US6706557B2
Expired / Lapsed
US
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Method of fabricating stacked die configurations utilizing redistribution bond pads
Assignee: Micron Technology Inc
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Filing: 2003-04-24
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Granted: 2004-03-16
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Expires: 2023-04-24
Abstract
Abstract A stacked semiconductor package including a plurality of stacked semiconductor devices on a substrate, and a method of forming the same. The semiconductor devices are stacked in an active surface-to-backside configuration. The top semiconductor die is flipped over to face the active surface of the semiconductor die directly below. An electrical connector can extend from a bond pad on the top semiconductor die to a redistribution circuit on the semiconductor die below. The redistribution circuit can be electrically connected to a substrate. Alternatively, an electrical connector extends from a bond pad on the top semiconductor die to a bond pad on a substrate.
Inventors
- 👤 Michel Koopmans
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 10:55
CPC Classifications
H; H10; H10W; H10W70/00; H10W70/60; H10W70/67; H10W70/68; H10W72/00; H10W72/20; H10W90/00; H10W72/01; H10W72/0198; H10W72/251; H10W72/29; H10W72/50; H10W72/531; H10W72/536; H10W72/5363; H10W72/551; H10W72/552; H10W72/5522; H10W72/5524; H10W72/59; H10W72/851; H10W72/853; H10W72/865; H10W72/874; H10W72/884; H10W72/90; H10W72/931; H10W72/934; H10W72/941; H10W72/944; H10W72/9445; H10W74/00; H10W90/20; H10W90/231; H10W90/24; H10W90/291; H10W90/701; H10W90/721; H10W90/722; H10W90/731; H10W90/732; H10W90/734; H10W90/751; H10W90/754; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49124; Y10T29/49169; Y10T29/49171; Y10T29/49172; Y10T29/49174; Y10T29/49176; Y10T29/49204; Y10T29/49208; Y10T29/49222; Y10T83/00; Y10T83/04; Y10T83/0448; Y10T83/0467
Claims Analysis
Total Claims: 53
Claim 1
Independent Claim
187 words
A method of forming a stacked semiconductor assembly, comprising: providing a first semiconductor die including an active surface and a back side, the active surface including, a plurality of bond pads, a plurality of redistribution pads and a plurality of metal traces thereon, the plurality of redistribution pads electrically independent from integrated circuitry in the first semiconductor die, at least one metal trace of the plurality of metal traces connecting at least a first redistribution pad of the plurality of redistribution pads and at least a second redistribution pad of the plurality of redistribution pads; providing a second semiconductor die including an active surface and a back side, the active surface of the first semiconductor die facing the active surface of the second semiconductor die, the active surface of the second semiconductor die including a plurality of bond pads thereon; electrically connecting the first redistribution pad of the first semiconductor die and a corresponding bond pad of the plurality of bond pads of the second semiconductor die; and electrically connecting the second redistribution pad of the first semiconductor die and a corresponding contact area of a substrate.
Claim 2
Independent Claim
187 words
A method of forming a stacked semiconductor assembly, comprising: providing a first semiconductor die including an active surface and a back side, the active surface including, a plurality of bond pads, a plurality of redistribution pads and a plurality of metal traces thereon, the plurality of redistribution pads electrically independent from integrated circuitry in the first semiconductor die, at least one metal trace of the plurality of metal traces connecting at least a first redistribution pad of the plurality of redistribution pads and at least a second redistribution pad of the plurality of redistribution pads; providing a second semiconductor die including an active surface and a back side, the active surface of the first semiconductor die facing the active surface of the second semiconductor die, the active surface of the second semiconductor die including a plurality of bond pads thereon; electrically connecting the first redistribution pad of the first semiconductor die and a corresponding bond pad of the plurality of bond pads of the second semiconductor die; and electrically connecting the second redistribution pad of the first semiconductor die and a corresponding contact area of a substrate.
Claim 3
Dependent Claim
48 words
The method according to claim 1 , further comprising disposing the back side of the first semiconductor die on the substrate and electrically connecting at least one bond pad of the plurality of bond pads of the first semiconductor die to a corresponding contact area of the substrate.
Claim 4
Dependent Claim
34 words
The method according to claim 1 , wherein the electrically connecting the second redistribution pad and the corresponding contact area comprises extending a discrete conductive element between the second redistribution pad and the substrate.
Claim 5
Dependent Claim
37 words
The method according to claim 1 , further comprising: providing at least one additional semiconductor die on the substrate; and disposing the back side of the first semiconductor die on the at least one additional semiconductor die.
Claim 6
Dependent Claim
23 words
The method according to claim 1 , further comprising providing an insulative layer between the first semiconductor die and the semiconductor second die.
Claim 7
Dependent Claim
45 words
The method according to claim 1 , wherein the electrically connecting the first redistribution pad and the corresponding bond pad comprises extending a conductive element between the corresponding bond pad of the second semiconductor die and the first redistribution pad of the first semiconductor die.
Claim 8
Dependent Claim
37 words
The method according to claim 1 , wherein the providing the second semiconductor die comprises substantially vertically aligning at least one edge of the second semiconductor die and at least one edge of the first semiconductor die.
Claim 9
Dependent Claim
14 words
The method according to claim 1 , further comprising encapsulating the stacked semiconductor assembly.
Claim 10
Independent Claim
233 words
A method of forming a stacked semiconductor package, comprising: providing a substrate including a plurality of contact areas; providing a first semiconductor die including an active surface, a back side, and a plurality of peripheral edges, the back side disposed above the substrate, the active surface including a plurality of bond pads thereon; at least one redistribution bond pad circuit on the active surface of the first semiconductor die, the at least one redistribution bond pad electrically independent from integrated circuitry of the first semiconductor die and including a plurality of redistribution bond pads; disposing a top semiconductor die above the first semiconductor die, the top semiconductor die including an active surface, a back side and a plurality of peripheral edges, the active surface of the top semiconductor die facing the active surface of the first semiconductor die and including a plurality of bond pads thereon, at least one edge of the plurality of peripheral edges of the top semiconductor die extending laterally beyond at least one corresponding peripheral edge of the plurality of peripheral edges of the first semiconductor die; and extending at least one conductive element between at least one bond pad of the plurality of bond pads on the top semiconductor die and a corresponding contact area of the plurality of contact areas of the substrate adjacent to the at least one corresponding peripheral edge of the first semiconductor die.
Claim 11
Independent Claim
233 words
A method of forming a stacked semiconductor package, comprising: providing a substrate including a plurality of contact areas; providing a first semiconductor die including an active surface, a back side, and a plurality of peripheral edges, the back side disposed above the substrate, the active surface including a plurality of bond pads thereon; at least one redistribution bond pad circuit on the active surface of the first semiconductor die, the at least one redistribution bond pad electrically independent from integrated circuitry of the first semiconductor die and including a plurality of redistribution bond pads; disposing a top semiconductor die above the first semiconductor die, the top semiconductor die including an active surface, a back side and a plurality of peripheral edges, the active surface of the top semiconductor die facing the active surface of the first semiconductor die and including a plurality of bond pads thereon, at least one edge of the plurality of peripheral edges of the top semiconductor die extending laterally beyond at least one corresponding peripheral edge of the plurality of peripheral edges of the first semiconductor die; and extending at least one conductive element between at least one bond pad of the plurality of bond pads on the top semiconductor die and a corresponding contact area of the plurality of contact areas of the substrate adjacent to the at least one corresponding peripheral edge of the first semiconductor die.
Claim 12
Dependent Claim
39 words
The method according to claim 9 , further comprising: stacking at least one additional semiconductor die vertically on the substrate, wherein the back side of the first semiconductor die is disposed on the at least one additional semiconductor die.
Claim 13
Dependent Claim
35 words
The method according to claim 9 , further comprising electrically connecting at least one bond pad of the plurality of bond pads of the first semiconductor die and a corresponding contact area of the substrate.
Claim 14
Dependent Claim
49 words
The method according to claim 9 , further comprising electrically connecting a first redistribution bond pad of the plurality of redistribution bond pads and a second redistribution bond pad of the plurality of redistribution bond pads, the second redistribution bond pad proximate the perimeter of the first semiconductor die.
Claim 15
Dependent Claim
58 words
The method according to claim 9 , wherein the providing the first semiconductor die comprises providing a first semiconductor die including at least one redistribution bond pad circuit on the active surface thereof, the at least one redistribution bond pad circuit independent from integrated circuitry of the first semiconductor die and including a plurality of redistribution bond pads.
Claim 16
Dependent Claim
56 words
The method according to claim 13 , wherein the providing the first semiconductor die further comprises electrically connecting a first redistribution bond pad of the plurality of redistribution bond pads and a second redistribution bond pad of the plurality of redistribution bond pads, the second redistribution bond pad proximate a perimeter of the first semiconductor die.
Claim 17
Dependent Claim
51 words
The method according to claim 14 , further comprising extending at least one connective element between at least one bond pad of the plurality of bond pads on the active surface of the first semiconductor die and the first redistribution bond pad on the active surface of the first semiconductor die.
Claim 18
Dependent Claim
24 words
The method according to claim 15 , further comprising electrically connecting the second redistribution bond pad and a corresponding contact area of the substrate.
Claim 19
Dependent Claim
33 words
The method according to claim 16 , wherein the electrically connecting comprises extending at least one discrete conductive element between the second redistribution bond pad and the corresponding contact area of the substrate.
Claim 20
Dependent Claim
26 words
The method according to claim 17 , wherein the at least one discrete conductive element comprises at least one of wire bonds, TAB elements, and leads.
Claim 21
Dependent Claim
60 words
The method according to claim 9 , wherein the extending at least one conductive element comprises extending a substantially columnar pillar between the at least one bond pad of the plurality of bond pads on the top semiconductor die and the corresponding contact area of the substrate adjacent the at least one corresponding peripheral edge of the first semiconductor die.
Claim 22
Dependent Claim
60 words
The method according to claim 9 , wherein the extending at least one conductive element comprises extending a solder ball between the at least one bond pad of the plurality of bond pads on the top semiconductor die and the corresponding contact area of the substrate adjacent to the at least one corresponding peripheral edge of the first semiconductor die.
Claim 23
Dependent Claim
43 words
The method according to claim 9 , wherein the extending the at least one conductive element comprises extending at least one conductive element from the at least one bond pad of the top semiconductor die to the corresponding contact area of the substrate.
Claim 24
Dependent Claim
23 words
The method according to claim 9 , further comprising providing an insulative layer between the first semiconductor die and the top semiconductor die.
Claim 25
Dependent Claim
20 words
The method according to claim 22 , wherein the providing the insulative layer comprises providing a layer of adhesive material.
Claim 26
Dependent Claim
14 words
The method according to claim 9 , further comprising encapsulating the stacked semiconductor package.
Claim 27
Independent Claim
73 words
A method of designing a semiconductor device to be used as a lower semiconductor device in a stacked semiconductor assembly, the method comprising: providing a first semiconductor device including an active surface and a back side, the active surface including and a plurality of bond pads thereon; and designing at least one redistribution circuit on the active surface, the at least one redistribution circuit independent from integrated circuitry in the first semiconductor device.
Claim 28
Independent Claim
73 words
A method of designing a semiconductor device to be used as a lower semiconductor device in a stacked semiconductor assembly, the method comprising: providing a first semiconductor device including an active surface and a back side, the active surface including and a plurality of bond pads thereon; and designing at least one redistribution circuit on the active surface, the at least one redistribution circuit independent from integrated circuitry in the first semiconductor device.
Claim 29
Dependent Claim
33 words
The method according to claim 25 , wherein the designing the at least one redistribution circuit comprises providing at least one first redistribution bond pad and at least one second redistribution bond pad.
Claim 30
Dependent Claim
37 words
The method according to claim 26 , wherein the designing the at least one redistribution circuit ether comprises electrically connecting the at least one first redistribution bond pad and the at least one second redistribution bond pad.
Claim 31
Dependent Claim
34 words
The method according to claim 27 , wherein the electrically connecting comprises extending a metal trace between the at least one first redistribution bond pad and the at least one second redistribution bond pad.
Claim 32
Dependent Claim
57 words
The method according to claim 26 , wherein the providing the at least one first redistribution bond pad comprises providing at least one first redistribution bond pad positioned on the active surface in a location that mirrors a location, of a corresponding bond pad of a second semiconductor device to be positioned over the first semiconductor device.
Claim 33
Dependent Claim
59 words
The method according to claim 26 , wherein the designing the at least one redistribution circuit comprises: forming a first dielectric layer on the active surface; etching the first dielectric layer; depositing a metal layer over the first dielectric layer; etching the metal layer; forming a second dielectric layer over the metal layer; and etching the second dielectric layer.
Claim 34
Dependent Claim
23 words
The method according to claim 30 , wherein the etching the first dielectric layer exposes the at least one first redistribution bond pad.
Claim 35
Dependent Claim
17 words
The method according to claim 30 , wherein the etching the metal layer creates a metal trace.
Claim 36
Dependent Claim
23 words
The method according to claim 30 , wherein the etching the second dielectric layer exposes the at least one second redistribution bond pad.
Claim 37
Dependent Claim
17 words
The method according to claim 30 , further comprising depositing a passivation layer on the active surface.
Claim 38
Dependent Claim
16 words
The method according to claim 34 , wherein the passivation layer comprises nitride or silicon nitride.
Claim 39
Dependent Claim
16 words
The method according to claim 30 , wherein the first dielectric layer comprises polyimide or BCB.
Claim 40
Dependent Claim
24 words
The method according to claim 30 , wherein the metal layer is selected from the group consisting of titanium, copper, aluminum, NiV and nickel.
Claim 41
Dependent Claim
15 words
The method according to claim 30 , wherein the depositing the metal layer comprises sputtering.
Claim 42
Independent Claim
104 words
A method for redistributing bond pads of a semiconductor device, the method comprising: providing a semiconductor device including an active surface having a first set of substantially centrally located bond pads and a second set of substantially peripherally located bond pads thereon, the second set of substantially peripherally located bond pads and the first set of substantially centrally located bond pads are electrically independent from the semiconductor device integrated circuitry; and electrically connecting at least one bond pad of the first set of substantially centrally located bond pads to a corresponding second bond pad of the second set of substantially peripherally located bond pads.
Claim 43
Independent Claim
104 words
A method for redistributing bond pads of a semiconductor device, the method comprising: providing a semiconductor device including an active surface having a first set of substantially centrally located bond pads and a second set of substantially peripherally located bond pads thereon, the second set of substantially peripherally located bond pads and the first set of substantially centrally located bond pads are electrically independent from the semiconductor device integrated circuitry; and electrically connecting at least one bond pad of the first set of substantially centrally located bond pads to a corresponding second bond pad of the second set of substantially peripherally located bond pads.
Claim 44
Dependent Claim
29 words
The method according to claim 39 , wherein the electrically connecting comprises extending a metal trace between the at least one bond pad and the corresponding second bond pad.
Claim 45
Dependent Claim
46 words
The method according to claim 39 , wherein the electrically connecting the at least one bond pad comprises: forming a first dielectric layer on the active surface; depositing a metal layer over the first dielectric layer; and forming a second dielectric layer over the metal layer.
Claim 46
Dependent Claim
32 words
The method according to claim 41 , further comprising etching the first dielectric layer to expose the at least one bond pad of the first set of substantially centrally located bond pads.
Claim 47
Dependent Claim
31 words
The method according to claim 41 , further comprising etching the metal layer to create a metal trace between the at least one bond pad and the corresponding second bond pad.
Claim 48
Dependent Claim
21 words
The method according to claim 41 , further comprising etching the second dielectric layer to expose the corresponding second bond pad.
Claim 49
Dependent Claim
17 words
The method according to claim 41 , further comprising depositing a passivation layer on the active surface.
Claim 50
Dependent Claim
16 words
The method according to claim 45 , wherein the passivation layer comprises nitride or silicon nitride.
Claim 51
Dependent Claim
16 words
The method according to claim 41 , wherein the first dielectric layer comprises polyimide or BCB.
Claim 52
Dependent Claim
24 words
The method according to claim 41 , wherein the metal layer is selected from the group consisting of titanium, copper, aluminum, NiV and nickel.
Claim 53
Dependent Claim
15 words
The method according to claim 41 , wherein the depositing the metal layer comprises sputtering.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2007-03-16 | 2007-09-15 | 2008-03-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2011-03-16 | 2011-09-15 | 2012-03-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2015-03-16 | 2015-09-15 | 2016-03-16 | $7700.00 | Window Closed / Lapsed |