US6548683B1
Expired / Lapsed
US
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Methods, complexes and system for forming metal-containing films
Assignee: Micron Technology Inc
•
Filing: 2000-07-14
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Granted: 2003-04-15
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Expires: 2020-07-14
Abstract
Abstract A method of forming a film on a substrate using Group IIIA metal complexes. The complexes and methods are particularly suitable for the preparation of semiconductor structures using chemical vapor deposition techniques and systems.
Inventors
- 👤 Brian A. Vaartstra
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:23
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/301; C07; C07F; C07F5/00; C07F5/06; C07F5/061; C07F5/065; C07F5/066; C23C16/06; C23C16/18; H; H10; H10P; H10P14/00; H10P14/40; H10P14/42; H10P14/43; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/056
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
80 words
A composition comprising one or more hydride complexes of the formulas: and wherein: M is a Group IIIA metal; each R 1 , R 2 , R 3 , R 4 , and R 5 group is independently H or a (C 1 -C 30 )organic group, wherein none of the R groups are joined together to form ring systems, at least one of R 3 and R 4 is H, and R 5 is H; and n=1 to 6.
Claim 2
Dependent Claim
80 words
A composition comprising one or more hydride complexes of the formulas: and wherein: M is a Group IIIA metal; each R 1 , R 2 , R 3 , R 4 , and R 5 group is independently H or a (C 1 -C 30 )organic group, wherein none of the R groups are joined together to form ring systems, at least one of R 3 and R 4 is H, and R 5 is H; and n=1 to 6.
Claim 3
Dependent Claim
18 words
The composition of claim 1 wherein M is selected from the group consisting of Al, Ga, and In.
Claim 4
Dependent Claim
34 words
The composition of claim 1 wherein each R 1 , R 2 , R 3 , R 4 , and R 5 group is independently H or a (C 1 -C 20 )organic group.
Claim 5
Dependent Claim
34 words
The composition of claim 1 wherein each R 1 , R 2 , R 3 , R 4 , and R 5 group is independently H or a (C 1 -C 8 )organic group.
Claim 6
Dependent Claim
34 words
The composition of claim 1 wherein each R 1 , R 2 , R 3 , R 4 , and R 5 group is independently H or a (C 1 -C 4 )alkyl moiety.
Claim 7
Dependent Claim
11 words
The composition of claim 1 wherein the composition is a liquid.
Claim 8
Dependent Claim
20 words
The composition of claim 6 wherein the liquid composition comprises one or more solid complexes dissolved in a liquid medium.
Claim 9
Dependent Claim
16 words
The composition of claim 1 further comprising one or more compounds containing a Group VA element.
Claim 10
Dependent Claim
9 words
The composition of claim 1 wherein M is Al.
Claim 11
Dependent Claim
21 words
The composition of claim 9 wherein R 1 , R 3 , R 4 , and R 5 are each H.
Claim 12
Dependent Claim
11 words
The composition of claim 9 wherein each R 2 is methyl.
Claim 13
Dependent Claim
7 words
The composition of claim 9 wherein n=3.
Claim 14
Dependent Claim
9 words
The composition of claim 1 wherein M is Ga.
Claim 15
Dependent Claim
18 words
The composition of claim 13 wherein R 1 , R 3 , and R 5 are each H.
Claim 16
Dependent Claim
14 words
The composition of claim 13 wherein R 4 and each R 2 are methyl.
Claim 17
Dependent Claim
7 words
The composition of claim 13 wherein n=3.
Claim 18
Dependent Claim
9 words
The composition of claim 1 wherein M is In.
Claim 19
Dependent Claim
18 words
The composition of claim 17 wherein R 1 , R 3 , and R 5 are each H.
Claim 20
Dependent Claim
14 words
The composition of claim 17 wherein R 4 and each R 2 are methyl.
Claim 21
Dependent Claim
7 words
The composition of claim 17 wherein n=3.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2006-04-14 | 2006-10-14 | 2007-04-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2010-04-14 | 2010-10-14 | 2011-04-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2014-04-14 | 2014-10-14 | 2015-04-15 | $7700.00 | Window Closed / Lapsed |