and the cones of said entrance surface and exit surface have their apexes lying on said central axis, and wherein said light source means supplies a collimated light beam having an annular distribution of quantity of light having a circular dark area of radius D s around said central axis, and said prism is formed so as to satisfy the following condition: (D.sub.s /2)≦d tan ((π/2)-sin.sup.-1 (cos θ/n)-θ)≦2D.sub.s, where the apexes of the cones are represented by 2θ, the refractive index is represented by n, and the distance between the apexes of the cones of the entrance surface and exit surface is represented by d.
Claim 2
Dependent Claim
251 words
An illumination optical arrangement comprising: (a) light source means for supplying a substantially collimated light beam; and (b) optical means for shifting the collimated light beam from said light source means toward the central axis of said light beam, said optical means including an entrance surface axis-symmetrically disposed with a predetermined inclination with respect to said central axis to cause said collimated light beam to be refracted toward said central axis substantially at the same angle, and an exit surface axis-symmetrically disposed with said predetermined inclination with respect to said central axis to cause the light beam from said entrance surface to be refracted in a direction parallel to said central axis, wherein said optical means includes a prism having said entrance surface and exit surface, said entrance surface is formed by a conical convex surface, said exit surface is formed by a conical concave surface, and the cones of said entrance surface and exit surface have their apexes lying on said central axis, and wherein said light source means supplies a collimated light beam having an annular distribution of quantity of light having a circular dark area of radius D s around said central axis, and said prism is formed so as to satisfy the following condition: (D.sub.s /2)≦d tan ((π/2)-sin.sup.-1 (cos θ/n)-θ)≦2D.sub.s, where the apexes of the cones are represented by 2θ, the refractive index is represented by n, and the distance between the apexes of the cones of the entrance surface and exit surface is represented by d.
Claim 3
Dependent Claim
48 words
An illumination optical arrangement according to claim 1, wherein said light source means includes a reflecting mirror whose cross-section along a plane containing said central axis of said light beam is represented by a quadratic curve, and a light source disposed on the focus of said reflecting mirror.
Claim 4
Dependent Claim
74 words
An illumination optical arrangement according to claim 2, wherein said cross-section of said reflecting mirror is represented by a part of an ellipse, said light source is disposed on one focus of said ellipse, and said light source means further includes lens means disposed between the other focus of said ellipse and said optical means to make into a collimated light beam the light beam from said light source reflected by said reflecting mirror.
Claim 5
Dependent Claim
181 words
An illumination optical arrangement comprising: (a) light source means for supplying a substantially collimated light beam; (b) optical means for shifting the collimated light beam from said light source means toward the central axis of said light beam, said optical means including an entrance surface axis-symmetrically disposed with a predetermined inclination with respect to said central axis to cause said collimated light beam to be refracted toward said central axis substantially at the same angle, and an exit surface axis-symmetrically disposed with said predetermined inclination with respect to said central axis to cause the light beam from said entrance surface to be refracted in a direction parallel to said central axis; (c) stop means having a stop aperture through which the collimated light beam from said optical means passes, the diameter of said stop aperture being variable; and (d) afocal magnification changing optical means disposed between said optical means and said stop means and capable of varying the diameter of the collimated light beam reaching said stop means in accordance with the variation in the aperture diameter of said stop means.
Claim 6
Dependent Claim
181 words
An illumination optical arrangement comprising: (a) light source means for supplying a substantially collimated light beam; (b) optical means for shifting the collimated light beam from said light source means toward the central axis of said light beam, said optical means including an entrance surface axis-symmetrically disposed with a predetermined inclination with respect to said central axis to cause said collimated light beam to be refracted toward said central axis substantially at the same angle, and an exit surface axis-symmetrically disposed with said predetermined inclination with respect to said central axis to cause the light beam from said entrance surface to be refracted in a direction parallel to said central axis; (c) stop means having a stop aperture through which the collimated light beam from said optical means passes, the diameter of said stop aperture being variable; and (d) afocal magnification changing optical means disposed between said optical means and said stop means and capable of varying the diameter of the collimated light beam reaching said stop means in accordance with the variation in the aperture diameter of said stop means.
Claim 7
Dependent Claim
40 words
An illumination optical arrangement according to claim 4, wherein said afocal magnification changing optical means has a magnification substantially equal to the diameter of said stop aperture relative to the diameter of the collimated light beam from said optical means.
Claim 8
Dependent Claim
40 words
An illumination optical arrangement according to claim 4, further comprising: means for controlling the diameter of the stop aperture of said stop means; and drive means for magnification-change-operating said afocal magnification changing optical means in response to said control means.
Claim 9
Dependent Claim
60 words
An illumination optical arrangement according to claim 4, wherein said optical means includes a prism having said entrance surface and exit surface, said entrance surface is formed by a conical convex surface, said exit suface is formed by a conical concave surface, and the cones of said entrance surface and exit surface have their apexes lying on said central axis.
Claim 10
Dependent Claim
48 words
An illumination optical arrangement according to claim 4, wherein said light source means includes a reflecting mirror whose cross-section along a plane containing said central axis of said light beam is represented by a quadratic curve, and a light source disposed on the focus of said reflecting mirror.
Claim 11
Dependent Claim
74 words
An illumination optical arrangement according to claim 8, wherein said cross-section of said reflecting mirror is represented by a part of an ellipse, said light source is disposed on one focus of said ellipse, and said light source means further includes lens means disposed between the other focus of said ellipse and said optical means to make into a collimated light beam the light beam from said light source reflected by said reflecting mirror.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-02-12 | 1988-08-13 | 1989-02-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-02-12 | 1992-08-13 | 1993-02-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-02-12 | 1996-08-13 | 1997-02-12 | $7700.00 | Window Closed / Lapsed |