US5866237A
Expired / Lapsed
US
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Organic electronic package and method of applying palladium-tin seed layer thereto
Assignee: International Business Machines Corp
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Filing: 1996-08-23
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Granted: 1999-02-02
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Expires: 2016-08-23
Abstract
Abstract A method of fabricating an electronic package having an organic substrate. The substrate is formed of fiberglass and epoxy. In order to additively circuitize the electronic package substrate, an organic polyelectrolyte is deposited onto the organic substrate. A colloidal palladium-tin seed layer is deposited atop the organic polyelectrolyte. This is followed by depositing a photoimagable polymer atop the seed layer, and photolithographically patterning the photoimagable polymer to uncover portions of the seed layer. The uncovered portions of the seed layer are catalytic to the electroless deposition of copper. In this way a conductive layer of copper is deposited atop the uncovered seed layer. The organic polyelectrolyte is deposited from an aqueous solution at the pH appropriate for the desired seed catalyst coating, depending on the ionizable character of the particular polyelectrolyte employed.
Inventors
- 👤 Anastasios Peter Angelopoulos
- 👤 Gerald Walter Jones
- 👤 Richard William Malek
- 👤 Heike Marcello
- 👤 Jeffrey McKeveny
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 04:27
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/10; H05K3/18; H05K3/181; H05K3/182; H05K3/184; Y; Y10; Y10T; Y10T428/00; Y10T428/24; Y10T428/24802; Y10T428/24917
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
84 words
In a method of fabricating an electronic package having an organic substrate, said method comprising the steps of depositing an organic polyelectrolyte onto the organic substrate, depositing a colloidal palladium-tin seed layer atop the organic polyelectrolyte layer, depositing a photoimagable polymer atop the seed layer, photolithographically patterning the photoimagable polymer to uncover portions of the seed layer, and depositing a conductive layer atop the uncovered seed layer and the photoimagable dielectric, the improvement comprising depositing the organic polyelectrolyte while controllably ionizing ionizable groups thereof.
Claim 2
Dependent Claim
84 words
In a method of fabricating an electronic package having an organic substrate, said method comprising the steps of depositing an organic polyelectrolyte onto the organic substrate, depositing a colloidal palladium-tin seed layer atop the organic polyelectrolyte layer, depositing a photoimagable polymer atop the seed layer, photolithographically patterning the photoimagable polymer to uncover portions of the seed layer, and depositing a conductive layer atop the uncovered seed layer and the photoimagable dielectric, the improvement comprising depositing the organic polyelectrolyte while controllably ionizing ionizable groups thereof.
Claim 3
Dependent Claim
38 words
The method of claim 1 wherein the organic polyelectrolyte is an ampholyte having (a) pendant cationic groups whose charge does not vary with pH, and (b) pendant weakly acid groups which are ionized only in strongly alkaline solution.
Claim 4
Dependent Claim
36 words
The method of claim 2 comprising depositing the organic polyelectrolyte from an aqueous solution having a pH below 4 whereby the weakly acidic groups are not ionized and only cations are present on the polyelectrolyte backbone.
Claim 5
Dependent Claim
37 words
The method of claim 2 comprising depositing the organic polyelectrolyte from an aqueous solution having a pH above 10 whereby the weakly acidic groups are ionized and both anions and cations are present on the polyelectrolyte backbone.
Claim 6
Dependent Claim
14 words
The method of claim 2 wherein the pendant cationic groups are trialkyl ammonium groups.
Claim 7
Dependent Claim
24 words
The method of claim 2 wherein the pendant weakly acid groups are chosen from the group consisting of carboxylic acid groups and carboxylate groups.
Claim 8
Dependent Claim
16 words
The method of claim 1 wherein the organic polyelectrolyte contains only cations as charged pendent groups.
Claim 9
Dependent Claim
17 words
The method of claim 7 comprising depositing the organic polyelectrolyte from an aqueous solution of any pH.
Claim 10
Dependent Claim
14 words
The method of claim 7 wherein the pendant groups are cationic poly amido amines.
Claim 11
Dependent Claim
16 words
The method of claim 1 comprising depositing the organic polyelectrolyte from an aqueous sulfuric acid solution.
Claim 12
Dependent Claim
35 words
The method of claim 1 comprising stripping the photoimagable polymer used to pattern the conductive layer, thereafter depositing a photoimagable dielectric atop the patterned conductive layer, photoimaging the photoimagable dielectric, and circuitizing the photoimagable dielectric.
Claim 13
Dependent Claim
34 words
The method of claim 11 wherein the photoimagable dielectric comprises an epoxy resin system of a polyol resin condensation product of (i) an epihalohydrin and (ii) an epoxidized octafunctional bisphenol A formaldehyde novolac resin.
Claim 14
Dependent Claim
20 words
The method of claim 12 wherein the epoxy resin system further comprises an epoxidized glycidyl ether of tetrabromo bisphenol A.
Claim 15
Dependent Claim
22 words
The method of claim 11 comprising depositing the photoimagable dielectric to a thickness of from about 2 mils to about 20 mils.
Claim 16
Dependent Claim
13 words
The method of claim 11 comprising forming photo vias through said photoimagable dielectric.
Claim 17
Dependent Claim
40 words
The method of claim 11 comprising depositing the colloidal palladium-tin seed layer to a seed coverage of less then 8 micrograms per square centimeter of Pd and less then 2 micrograms per square centimeter of Sn atop the organic polyelectrolyte.
Claim 18
Dependent Claim
145 words
In a method of fabricating an electronic package having an organic substrate, said method comprising the steps of depositing an organic polyelectrolyte onto the organic substrate, depositing a colloidal palladium-tin seed layer atop the organic polyelectrolyte layer, depositing a photoimagable polymer atop the seed layer, photolithographically patterning the photoimagable polymer to uncover portions of the seed layer, and depositing a conductive layer atop the uncovered seed layer, stripping the photoimagable polymer to pattern the conductive layer, thereafter depositing a photoimagable dielectric atop the patterned conductive layer, photoimaging the photoimagable dielectric, and circuitizing the photoimagable dielectric, the improvement comprising depositing the organic polymer (polyelectrolyte) while ionizing the ionizable groups thereof and thereafter depositing the colloidal palladium-tin seed layer to a seed coverage of less then 8 micrograms per square centimeter of Pd and less then 2 micrograms per square centimeter of Sn atop the organic polyelectrolyte.
Claim 19
Dependent Claim
145 words
In a method of fabricating an electronic package having an organic substrate, said method comprising the steps of depositing an organic polyelectrolyte onto the organic substrate, depositing a colloidal palladium-tin seed layer atop the organic polyelectrolyte layer, depositing a photoimagable polymer atop the seed layer, photolithographically patterning the photoimagable polymer to uncover portions of the seed layer, and depositing a conductive layer atop the uncovered seed layer, stripping the photoimagable polymer to pattern the conductive layer, thereafter depositing a photoimagable dielectric atop the patterned conductive layer, photoimaging the photoimagable dielectric, and circuitizing the photoimagable dielectric, the improvement comprising depositing the organic polymer (polyelectrolyte) while ionizing the ionizable groups thereof and thereafter depositing the colloidal palladium-tin seed layer to a seed coverage of less then 8 micrograms per square centimeter of Pd and less then 2 micrograms per square centimeter of Sn atop the organic polyelectrolyte.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-02-01 | 2002-08-03 | 2003-02-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-02-01 | 2006-08-03 | 2007-02-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-02-01 | 2010-08-03 | 2011-02-02 | $7700.00 | Window Closed / Lapsed |