US5770103A
Expired / Lapsed
US
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Composition and method for polishing a composite comprising titanium
Assignee: DuPont Electronic Materials Holding Inc
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Filing: 1997-07-08
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Granted: 1998-06-23
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Expires: 2017-07-08
Abstract
Abstract Aqueous slurries are provided, which are useful for the chemical-mechanical polishing of substrates comprising titanium, comprising: water, submicron abrasive particles, an oxidizing agent, and a mono-, di-, or tri-substituted phenol wherein at least one of the substituted functional groups is polar. Optionally the compositions may also comprise a compound to suppress the rate of removal of silica. The slurries are useful on substrates which also comprise tungsten, aluminum or copper.
Inventors
- 👤 Huey-Ming Wang
- 👤 Guangwei Wu
- 👤 Lee Melbourne Cook
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 09:14
CPC Classifications
C; C09; C09K; C09K13/00; C09K3/00; C09K3/14; C09K3/1454; C09K3/1463; C09G; C09G1/00; C09G1/02; H; H10; H10P; H10P52/00; H10P52/40; H10P52/403; H10P95/00; H10P95/06; H10P95/062
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
43 words
A composition, which is an aqueous slurry useful for the chemical-mechanical polishing of substrates which comprise titanium, comprising: water, submicron abrasive particles, an oxidizing agent, and a mono-, di-, or tri-substituted phenol wherein at least one of the substituted functional groups is polar.
Claim 2
Dependent Claim
43 words
A composition, which is an aqueous slurry useful for the chemical-mechanical polishing of substrates which comprise titanium, comprising: water, submicron abrasive particles, an oxidizing agent, and a mono-, di-, or tri-substituted phenol wherein at least one of the substituted functional groups is polar.
Claim 3
Dependent Claim
13 words
A composition according to claim 1 wherein said submicron abrasive particles are alumina.
Claim 4
Dependent Claim
13 words
A composition according to claim 1 wherein said oxidizing agent comprises potassium iodate.
Claim 5
Dependent Claim
14 words
A composition according to claim 3 wherein said oxidizing agent further comprises hydrogen peroxide.
Claim 6
Dependent Claim
20 words
A composition according to claim 1 further comprising a compound or compounds which suppress the rate of removal of silica.
Claim 7
Dependent Claim
20 words
A composition according to claim 4 further comprising a compound or compounds which suppress the rate of removal of silica.
Claim 8
Dependent Claim
20 words
A composition according to claim 2 further comprising a compound or compounds which suppress the rate of removal of silica.
Claim 9
Dependent Claim
20 words
A composition according to claim 3 further comprising a compound or compounds which suppress the rate of removal of silica.
Claim 10
Dependent Claim
21 words
A composition according to claim 1 wherein said mono-, di-, or tri-substituted phenol is salicylic acid or a substuted salicylic acid.
Claim 11
Independent Claim
70 words
A method of polishing a substrate comprising titanium wherein said substrate is pressed against a polishing pad, said substrate and said pad are moved relative to each other, and a polishing composition is applied to said pad during the polishing operation, said polishing composition comprising: water, submicron abrasive particles, an oxidizing agent, and a mono-, di-, or tri-substituted phenol wherein at least one of the substituted functional groups is polar.
Claim 12
Independent Claim
70 words
A method of polishing a substrate comprising titanium wherein said substrate is pressed against a polishing pad, said substrate and said pad are moved relative to each other, and a polishing composition is applied to said pad during the polishing operation, said polishing composition comprising: water, submicron abrasive particles, an oxidizing agent, and a mono-, di-, or tri-substituted phenol wherein at least one of the substituted functional groups is polar.
Claim 13
Dependent Claim
13 words
A method according to claim 10 wherein said submicron abrasive particles are alumina.
Claim 14
Dependent Claim
13 words
A method according to claim 10 wherein said oxidizing agent comprises potassium iodate.
Claim 15
Dependent Claim
14 words
A method according to claim 12 wherein said oxidizing agent further comprises hydrogen peroxide.
Claim 16
Dependent Claim
21 words
A method according to claim 10 wherein said composition further comprises a compound which suppresses the rate of removal of silica.
Claim 17
Dependent Claim
12 words
A method according to claim 10 wherein said substrate also comprises tungsten.
Claim 18
Dependent Claim
12 words
A method according to claim 10 wherein said substrate also comprises aluminum.
Claim 19
Dependent Claim
12 words
A method according to claim 10 wherein said substrate also comprises copper.
References Cited (Backward Citations)
US4954142A
Cited
US4959113A
Cited
US4959113C1
Cited
US5244534A
Cited
US5391258A
Cited
US5476606A
Cited
US5382272A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2001-06-22 | 2001-12-22 | 2002-06-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-06-22 | 2005-12-22 | 2006-06-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-06-22 | 2009-12-22 | 2010-06-23 | $7700.00 | Window Closed / Lapsed |