US6578188B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for a network-based mask defect printability analysis system
Assignee: Synopsys Inc
•
Filing: 2000-04-07
•
Granted: 2003-06-10
•
Expires: 2020-04-07
Abstract
Abstract A mask defect printability simulation server provides simulations, one-dimensional analysis, and reports to multiple clients over a wide area network, such as the Internet. This network-based simulation server allows a client to leverage a core of highly-trained engineers. Additionally, the network-based simulation server can be easily supported since only a single source for the tools associated with the simulation server is necessary for multiple clients. A client can access the simulation server using a standard personal computer having a browser, thereby eliminating the need for client to maintain an expensive database for the server. Finally, in the network-based simulation server, multiple users can view the same mask defect image and provide real-time comments to each other as simulation and analysis are performed on the defect image, thereby encouraging problem solving and decision-making dialogue among the users.
Inventors
- 👤 Linyong Pang
- 👤 Daniel William Howard
- 👤 Linard Karklin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 03:14
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/68; G03F1/82; G03F1/84; G03F1/26; G03F7/00; G03F7/70; G03F7/70425; G03F7/70433; G03F7/70441; G03F7/70483; G03F7/70491; G03F7/705; G06; G06F; G06F30/00; G06F30/30; G06F30/39; G06T; G06T7/00; G06T7/0002; G06T7/0004; G03F1/36; G06T2207/00; G06T2207/30; G06T2207/30108; G06T2207/30148; Y; Y10; Y10S; Y10S977/00; Y10S977/839; Y10S977/84; Y10S977/887; Y10S977/902; Y10S977/932; Y10S977/953
Claims Analysis
Total Claims: 43
Claim 1
Independent Claim
71 words
A method for providing a mask defect analysis to a first user, the method comprising: creating a database for storing a plurality of simulation models; creating a wide area network server for receiving a mask defect image from the first user; generating a simulation image of the mask defect image using at least one simulation model; and providing the simulation image to the first user via the wide area network server.
Claim 2
Independent Claim
71 words
A method for providing a mask defect analysis to a first user, the method comprising: creating a database for storing a plurality of simulation models; creating a wide area network server for receiving a mask defect image from the first user; generating a simulation image of the mask defect image using at least one simulation model; and providing the simulation image to the first user via the wide area network server.
Claim 3
Dependent Claim
21 words
The method of claim 1 , further including receiving parameters regarding a stepper for calibrating the at least one simulation model.
Claim 4
Dependent Claim
16 words
The method of claim 1 , further including storing the mask defect image in the database.
Claim 5
Dependent Claim
26 words
The method of claim 3 , wherein a second user and the first user simultaneously view generating the simulation image via the wide area network server.
Claim 6
Dependent Claim
27 words
The method of claim 4 , wherein the first and second users communicate during the step of generating the simulation image using the wide area network server.
Claim 7
Independent Claim
20 words
The method of 3 , wherein the first user has a first authorization to operate on the mask defect image.
Claim 8
Independent Claim
20 words
The method of 3 , wherein the first user has a first authorization to operate on the mask defect image.
Claim 9
Dependent Claim
30 words
The method of claim 6 , wherein a second user has a second authorization to operate on the mask defect image, and wherein the first and second authorizations are different.
Claim 10
Dependent Claim
50 words
The method of claim 1 , further including: storing a plurality of analysis plots in the database; generating a one-dimensional report on a cutline of the mask defect image using at least one analysis plot; and providing the one-dimensional report to the first user via the wide area network server.
Claim 11
Dependent Claim
23 words
The method of claim 8 , wherein the first user designates the cutline of the mask defect image for generating the one-dimensional report.
Claim 12
Dependent Claim
33 words
The method of claim 9 , further including at least one of panning and zooming the mask defect image to designate the cutline of the mask defect image for generating the one-dimensional report.
Claim 13
Dependent Claim
38 words
The method of claim 8 , wherein the one-dimensional report includes at least one of an aerial image intensity plot, an intensity versus defocus plot, an intensity versus exposure plot, a process window plot, and a latitude curve.
Claim 14
Dependent Claim
23 words
The method of claim 1 , wherein the first user designates a portion of the mask defect image for generating the simulation image.
Claim 15
Dependent Claim
33 words
The method of claim 12 , further including at least one of panning and zooming the mask defect image to designate a portion of the mask defect image for generating the simulation image.
Claim 16
Dependent Claim
21 words
The method of claim 1 , wherein the mask defect image is encrypted, and further including decrypting the mask defect image.
Claim 17
Dependent Claim
12 words
The method of claim 14 , further including encrypting the simulation image.
Claim 18
Dependent Claim
46 words
The method of claim 1 , further including: receiving an actual layout of an area corresponding to the mask defect image; generating a layout simulation image of the actual layout using at least one simulation model; and comparing the layout simulation image to the simulation image.
Claim 19
Independent Claim
67 words
An apparatus for providing mask defect analysis, the apparatus comprising: a wide area network server for receiving a mask defect image and outputting a simulation image of the mask defect image; a database for storing the mask defect image and a plurality of mask simulation models; and an application for operating on the mask defect image and at least one simulation model, and generating the simulation image.
Claim 20
Independent Claim
67 words
An apparatus for providing mask defect analysis, the apparatus comprising: a wide area network server for receiving a mask defect image and outputting a simulation image of the mask defect image; a database for storing the mask defect image and a plurality of mask simulation models; and an application for operating on the mask defect image and at least one simulation model, and generating the simulation image.
Claim 21
Dependent Claim
14 words
The apparatus of claim 17 , wherein the database further stores the simulation image.
Claim 22
Dependent Claim
33 words
The apparatus of claim 18 , wherein the wide area network server includes at least one module for accessing a stored element in the database and transmitting the stored element to the application.
Claim 23
Independent Claim
69 words
A system for providing mask defect analysis, the system comprising: means for receiving a mask defect image transmitted via a network; means for storing the mask defect image and a plurality of mask simulation models; means for operating on the mask defect image and at least one simulation model, and generating a simulation image; and means for outputting the simulation image of the mask defect image onto the network.
Claim 24
Independent Claim
69 words
A system for providing mask defect analysis, the system comprising: means for receiving a mask defect image transmitted via a network; means for storing the mask defect image and a plurality of mask simulation models; means for operating on the mask defect image and at least one simulation model, and generating a simulation image; and means for outputting the simulation image of the mask defect image onto the network.
Claim 25
Dependent Claim
23 words
The system of claim 20 , wherein the network includes an Internet line, and wherein the means for receiving includes a Web server.
Claim 26
Dependent Claim
24 words
The system of claim 20 , wherein the network includes an Intranet line, and wherein the means for receiving includes an internal server site.
Claim 27
Dependent Claim
20 words
The system of claim 20 , further including means for transmitting the mask defect image and receiving the simulation image.
Claim 28
Dependent Claim
14 words
The system of claim 23 , wherein the means for transmitting includes a computer.
Claim 29
Dependent Claim
17 words
The system of claim 23 , wherein the means for transmitting includes at least one Web browser.
Claim 30
Dependent Claim
16 words
The system of claim 23 , wherein the means for transmitting includes a plurality of stations.
Claim 31
Dependent Claim
103 words
An integrated circuit fabricated using an improved mask, the improved mask including one of a mask defect and a corrected mask defect analyzed using the following steps: storing a plurality of simulation models in a database; receiving a mask defect image via a wide area network server; generating a simulation image of the mask defect image using at least one simulation model; providing the simulation image to the wide area network server, wherein if the simulation image is acceptable, then leaving the mask defect, and wherein if the simulation image is unacceptable, then repairing the mask defect, thereby creating the corrected mask defect.
Claim 32
Dependent Claim
103 words
An integrated circuit fabricated using an improved mask, the improved mask including one of a mask defect and a corrected mask defect analyzed using the following steps: storing a plurality of simulation models in a database; receiving a mask defect image via a wide area network server; generating a simulation image of the mask defect image using at least one simulation model; providing the simulation image to the wide area network server, wherein if the simulation image is acceptable, then leaving the mask defect, and wherein if the simulation image is unacceptable, then repairing the mask defect, thereby creating the corrected mask defect.
Claim 33
Dependent Claim
19 words
The integrated circuit of claim 27 , further including receiving parameters for calibrating the at least one simulation model.
Claim 34
Dependent Claim
17 words
The integrated circuit of claim 28 , further including storing the mask defect image in the database.
Claim 35
Dependent Claim
22 words
The integrated circuit of claim 27 , wherein multiple users can view generating the simulation image via the wide area network server.
Claim 36
Dependent Claim
26 words
The integrated circuit of claim 27 , wherein multiple users can communicate during the step of generating the simulation image using the wide area network server.
Claim 37
Dependent Claim
21 words
The integrated circuit of 30 , wherein at least two users have different authorizations to operate on the mask defect image.
Claim 38
Dependent Claim
21 words
The integrated circuit of 30 , wherein at least two users have different authorizations to operate on the mask defect image.
Claim 39
Dependent Claim
38 words
The integrated circuit of claim 27 , further including: generating a one-dimensional plot on a cutline of the mask defect image using at least one simulation model; and providing the one-dimensional plot to the wide area network server.
Claim 40
Dependent Claim
29 words
The integrated circuit of claim 27 , wherein a user designates a portion of the mask defect image for generating the simulation image using the wide area network server.
Claim 41
Dependent Claim
29 words
The integrated circuit of claim 33 , wherein a user designates the cutline of the mask defect image for generating the one-dimensional plot using the wide area network server.
Claim 42
Independent Claim
112 words
A method for providing mask defect analysis over a wide area network, the method comprising: storing simulation information in a database; receiving a mask defect image via a wide area network server; allowing a user to designate an area of the mask defect image to be simulated; generating a simulation image of the area of the mask defect image using the simulation information; allowing the user to designated a cutline of the mask defect image to be analyzed; generating a one-dimensional plot of the cutline of the mask defect image using the simulation information; and providing the simulation image and the one-dimensional plot to the user via the wide area network server.
Claim 43
Independent Claim
112 words
A method for providing mask defect analysis over a wide area network, the method comprising: storing simulation information in a database; receiving a mask defect image via a wide area network server; allowing a user to designate an area of the mask defect image to be simulated; generating a simulation image of the area of the mask defect image using the simulation information; allowing the user to designated a cutline of the mask defect image to be analyzed; generating a one-dimensional plot of the cutline of the mask defect image using the simulation information; and providing the simulation image and the one-dimensional plot to the user via the wide area network server.
References Cited (Backward Citations)
US4812962A
Cited
US5182718A
Cited
US5051598A
Cited
US5241185A
Cited
US5316878A
Cited
US5572598A
Cited
US5242770A
Cited
US5326659A
Cited
US5340700A
Cited
US5256505A
Cited
US5538815A
Cited
US5432714A
Cited
US5533148A
Cited
US5424154A
Cited
US5447810A
Cited
US5631110A
Cited
US5702848A
Cited
US5815685A
Cited
US5532090A
Cited
US5825647A
Cited
US5553273A
Cited
US5663893A
Cited
US5657235A
Cited
WO1997013370A1
Cited
US5827623A
Cited
US5863682A
Cited
US5705301A
Cited
US5801954A
Cited
US6130750A
Cited
US5862058A
Cited
US5707765A
Cited
US5740068A
Cited
US5849440A
Cited
US5795688A
Cited
US6076465A
Cited
WO1998020327A1
Cited
US5804340A
Cited
US5847959A
Cited
WO1998045685A1
Cited
US6081659A
Cited
US6078738A
Cited
US6016357A
Cited
WO1999014706A2
Cited
US20020019729A1
Cited
US6009251A
Cited
US6011911A
Cited
US6009250A
Cited
US6081658A
Cited
WO2000036525A2
Cited
US6171731B1
Cited
WO2000067074A1
Cited
WO2000067076A1
Cited
WO2000067075A1
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2006-06-09 | 2006-12-09 | 2007-06-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2010-06-09 | 2010-12-09 | 2011-06-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2014-06-09 | 2014-12-09 | 2015-06-10 | $7700.00 | Window Closed / Lapsed |