US5783804A
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Reflectance method for accurate process calibration in semiconductor substrate heat treatment
Assignee: Micron Technology Inc
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Filing: 1997-03-07
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Granted: 1998-07-21
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Expires: 2017-03-07
Abstract
Abstract A nondestructive product level calibration method which is based on reflectance of intensity of UV and visible light that is measured from the top surface of a semiconductor wafer in a RTP closed loop process control environment in which the temperature of the wafer is regulated as a function of reflectivity of radiation at a preselected wavelength from the top surface of the wafer. In the method, sheet resistance of the wafer is measured as a function of the intensity of the UV and IR light directed at the wafer over a predetermined temperature and time range. Then, the reflectance intensity off wafer is measured to develop a model of the top surface. The reflectance model will indicate a wavelength where the reflectance is the greatest. Next, the wafer is subjected to UV radiation at the most sensitive wavelength and the reflectance is plotted against intensity of heat treatment. Then, notice is taken that the reflectance detected directly corresponds to a ratio of temperature over time measured in the first step. Thus, the reflectance at a particular wavelength of UV light corresponds to a specific and discrete temperature so that the degree of heat treatment to which the wafer has been exposed is known.
Inventors
- 👤 Robert James Burke
- 👤 Russell C. Zahorik
- 👤 Paul A. Paduano
- 👤 Randhir P. S. Thakur
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 18:55
CPC Classifications
G; G05; G05D; G05D23/00; G05D23/19; G05D23/27; G01; G01K; G01K11/00; G01K11/12; G01K11/14; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/70605; G03F7/70616; G05D23/1919; G05D23/20; G05D23/26; H; H10; H10P; H10P74/00; H10P74/20; H10P74/203
Claims Analysis
Total Claims: 29
Claim 1
Independent Claim
155 words
A method of measuring a heat treatment status indicative of a heat treatment applied to a semiconductor substrate, the method comprising: directing a light source having a plurality of predetermined wavelengths to a top surface of a semiconductor substrate; measuring the quantity and variation thereof of light at each of the predetermined wavelengths that is reflected off the top surface of the semiconductor substrate from the light source; determining a target wavelength from among the plurality of predetermined wavelengths at which the variation of the quantity of reflected light off the top surface of the semiconductor substrate is the highest variation; and comparing the measured quantity of light at the target wavelength that is reflected off the top surface of the semiconductor substrate to a predetermined range of quantities to determine whether the measured quantity of light that is reflected off the top surface of the semiconductor substrate is within the predetermined range of quantities.
Claim 2
Independent Claim
155 words
A method of measuring a heat treatment status indicative of a heat treatment applied to a semiconductor substrate, the method comprising: directing a light source having a plurality of predetermined wavelengths to a top surface of a semiconductor substrate; measuring the quantity and variation thereof of light at each of the predetermined wavelengths that is reflected off the top surface of the semiconductor substrate from the light source; determining a target wavelength from among the plurality of predetermined wavelengths at which the variation of the quantity of reflected light off the top surface of the semiconductor substrate is the highest variation; and comparing the measured quantity of light at the target wavelength that is reflected off the top surface of the semiconductor substrate to a predetermined range of quantities to determine whether the measured quantity of light that is reflected off the top surface of the semiconductor substrate is within the predetermined range of quantities.
Claim 3
Dependent Claim
28 words
The method as defined in claim 1, wherein the wavelength of substantially all of the plurality of predetermined wavelengths of the light source is at least 80 nm.
Claim 4
Dependent Claim
33 words
The method as defined in claim 2, wherein the wavelength of substantially all of the plurality of predetermined wavelengths of the light source is in the range of 250 nm to 800 nm.
Claim 5
Dependent Claim
29 words
The method as defined in claim 2, wherein the wavelength of substantially all of the plurality of predetermined wavelengths of the light source is not greater than 100 nm.
Claim 6
Dependent Claim
18 words
The method as defined in claim 1, wherein the top surface of the semiconductor substrate is substantially planar.
Claim 7
Dependent Claim
18 words
The method as defined in claim 1, wherein the top surface of the semiconductor substrate is substantially non-planar.
Claim 8
Dependent Claim
28 words
The method as defined in claim 1, further comprising placing the semiconductor substrate in an RTP furnace having a heat source therein being directed at the semiconductor substrate.
Claim 9
Dependent Claim
43 words
The method as defined in claim 7, further comprising repeating said measuring and said comparing for the semiconductor substrate until the measured quantity of light that is reflected off the top surface of the semiconductor substrate is within the predetermined range of quantities.
Claim 10
Dependent Claim
45 words
The method as defined in claim 8, wherein the heat source directed at the semiconductor substrate has an adjustable predetermined intensity, and wherein repeating said measuring and said comparing further comprises adjusting the predetermined intensity of the heat source being directed at the semiconductor substrate.
Claim 11
Dependent Claim
17 words
The method as defined in claim 1, wherein the semiconductor substrate is a single crystal semiconductor wafer.
Claim 12
Independent Claim
242 words
A method of regulating heat treatment of a semiconductor substrate having a top surface, the method comprising: directing a heat source at a predetermined intensity at the semiconductor substrate; focusing a light source having a predetermined wavelength on the top surface of the semiconductor substrate; measuring the quantity of light at the predetermined wavelength that is reflected off the top surface of the semiconductor substrate from the light source; comparing the measured quantity of light at the predetermined wavelength that is reflected off the top surface of the semiconductor substrate to a range of predetermined quantities of light at the predetermined wavelength that were reflected off the top surface of a plurality of substantially similar semiconductor substrates in shape and geometry from a substantially similar light source, the plurality of substantially similar semiconductor substrates in shape and geometry having been subjected to varied heat treatments; and adjusting the predetermined intensity of the heat source being directed at the semiconductor substrate while repeating said measuring and said comparing until the measured quantity of light at the predetermined wavelength that is reflected off the top surface of the semiconductor substrate is within said range of predetermined quantities of light at the predetermined wavelength that were reflected off the respective top surfaces of the plurality of substantially similar semiconductor substrates in shape and geometry from said substantially similar light source, thereby obtaining for the semiconductor substrate a predetermined heat treatment of the varied heat treatments.
Claim 13
Independent Claim
242 words
A method of regulating heat treatment of a semiconductor substrate having a top surface, the method comprising: directing a heat source at a predetermined intensity at the semiconductor substrate; focusing a light source having a predetermined wavelength on the top surface of the semiconductor substrate; measuring the quantity of light at the predetermined wavelength that is reflected off the top surface of the semiconductor substrate from the light source; comparing the measured quantity of light at the predetermined wavelength that is reflected off the top surface of the semiconductor substrate to a range of predetermined quantities of light at the predetermined wavelength that were reflected off the top surface of a plurality of substantially similar semiconductor substrates in shape and geometry from a substantially similar light source, the plurality of substantially similar semiconductor substrates in shape and geometry having been subjected to varied heat treatments; and adjusting the predetermined intensity of the heat source being directed at the semiconductor substrate while repeating said measuring and said comparing until the measured quantity of light at the predetermined wavelength that is reflected off the top surface of the semiconductor substrate is within said range of predetermined quantities of light at the predetermined wavelength that were reflected off the respective top surfaces of the plurality of substantially similar semiconductor substrates in shape and geometry from said substantially similar light source, thereby obtaining for the semiconductor substrate a predetermined heat treatment of the varied heat treatments.
Claim 14
Independent Claim
244 words
A method of regulating heat treatment of a semiconductor substrate having a top surface, the method comprising: directing a light source having a plurality of predetermined wavelengths to a top surface of a semiconductor substrate; measuring the quantity and variation thereof of light at each of the predetermined wavelengths that is reflected off the top surface of the semiconductor substrate from the light source; determining a target wavelength from among the plurality of predetermined wavelengths at which the variation of the quantity of reflected light off the top surface of the semiconductor substrate is the highest variation; directing a heat source at the semiconductor substrate; comparing the measured quantity of light at the target wavelength that is reflected off the top surface of the semiconductor substrate to the to a predetermined range of quantities indicative of a heat treatment status of a plurality of semiconductor substrates to determine whether the measured quantity of light that is reflected off the top surface of the semiconductor substrate is within the predetermined range of quantities indicative of the heat treatment status of said plurality of semiconductor substrates; and repeating said measuring and said comparing until the measured quantity of light at the target wavelength that is reflected off the top surface of the semiconductor substrate is within the predetermined range of quantities indicative of the heat treatment status of said plurality of semiconductor substrates as an indication that the semiconductor substrate has a desired heat treatment status.
Claim 15
Independent Claim
244 words
A method of regulating heat treatment of a semiconductor substrate having a top surface, the method comprising: directing a light source having a plurality of predetermined wavelengths to a top surface of a semiconductor substrate; measuring the quantity and variation thereof of light at each of the predetermined wavelengths that is reflected off the top surface of the semiconductor substrate from the light source; determining a target wavelength from among the plurality of predetermined wavelengths at which the variation of the quantity of reflected light off the top surface of the semiconductor substrate is the highest variation; directing a heat source at the semiconductor substrate; comparing the measured quantity of light at the target wavelength that is reflected off the top surface of the semiconductor substrate to the to a predetermined range of quantities indicative of a heat treatment status of a plurality of semiconductor substrates to determine whether the measured quantity of light that is reflected off the top surface of the semiconductor substrate is within the predetermined range of quantities indicative of the heat treatment status of said plurality of semiconductor substrates; and repeating said measuring and said comparing until the measured quantity of light at the target wavelength that is reflected off the top surface of the semiconductor substrate is within the predetermined range of quantities indicative of the heat treatment status of said plurality of semiconductor substrates as an indication that the semiconductor substrate has a desired heat treatment status.
Claim 16
Dependent Claim
32 words
The method as defined in claim 12, wherein both the heat source and the semiconductor substrate are in a rapid thermal processing furnace, and wherein the heat source is an RTP lamp.
Claim 17
Dependent Claim
16 words
The method as defined in claim 12, wherein the heat source is a resistance heat source.
Claim 18
Dependent Claim
16 words
The method as defined in claim 12, wherein the heat source is a plasma heat source.
Claim 19
Dependent Claim
17 words
The method as defined in claim 12, wherein the heat source is a laser annealing heat source.
Claim 20
Dependent Claim
28 words
The method as defined in claim 12, wherein the wavelength of substantially all of the plurality of predetermined wavelengths of the light source is at least 80 nm.
Claim 21
Dependent Claim
33 words
The method as defined in claim 17, wherein the wavelength of substantially all of the plurality of predetermined wavelengths of the light source is in the range of 250 nm to 800 nm.
Claim 22
Dependent Claim
29 words
The method as defined in claim 17, wherein the wavelength of substantially all of the plurality of predetermined wavelengths of the light source is not greater than 100 nm.
Claim 23
Dependent Claim
17 words
The method as defined in claim 12, wherein the semiconductor substrate is a single crystal semiconductor wafer.
Claim 24
Dependent Claim
18 words
The method as defined in claim 12, wherein the top surface of the semiconductor substrate is substantially non-planar.
Claim 25
Dependent Claim
18 words
The method as defined in claim 12, wherein the top surface of the semiconductor substrate is substantially planar.
Claim 26
Dependent Claim
45 words
The method as defined in claim 12, wherein the heat source directed at the semiconductor substrate has an adjustable predetermined intensity, and wherein repeating said measuring and said comparing further comprises adjusting the predetermined intensity of the heat source being directed at the semiconductor substrate.
Claim 27
Dependent Claim
43 words
The method as defined in claim 12, wherein the heat source is adjustable to a predetermined intensity, and wherein said repeating of said measuring and said comparing further comprises adjusting the predetermined intensity of the heat source being directed at the semiconductor substrate.
Claim 28
Independent Claim
346 words
A method of regulating heat treatment of a semiconductor substrate having a top surface, the method comprising: directing a light source having a plurality of predetermined wavelengths to a top surface of a semiconductor substrate, wherein the wavelength of substantially all of the plurality of predetermined wavelengths of the light source is in a range of at least one of: about 80 nm to about 100 nm; and about 250 nm to about 800 nm; measuring the quantity and variation thereof of light at each of the predetermined wavelengths that is reflected off the top surface of the semiconductor substrate from the light source; determining a target wavelength from among the plurality of predetermined wavelengths at which the variation of the quantity of reflected light off the top surface of the semiconductor substrate is the highest variation; directing an RTP lamp heat source at the semiconductor substrate, the semiconductor substrate being situated in a rapid thermal processing furnace, wherein the heat source has an adjustable predetermined intensity; directing a light source having the target wavelength on the top surface of the semiconductor substrate; measuring the quantity of light at the target wavelength that is reflected off the top surface of the semiconductor substrate from the light source; comparing the measured quantity of light at the target wavelength that is reflected off the top surface of the semiconductor substrate to a predetermined range of quantities indicative of a heat treatment status of a plurality of semiconductor substrates to determine whether the measured quantity of light that is reflected off the top surface of the semiconductor substrate is within the predetermined range of quantities indicative of the heat treatment status of said plurality of semiconductor substrates; and repeating said measuring and said comparing while adjusting the predetermined intensity of the heat source being directed at the semiconductor substrate until the measured quantity of light at the target wavelength that is reflected off the top surface of the semiconductor substrate is within the predetermined range of quantities indicative of the heat treatment status of said plurality of semiconductor substrates.
Claim 29
Independent Claim
346 words
A method of regulating heat treatment of a semiconductor substrate having a top surface, the method comprising: directing a light source having a plurality of predetermined wavelengths to a top surface of a semiconductor substrate, wherein the wavelength of substantially all of the plurality of predetermined wavelengths of the light source is in a range of at least one of: about 80 nm to about 100 nm; and about 250 nm to about 800 nm; measuring the quantity and variation thereof of light at each of the predetermined wavelengths that is reflected off the top surface of the semiconductor substrate from the light source; determining a target wavelength from among the plurality of predetermined wavelengths at which the variation of the quantity of reflected light off the top surface of the semiconductor substrate is the highest variation; directing an RTP lamp heat source at the semiconductor substrate, the semiconductor substrate being situated in a rapid thermal processing furnace, wherein the heat source has an adjustable predetermined intensity; directing a light source having the target wavelength on the top surface of the semiconductor substrate; measuring the quantity of light at the target wavelength that is reflected off the top surface of the semiconductor substrate from the light source; comparing the measured quantity of light at the target wavelength that is reflected off the top surface of the semiconductor substrate to a predetermined range of quantities indicative of a heat treatment status of a plurality of semiconductor substrates to determine whether the measured quantity of light that is reflected off the top surface of the semiconductor substrate is within the predetermined range of quantities indicative of the heat treatment status of said plurality of semiconductor substrates; and repeating said measuring and said comparing while adjusting the predetermined intensity of the heat source being directed at the semiconductor substrate until the measured quantity of light at the target wavelength that is reflected off the top surface of the semiconductor substrate is within the predetermined range of quantities indicative of the heat treatment status of said plurality of semiconductor substrates.
References Cited (Backward Citations)
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