US6274495B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for fabricating a device on a substrate
Assignee: CVC Products Inc
•
Filing: 2000-01-18
•
Granted: 2001-08-14
•
Expires: 2020-01-18
Abstract
Abstract A method and system for fabricating a device on a substrate with a process gas, such as with chemical vapor deposition. A reaction chamber and support chuck cooperate to form a low conductance configuration for axisymetric process gas flow over the substrate and to form a high conductance configuration for enhanced evacuation of residual process gas from the reaction chamber upon completion of the process. A dual conductance chuck has an indented region that aligns with the exhaust port of the reaction chamber to restrict process gas flow in the low conductance configuration, and that moves distal a showerhead and the exhaust port to provide reduced restriction of process gas flow for reaction chamber evacuation. The chuck includes thermal control for enhancing film deposition on the substrate and for reducing residual film deposition on the chuck. An evacuation opening in the housing provides independent evacuation of residual gas from the housing. The present invention enhance throughput of device formation by reducing purge and process cycle times.
Inventors
- 👤 Thomas R. Omstead
- 👤 Panya Wongsenakhum
- 👤 William J. Messner
- 👤 Edward J. Nagy
- 👤 William Starks
- 👤 Mehrdad M. Moslehi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 04:26
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45563; C23C16/45565; C23C16/4401; C23C16/4408; C23C16/4412; C23C16/45519; C23C16/45521; C23C16/45587; C23C16/45589; C23C16/458; C23C16/4582; C23C16/4583; C23C16/4585; Y; Y10; Y10S; Y10S438/00; Y10S438/905
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
60 words
A method for fabrication of a device on a substrate, the method comprising: feeding a first process gas flow into a showerhead housing along an intake vector; redirecting the first process gas flow to an outflow vector, the outflow vector generally perpendicular to the intake vector; and dispensing the first process gas flow to the substrate along the outflow vector.
Claim 2
Independent Claim
60 words
A method for fabrication of a device on a substrate, the method comprising: feeding a first process gas flow into a showerhead housing along an intake vector; redirecting the first process gas flow to an outflow vector, the outflow vector generally perpendicular to the intake vector; and dispensing the first process gas flow to the substrate along the outflow vector.
Claim 3
Dependent Claim
22 words
The method of claim 1 wherein said feeding step further comprises feeding the process gas into a side wall of the housing.
Claim 4
Dependent Claim
29 words
The method of claim 1 further comprising the steps of: feeding a second process gas flow into the housing; and dispensing the second process gas flow to the substrate.
Claim 5
Dependent Claim
22 words
The method of claim 1 further comprising the step of evacuating the process gas from the housing through a housing evacuation opening.
Claim 6
Dependent Claim
23 words
The method of claim 1 further comprising the step of altering the process gas flow by interposing a plate along the outflow vector.
Claim 7
Dependent Claim
57 words
The method of claim 3 wherein said dispensing the second process gas flow further comprises step of dispensing the second process gas flow to the substrate via passageways coupled to a gas dispersion plate, the passageways preventing mixing of the first and second process gas flows until the second process gas flow exits the gas dispersion plate.
Claim 8
Dependent Claim
29 words
The method of claim 1 further comprising the step of providing a temperature-control fluid to temperature-control channels associated with the housing to maintain the housing at a predetermined temperature.
Claim 9
Dependent Claim
33 words
The method of claim 6 further comprising the step of providing a temperature-control fluid to temperature-control channels associated with the gas dispersion plate to maintain the gas dispersion plate at a predetermined temperature.
Claim 10
Dependent Claim
35 words
The method of claim 1 wherein said redirecting step further comprises redirecting the first process gas flow with a baffle disposed within the housing, the baffle having a wall generally perpendicular to the intake vector.
Claim 11
Dependent Claim
27 words
The method of claim 3 wherein said feeding a second process gas step further comprises feeding the second process gas into a side wall of the housing.
Claim 12
Independent Claim
86 words
A method for fabrication of a device on a substrate, the method comprising: feeding a first process gas flow into a showerhead housing along an intake vector; redirecting the first process gas flow to an outflow vector, the outflow vector generally perpendicular to the intake vector; dispensing the first process gas flow to the substrate along the outflow vector; feeding a second process gas flow into the housing; and dispensing the second process gas flow to the substrate via passageways coupled to a gas dispersion plate.
Claim 13
Independent Claim
86 words
A method for fabrication of a device on a substrate, the method comprising: feeding a first process gas flow into a showerhead housing along an intake vector; redirecting the first process gas flow to an outflow vector, the outflow vector generally perpendicular to the intake vector; dispensing the first process gas flow to the substrate along the outflow vector; feeding a second process gas flow into the housing; and dispensing the second process gas flow to the substrate via passageways coupled to a gas dispersion plate.
Claim 14
Dependent Claim
30 words
The method of claim 1 , wherein the passageways prevent mixing of the first and second process gas flows until the second process gas flow exits the gas dispersion plate.
Claim 15
Dependent Claim
19 words
The method of claim 11 further comprising evacuating the process gas from the housing through a housing evacuation opening.
Claim 16
Dependent Claim
14 words
The method of claim 11 further comprising interposing a plate along the outflow vector.
Claim 17
Dependent Claim
18 words
The method of claim 11 further comprising maintaining the housing and the gas dispersion plate at predetermined temperatures.
Claim 18
Dependent Claim
34 words
The method of claim 11 wherein the redirecting further comprises redirecting the first process gas flow with a baffle disposed within the housing, the baffle having a wall generally perpendicular to the intake vector.
Claim 19
Independent Claim
54 words
A method for fabrication of a device on a substrate, the method comprising: feeding a first process gas flow into a showerhead housing along an intake vector; and dispensing the first process gas to the substrate along an outflow vector using a gas dispersion plate, the outflow vector generally perpendicular to the input vector.
Claim 20
Independent Claim
54 words
A method for fabrication of a device on a substrate, the method comprising: feeding a first process gas flow into a showerhead housing along an intake vector; and dispensing the first process gas to the substrate along an outflow vector using a gas dispersion plate, the outflow vector generally perpendicular to the input vector.
Claim 21
Dependent Claim
20 words
The method of claim 17 , further comprising redirecting the process gas from the intake vector to the outflow vector.
Claim 22
Dependent Claim
26 words
The method of claim 17 further comprising: feeding a second process gas flow into the housing; and dispensing the second process gas flow to the substrate.
Claim 23
Dependent Claim
55 words
The method of claim 19 wherein the dispensing the second process gas flow further comprises dispensing the second process gas flow to the substrate via passageways coupled to the gas dispersion plate, the passageways preventing mixing of the first and second process gas flows until the second process gas flow exits the gas dispersion plate.
Claim 24
Dependent Claim
19 words
The method of claim 17 further comprising evacuating the process gas from the housing through a housing evacuation opening.
Claim 25
Dependent Claim
13 words
The method of claim 17 further interposing a plate along the outflow vector.
Claim 26
Dependent Claim
18 words
The method of claim 17 further comprising maintaining the housing and the gas dispersion plate at predetermined temperatures.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2004-08-13 | 2005-02-12 | 2005-08-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-08-13 | 2009-02-12 | 2009-08-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-08-13 | 2013-02-12 | 2013-08-14 | $7700.00 | Window Closed / Lapsed |