US5624498A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Showerhead for a gas supplying apparatus
Assignee: Samsung Electronics Co Ltd
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Filing: 1994-12-08
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Granted: 1997-04-29
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Expires: 2014-12-08
Abstract
Abstract A gas supply apparatus, for use in a semiconductor device manufacturing process, provides a showerhead for evenly supplying various kinds of gases to a reaction chamber. The gas supplying apparatus for use in the formation of a thin film of a semiconductor device includes a first porous plate having a plurality of first holes formed throughout its surface, and a central bore formed at its center; and a second porous plate having first projections which are regularly formed throughout its central portion, and second projections which contain depressions continuously formed around the first projections. The gas supplying apparatus evenly distributes gas into the reaction chamber, thereby improving the uniformity of the film thickness to be grown on a substrate.
Inventors
- 👤 Gil-Gwang Lee
- 👤 Kazuyuki Fujihara
- 👤 Kyu-hwan Chang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 04:08
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45563; C23C16/45574; C23C16/45565
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
205 words
A showerhead for a gas supply apparatus having a first gas supply pipe and a second gas supply pipe having a smaller diameter than that of the first gas supply pipe and disposed along a longitudinal axis thereof, the showerhead comprising: a first plate having a plurality of first holes formed therein in fluid communication with the first gas supply pipe, and a central bore formed therein in fluid communication with the second gas supply pipe; a second plate secured to said first plate, said second plate having a plurality of second holes longitudinally aligned with corresponding ones of said first holes, a plurality of interconnected gas distribution chambers in fluid communication with one another and with said central bore, and a plurality of third holes in fluid communication with corresponding ones of said gas distribution chambers; wherein said second and third holes have smaller diameters than those of said first holes; and, wherein said first and second holes provide a first gas pathway between the first gas supply pipe and the exterior of the showerhead, and said central bore, said gas distribution chambers and said third holes provide a second gas pathway between the second gas supply pipe and the exterior of the showerhead.
Claim 2
Dependent Claim
205 words
A showerhead for a gas supply apparatus having a first gas supply pipe and a second gas supply pipe having a smaller diameter than that of the first gas supply pipe and disposed along a longitudinal axis thereof, the showerhead comprising: a first plate having a plurality of first holes formed therein in fluid communication with the first gas supply pipe, and a central bore formed therein in fluid communication with the second gas supply pipe; a second plate secured to said first plate, said second plate having a plurality of second holes longitudinally aligned with corresponding ones of said first holes, a plurality of interconnected gas distribution chambers in fluid communication with one another and with said central bore, and a plurality of third holes in fluid communication with corresponding ones of said gas distribution chambers; wherein said second and third holes have smaller diameters than those of said first holes; and, wherein said first and second holes provide a first gas pathway between the first gas supply pipe and the exterior of the showerhead, and said central bore, said gas distribution chambers and said third holes provide a second gas pathway between the second gas supply pipe and the exterior of the showerhead.
Claim 3
Dependent Claim
27 words
The showerhead as set forth in claim 1, wherein said second and third holes have diameters which are no more than one-half those of said first holes.
Claim 4
Dependent Claim
31 words
The showerhead as set forth in claim 2, wherein the gas supply apparatus is part of a CVD apparatus for forming a thin film on a surface of a semiconductor device.
Claim 5
Dependent Claim
20 words
The showerhead as set forth in claim 2, wherein the diameters of said second and third holes are the same.
Claim 6
Dependent Claim
22 words
The showerhead as set forth in claim 1, wherein the first and second gas supply pipes are arranged in a concentric configuration.
Claim 7
Dependent Claim
36 words
The showerhead as set forth in claim 1, further comprising a plenum disposed between the first gas supply pipe and said first plate, for distributing gas from the first gas supply pipe to said first holes.
Claim 8
Dependent Claim
23 words
The showerhead as set forth in claim 1, further comprising a plenum fluidly interconnecting the first gas supply pipe and said first holes.
Claim 9
Dependent Claim
224 words
A showerhead for a gas supply apparatus having a first gas supply pipe and a second gas supply pipe having a smaller diameter than that of the first gas supply pipe and disposed along a longitudinal axis thereof, the showerhead comprising: a first plate having a plurality of first holes formed therein in fluid communication with the first gas supply pipe, and a central bore formed therein in fluid communication with the second gas supply pipe; a second plate secured to said first plate, said second plate having a plurality of spaced-apart projections depending therefrom, each of said projections having a second hole longitudinally aligned with a corresponding one of said first holes, a plurality of interconnected gas distribution chambers formed between said first projections in fluid communication with one another and with said central bore, each of said gas distribution chambers having an outlet orifice, said outlet orifices having diameters less than those of said first holes; wherein said second holes have smaller diameters than those of said first holes; and, wherein said first and second holes provide a first gas pathway between the first gas supply pipe and the exterior of the showerhead, and said central bore, said gas distribution chambers and said outlet orifices provide a second gas pathway between the second gas supply pipe and the exterior of the showerhead.
Claim 10
Dependent Claim
224 words
A showerhead for a gas supply apparatus having a first gas supply pipe and a second gas supply pipe having a smaller diameter than that of the first gas supply pipe and disposed along a longitudinal axis thereof, the showerhead comprising: a first plate having a plurality of first holes formed therein in fluid communication with the first gas supply pipe, and a central bore formed therein in fluid communication with the second gas supply pipe; a second plate secured to said first plate, said second plate having a plurality of spaced-apart projections depending therefrom, each of said projections having a second hole longitudinally aligned with a corresponding one of said first holes, a plurality of interconnected gas distribution chambers formed between said first projections in fluid communication with one another and with said central bore, each of said gas distribution chambers having an outlet orifice, said outlet orifices having diameters less than those of said first holes; wherein said second holes have smaller diameters than those of said first holes; and, wherein said first and second holes provide a first gas pathway between the first gas supply pipe and the exterior of the showerhead, and said central bore, said gas distribution chambers and said outlet orifices provide a second gas pathway between the second gas supply pipe and the exterior of the showerhead.
Claim 11
Dependent Claim
28 words
The showerhead as set forth in claim 8, wherein said second holes and outlet orifices have diameters which are no more than one-half those of said first holes.
Claim 12
Dependent Claim
31 words
The showerhead as set forth in claim 9, wherein the gas supply apparatus is part of a CVD apparatus for forming a thin film on a surface of a semiconductor device.
Claim 13
Dependent Claim
21 words
The showerhead as set forth in claim 9, wherein the diameters of said second holes and outlet orifices are the same.
Claim 14
Dependent Claim
22 words
The showerhead as set forth in claim 8, wherein the first and second gas supply pipes are arranged in a concentric configuration.
Claim 15
Dependent Claim
36 words
The showerhead as set forth in claim 8, further comprising a plenum disposed between the first gas supply pipe and said first plate, for distributing gas from the first gas supply pipe to said first holes.
Claim 16
Dependent Claim
23 words
The showerhead as set forth in claim 8, further comprising a plenum fluidly interconnecting the first gas supply pipe and said first holes.
Claim 17
Dependent Claim
43 words
The showerhead as set forth in claims 1 or 8, wherein said first and second plates are each comprised of a material selected from the group consisting of stainless steel and aluminum alloy having a surface plated with Al 2 O 3 .
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-04-28 | 2000-10-28 | 2001-04-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-04-28 | 2004-10-28 | 2005-04-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-04-28 | 2008-10-28 | 2009-04-29 | $7700.00 | Window Closed / Lapsed |