US5618461A
Expired / Lapsed
US
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Reflectance method for accurate process calibration in semiconductor wafer heat treatment
Assignee: Micron Technology Inc
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Filing: 1994-11-30
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Granted: 1997-04-08
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Expires: 2014-11-30
Abstract
Abstract A nondestructive product level calibration method which is based on reflectance of intensity of UV and visible light that is measured from the top surface of a semiconductor wafer in a RTP closed loop process control environment in which the temperature of the wafer is regulated as a function of reflectivity of radiation at a preselected wavelength from the top surface of the wafer. In the method, sheet resistance of the wafer is measured as a function of the intensity of the UV and IR light directed at the wafer over a predetermined temperature and time range. Then, the reflectance intensity off wafer is measured to develop a model of the top surface. The reflectance model will indicate a wavelength where the reflectance is the greatest. Next, the wafer is subjected to UV radiation at the most sensitive wavelength and the reflectance is plotted against intensity of heat treatment. Then, notice is taken that the reflectance detected directly corresponds to a ratio of temperature over time measured in the first step. Thus, the reflectance at a particular wavelength of UV light corresponds to a specific and discrete temperature so that the degree of heat treatment to which the wafer has been exposed is known.
Inventors
- 👤 Robert J. Burke
- 👤 Russell C. Zahorik
- 👤 Paul A. Paduano
- 👤 Randhir P. S. Thakur
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 13:01
CPC Classifications
G; G05; G05D; G05D23/00; G05D23/19; G05D23/27; G01; G01K; G01K11/00; G01K11/12; G01K11/14; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/70605; G03F7/70616; G05D23/1919; G05D23/20; G05D23/26; H; H10; H10P; H10P74/00; H10P74/20; H10P74/203
Claims Analysis
Total Claims: 34
Claim 1
Independent Claim
340 words
A method of measuring a heat treatment status indicative of a heat treatment applied to a semiconductor wafer, the method comprising the steps of: a) directing a light source having a plurality of predetermined wavelengths to a top surface of a first semiconductor wafer; b) measuring the variation in the quantity of light at each of the predetermined wavelengths that is reflected off the top surface of the first semiconductor wafer from the light source; c) determining a target wavelength from among the plurality of predetermined wavelengths at which the variation of the quantity of reflected light off the top surface of the first semiconductor wafer is the highest variation; d) directing a light source of the target wavelength to a top surface of a second semiconductor wafer that has been heat treated to a predetermined heat treatment status indicative of a heat treatment applied to the second semiconductor wafer, the first and second semiconductor wafers being substantially similar in material and in geometry; e) measuring the quantity of light at the target wavelength that is reflected off the top surface of the second semiconductor wafer; f) directing a light source of the target wavelength to a top surface of a third semiconductor wafer, the second and third semiconductor wafers being substantially similar in material and in geometry; g) measuring the quantity of light at the target wavelength that is reflected off the top surface of the third semiconductor wafer; and h) comparing the measured quantity of light that is reflected off the top surface of the second semiconductor wafer and the top surface of the third semiconductor wafer to determine whether there is substantially no difference between the measured quantity of light that is reflected off the top surface of the second semiconductor wafer and the measured quantity of light that is reflected off the top surface of the third semiconductor wafer as an indication that the third semiconductor wafer has a heat treatment status that is substantially the same as the heat treatment of the second semiconductor wafer.
Claim 2
Independent Claim
340 words
A method of measuring a heat treatment status indicative of a heat treatment applied to a semiconductor wafer, the method comprising the steps of: a) directing a light source having a plurality of predetermined wavelengths to a top surface of a first semiconductor wafer; b) measuring the variation in the quantity of light at each of the predetermined wavelengths that is reflected off the top surface of the first semiconductor wafer from the light source; c) determining a target wavelength from among the plurality of predetermined wavelengths at which the variation of the quantity of reflected light off the top surface of the first semiconductor wafer is the highest variation; d) directing a light source of the target wavelength to a top surface of a second semiconductor wafer that has been heat treated to a predetermined heat treatment status indicative of a heat treatment applied to the second semiconductor wafer, the first and second semiconductor wafers being substantially similar in material and in geometry; e) measuring the quantity of light at the target wavelength that is reflected off the top surface of the second semiconductor wafer; f) directing a light source of the target wavelength to a top surface of a third semiconductor wafer, the second and third semiconductor wafers being substantially similar in material and in geometry; g) measuring the quantity of light at the target wavelength that is reflected off the top surface of the third semiconductor wafer; and h) comparing the measured quantity of light that is reflected off the top surface of the second semiconductor wafer and the top surface of the third semiconductor wafer to determine whether there is substantially no difference between the measured quantity of light that is reflected off the top surface of the second semiconductor wafer and the measured quantity of light that is reflected off the top surface of the third semiconductor wafer as an indication that the third semiconductor wafer has a heat treatment status that is substantially the same as the heat treatment of the second semiconductor wafer.
Claim 3
Dependent Claim
28 words
The method as defined in claim 1, wherein the wavelength of substantially all of the plurality of predetermined wavelengths of the light source is at least 80 nm.
Claim 4
Dependent Claim
33 words
The method as defined in claim 2, wherein the wavelength of substantially all of the plurality of predetermined wavelengths of the light source is in the range of 250 nm to 800 nm.
Claim 5
Dependent Claim
29 words
The method as defined in claim 2, wherein the wavelength of substantially all of the plurality of predetermined wavelengths of the light source is not greater than 100 nm.
Claim 6
Dependent Claim
19 words
The method as defined in claim 1, wherein the first, second, and third semiconductor wafers are single crystal wafers.
Claim 7
Dependent Claim
24 words
The method as defined in claim 1, wherein the top surfaces of each of the first, second, and third semiconductor wafers are substantially planar.
Claim 8
Dependent Claim
24 words
The method as defined in claim 1, wherein the top surfaces of each of the first, second, and third semiconductor wafers are substantially non-planar.
Claim 9
Dependent Claim
33 words
The method as defined in claim 1, further comprising the step of placing the third semiconductor wafer in an RTP furnace having a heat source therein being directed at the third semiconductor wafer.
Claim 10
Dependent Claim
65 words
The method as defined in claim 8, further comprising the step of repeating the measuring and comparing steps for the third semiconductor wafer until there is substantially no difference between the measured quantity of light that is reflected off the top surface of the third semiconductor wafer and the measured quantity of light that is reflected off the top surface of the second semiconductor wafer.
Claim 11
Dependent Claim
48 words
The method as defined in claim 9, wherein the heat source is adjustable to a predetermined intensity, and wherein the step of repeating the measuring and comparing steps further comprises the step of adjusting the predetermined intensity of the heat source being directed at the third semiconductor wafer.
Claim 12
Independent Claim
139 words
A method of deriving a heat treatment status of a production semiconductor wafer having a top surface, the method comprising the steps of: a) focusing a light source having a predetermined wavelength on the top surface of the production semiconductor wafer; b) measuring the quantity of light at the predetermined wavelength that is reflected off the top surface of the production semiconductor wafer from the light source; c) comparing the measured quantity of light that is reflected off the top surface of the production semiconductor wafer to predetermined quantities of light at the predetermined wavelength that were reflected off the respective top surface of substantially similar semiconductor wafers from a substantially similar light source, the substantially similar semiconductor wafers having been subjected to varied heat treatments; and d) determining the heat treatment status for the production semiconductor wafer therefrom.
Claim 13
Independent Claim
139 words
A method of deriving a heat treatment status of a production semiconductor wafer having a top surface, the method comprising the steps of: a) focusing a light source having a predetermined wavelength on the top surface of the production semiconductor wafer; b) measuring the quantity of light at the predetermined wavelength that is reflected off the top surface of the production semiconductor wafer from the light source; c) comparing the measured quantity of light that is reflected off the top surface of the production semiconductor wafer to predetermined quantities of light at the predetermined wavelength that were reflected off the respective top surface of substantially similar semiconductor wafers from a substantially similar light source, the substantially similar semiconductor wafers having been subjected to varied heat treatments; and d) determining the heat treatment status for the production semiconductor wafer therefrom.
Claim 14
Dependent Claim
29 words
The method as defined in claim 11, wherein the respective top surfaces of each of the production semiconductor wafer and the substantially similar semiconductor wafers are diffuse in nature.
Claim 15
Dependent Claim
29 words
The method as defined in claim 11, wherein the respective top surfaces of each of the production semiconductor wafer and the substantially similar semiconductor wafers are specular in nature.
Claim 16
Dependent Claim
44 words
The method as defined in claim 11, further comprising the step of placing the production semiconductor wafer in a RTP furnace having a heat source therein being directed at the production semiconductor wafer, and wherein the heat source is adjustable to a predetermined intensity.
Claim 17
Dependent Claim
66 words
The method as defined in claim 14, further comprising the step of adjusting the predetermined intensity of the heat source being directed at the third semiconductor wafer while repeating the measuring, comparing, and determining steps for the production semiconductor wafer until the measured quantity of light that is reflected off the top surface of the production semiconductor wafer is substantially the same as a predetermined quantity.
Claim 18
Independent Claim
202 words
A method of regulating heat treatment of a production semiconductor wafer having a top surface, the method comprising the steps of: a) directing a heat source at a predetermined intensity at the production semiconductor wafer; b) focusing a light source having predetermined wavelength on the top surface of the production semiconductor wafer; c) measuring the quantity of light at the predetermined wavelength that is reflected off the top surface of the production semiconductor wafer from the light source; d) comparing the measured quantity of light that is reflected off the top surface of the production semiconductor wafer to predetermined quantities of light at the predetermined wavelength that were reflected off the top surface of substantially similar semiconductor wafers from a substantially similar light source, the substantially similar semiconductor wafers having been subjected to varied heat treatments; and e) adjusting the predetermined intensity of the heat source being directed at the production semiconductor wafer while repeating the measuring and comparing steps until the measured quantity of light that is reflected off the top surface of the production semiconductor wafer is substantially the same as a predetermined quantity, thereby obtaining for the production semiconductor wafer a predetermined heat treatment of the varied heat treatments.
Claim 19
Independent Claim
202 words
A method of regulating heat treatment of a production semiconductor wafer having a top surface, the method comprising the steps of: a) directing a heat source at a predetermined intensity at the production semiconductor wafer; b) focusing a light source having predetermined wavelength on the top surface of the production semiconductor wafer; c) measuring the quantity of light at the predetermined wavelength that is reflected off the top surface of the production semiconductor wafer from the light source; d) comparing the measured quantity of light that is reflected off the top surface of the production semiconductor wafer to predetermined quantities of light at the predetermined wavelength that were reflected off the top surface of substantially similar semiconductor wafers from a substantially similar light source, the substantially similar semiconductor wafers having been subjected to varied heat treatments; and e) adjusting the predetermined intensity of the heat source being directed at the production semiconductor wafer while repeating the measuring and comparing steps until the measured quantity of light that is reflected off the top surface of the production semiconductor wafer is substantially the same as a predetermined quantity, thereby obtaining for the production semiconductor wafer a predetermined heat treatment of the varied heat treatments.
Claim 20
Independent Claim
355 words
A method of regulating heat treatment of a production semiconductor wafer having a top surface, the method comprising the steps of: a) directing a light source having a plurality of predetermined wavelengths to a top surface of a first semiconductor wafer; b) measuring the variation in the quantity of light at each of the predetermined wavelengths that is reflected off the top surface of the first semiconductor wafer from the light source; c) determining a target wavelength from among the plurality of predetermined wavelengths at which the variation of the quantity of reflected light off the top surface of the first semiconductor wafer is the highest variation; d) directing a light source of the target wavelength to a top surface of a second semiconductor wafer that has been heat treated to a predetermined heat treatment status indicative of a heat treatment applied to the second semiconductor wafer, the first and second semiconductor wafers being substantially similar in material and in geometry; e) measuring the quantity of light at the target wavelength that is reflected off the top surface of the second semiconductor wafer; f) directing a heat source at the production semiconductor wafer; g) directing a light source having the target wavelength on the top surface of the production semiconductor wafer; h) measuring the quantity of light at the target wavelength that is reflected off the top surface of the production semiconductor wafer from the light source; i) comparing the measured quantity of light that is reflected off the top surface of the production semiconductor wafer to the quantity of light at the target wavelength that is reflected off the top surface of the second semiconductor wafer; and j) repeating the measuring and comparing steps until the measured quantity of light that is reflected off the top surface of the production semiconductor wafer is substantially the same as the quantity of light at the target wavelength that is reflected off the top surface of the second semiconductor wafer as an indication that the production semiconductor wafer has a heat treatment status that is substantially the same as the heat treatment of the second semiconductor wafer.
Claim 21
Independent Claim
355 words
A method of regulating heat treatment of a production semiconductor wafer having a top surface, the method comprising the steps of: a) directing a light source having a plurality of predetermined wavelengths to a top surface of a first semiconductor wafer; b) measuring the variation in the quantity of light at each of the predetermined wavelengths that is reflected off the top surface of the first semiconductor wafer from the light source; c) determining a target wavelength from among the plurality of predetermined wavelengths at which the variation of the quantity of reflected light off the top surface of the first semiconductor wafer is the highest variation; d) directing a light source of the target wavelength to a top surface of a second semiconductor wafer that has been heat treated to a predetermined heat treatment status indicative of a heat treatment applied to the second semiconductor wafer, the first and second semiconductor wafers being substantially similar in material and in geometry; e) measuring the quantity of light at the target wavelength that is reflected off the top surface of the second semiconductor wafer; f) directing a heat source at the production semiconductor wafer; g) directing a light source having the target wavelength on the top surface of the production semiconductor wafer; h) measuring the quantity of light at the target wavelength that is reflected off the top surface of the production semiconductor wafer from the light source; i) comparing the measured quantity of light that is reflected off the top surface of the production semiconductor wafer to the quantity of light at the target wavelength that is reflected off the top surface of the second semiconductor wafer; and j) repeating the measuring and comparing steps until the measured quantity of light that is reflected off the top surface of the production semiconductor wafer is substantially the same as the quantity of light at the target wavelength that is reflected off the top surface of the second semiconductor wafer as an indication that the production semiconductor wafer has a heat treatment status that is substantially the same as the heat treatment of the second semiconductor wafer.
Claim 22
Dependent Claim
33 words
The method as defined in claim 17, wherein both the heat source and the production semiconductor wafer are in a rapid thermal processing furnace, and wherein the heat source is an RTP lamp.
Claim 23
Dependent Claim
16 words
The method as defined in claim 17, wherein the heat source is a resistance heat source.
Claim 24
Dependent Claim
16 words
The method as defined in claim 17, wherein the heat source is a plasma heat source.
Claim 25
Dependent Claim
17 words
The method as defined in claim 17, wherein the heat source is a laser annealing heat source.
Claim 26
Dependent Claim
28 words
The method as defined in claim 17, wherein the wavelength of substantially all of the plurality of predetermined wavelengths of the light source is at least 80 nm.
Claim 27
Dependent Claim
33 words
The method as defined in claim 22, wherein the wavelength of substantially all of the plurality of predetermined wavelengths of the light source is in the range of 250 nm to 800 nm.
Claim 28
Dependent Claim
29 words
The method as defined in claim 22, wherein the wavelength of substantially all of the plurality of predetermined wavelengths of the light source is not greater than 100 nm.
Claim 29
Dependent Claim
19 words
The method as defined in claim 17, wherein the first, second, and production semiconductor wafers are single crystal wafers.
Claim 30
Dependent Claim
30 words
The method as defined in claim 17, wherein the respective top surfaces of each of the production semiconductor wafer, and the first and the second semiconductor wafers are substantially non-planar.
Claim 31
Dependent Claim
30 words
The method as defined in claim 17, wherein the respective top surfaces of each of the production semiconductor wafer, and the first and the second semiconductor wafers are substantially planar.
Claim 32
Dependent Claim
54 words
The method as defined in claim 17, further wherein the heat source directed at the production semiconductor wafer has an adjustable predetermined intensity, and wherein the step of repeating the measuring and comparing steps further comprises the step of adjusting the predetermined intensity of the heat source being directed at the production semiconductor wafer.
Claim 33
Independent Claim
436 words
A method of regulating heat treatment of a production semiconductor wafer having a top surface, the method comprising the steps of: a) directing a light source having a plurality of predetermined wavelengths to a top surface of a first semiconductor wafer, wherein the wavelength of substantially all of the plurality of predetermined wavelengths of the light source is in a range of at least one of: (1) about 80 nm to about 100 nm; and (2) about 250 nm to about 800 nm; b) measuring the variation in the quantity of light at each of the predetermined wavelengths that is reflected off the top surface of the first semiconductor wafer from the light source; c) determining a target wavelength from among the plurality of predetermined wavelengths at which the variation of the quantity of reflected light off the top surface of the first semiconductor wafer is the highest variation; d) directing a light source of the target wavelength to a top surface of a second semiconductor wafer that has been heat treated to a predetermined heat treatment status indicative of a heat treatment applied to the second semiconductor wafer, the first and second semiconductor wafers being substantially similar in material and in geometry; e) measuring the quantity of light at the target wavelength that is reflected off the top surface of the second semiconductor wafer; f) directing an RTP lamp heat source at the production semiconductor wafer, the production semiconductor wafer being situated in a rapid thermal processing furnace, wherein the heat source has an adjustable predetermined intensity; g) directing a light source having the target wavelength on the top surface of the production semiconductor wafer: h) measuring the quantity of light at the target wavelength that is reflected off the top surface of the production semiconductor wafer from the light source; i) comparing the measured quantity of light that is reflected off the top surface of the production semiconductor wafer to the quantity of light at the target wavelength that is reflected off the top surface of the second semiconductor wafer; and j) repeating the measuring and comparing steps while adjusting the predetermined intensity of the heat source being directed at the production semiconductor water until the measured quantity of light that is reflected off the top surface of the production semiconductor wafer is substantially the same as the quantity of light at the target wavelength that is reflected off the top surface of the second semiconductor wafer as an indication that the production semiconductor wafer has a heat treatment status that is substantially the same as the heat treatment of the second semiconductor wafer.
Claim 34
Independent Claim
436 words
A method of regulating heat treatment of a production semiconductor wafer having a top surface, the method comprising the steps of: a) directing a light source having a plurality of predetermined wavelengths to a top surface of a first semiconductor wafer, wherein the wavelength of substantially all of the plurality of predetermined wavelengths of the light source is in a range of at least one of: (1) about 80 nm to about 100 nm; and (2) about 250 nm to about 800 nm; b) measuring the variation in the quantity of light at each of the predetermined wavelengths that is reflected off the top surface of the first semiconductor wafer from the light source; c) determining a target wavelength from among the plurality of predetermined wavelengths at which the variation of the quantity of reflected light off the top surface of the first semiconductor wafer is the highest variation; d) directing a light source of the target wavelength to a top surface of a second semiconductor wafer that has been heat treated to a predetermined heat treatment status indicative of a heat treatment applied to the second semiconductor wafer, the first and second semiconductor wafers being substantially similar in material and in geometry; e) measuring the quantity of light at the target wavelength that is reflected off the top surface of the second semiconductor wafer; f) directing an RTP lamp heat source at the production semiconductor wafer, the production semiconductor wafer being situated in a rapid thermal processing furnace, wherein the heat source has an adjustable predetermined intensity; g) directing a light source having the target wavelength on the top surface of the production semiconductor wafer: h) measuring the quantity of light at the target wavelength that is reflected off the top surface of the production semiconductor wafer from the light source; i) comparing the measured quantity of light that is reflected off the top surface of the production semiconductor wafer to the quantity of light at the target wavelength that is reflected off the top surface of the second semiconductor wafer; and j) repeating the measuring and comparing steps while adjusting the predetermined intensity of the heat source being directed at the production semiconductor water until the measured quantity of light that is reflected off the top surface of the production semiconductor wafer is substantially the same as the quantity of light at the target wavelength that is reflected off the top surface of the second semiconductor wafer as an indication that the production semiconductor wafer has a heat treatment status that is substantially the same as the heat treatment of the second semiconductor wafer.
References Cited (Backward Citations)
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