US5891513A
Expired / Lapsed
US
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Electroless CU deposition on a barrier layer by CU contact displacement for ULSI applications
Assignee: Cornell Research Foundation Inc
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Filing: 1996-01-16
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Granted: 1999-04-06
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Expires: 2016-01-16
Abstract
Abstract A method of utilizing electroless copper deposition to form interconnects on a semiconductor wafer. Once a via or a trench is formed in a dielectric layer, a titanium nitride (TiN) or tantalum (Ta) barrier layer is blanket deposited. Then, a contact displacement technique is used to form a thin activation seed layer of copper on the barrier layer. An electroless deposition technique is then used to auto-catalytically deposit copper on the activated barrier layer. The electroless copper deposition continues until the via/trench is filled. Subsequently, the surface is polished by an application of chemical-mechanical polishing (CMP) to remove excess copper and barrier material from the surface, so that the only copper and barrier material remaining are in the via/trench openings. Then an overlying silicon nitride (SiN) layer is formed above the exposed copper in order to form a dielectric barrier layer. The copper interconnect is fully encapsulated from the adjacent material by the TiN (or Ta) and the SiN layers.
Inventors
- 👤 Valery M. Dubin
- 👤 Yosef Shacham-Diamand
- 👤 Chiu H. Ting
- 👤 Bin Zhao
- 👤 Prahalad K. Vasudev
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 11:11
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/032; H10W20/033; C; C23; C23C; C23C18/00; C23C18/16; C23C18/1601; C23C18/1603; C23C18/1633; C23C18/1646; C23C18/165; C23C18/1651; C23C18/1689; C23C18/18; C23C18/1803; C23C18/1824; C23C18/1827; C23C18/1831; C23C18/1851; C23C18/1872; C23C18/1875; C23C18/1879; C23C18/54; H05; H05K; H05K3/00; H05K3/38; H05K3/388; H05K3/46; H05K3/4644; H05K3/465; H10P; H10P14/00; H10P14/40; H10P14/46; H10W20/042; H10W20/044; H10W20/056; H10W20/071; H10W20/081; H10W20/084; H10W20/40; H10W20/41; H10W20/425; H05K2201/00; H05K2201/09; H05K2201/09209; H05K2201/095; H05K2201/09563; H05K2203/00; H05K2203/07; H05K2203/0703; H05K2203/072; H05K2203/0733; H05K3/02; H05K3/04; H05K3/045; H05K3/40; H05K3/42; H05K3/422; H05K3/4661; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/89; Y10S977/892
Claims Analysis
Total Claims: 29
Claim 1
Independent Claim
119 words
A method of activating a surface of a diffusion barrier layer for preventing diffusion of copper into dielectric material in order to deposit copper by electroless deposition, comprising the steps of: subjecting said diffusion barrier layer surface to an aqueous copper contact displacement solution; activating said diffusion barrier layer surface for autocatalytic growth of copper by forming at least a mono-layer of copper atoms on said barrier layer surface by contact displacement of copper to form a copper activation seed layer on said barrier layer surface; subjecting said copper activation seed layer to an electroless deposition solution; depositing copper electrolessly on said diffusion barrier layer surface by having said copper activation seed layer initiate said autocatalytic growth of copper.
Claim 2
Independent Claim
119 words
A method of activating a surface of a diffusion barrier layer for preventing diffusion of copper into dielectric material in order to deposit copper by electroless deposition, comprising the steps of: subjecting said diffusion barrier layer surface to an aqueous copper contact displacement solution; activating said diffusion barrier layer surface for autocatalytic growth of copper by forming at least a mono-layer of copper atoms on said barrier layer surface by contact displacement of copper to form a copper activation seed layer on said barrier layer surface; subjecting said copper activation seed layer to an electroless deposition solution; depositing copper electrolessly on said diffusion barrier layer surface by having said copper activation seed layer initiate said autocatalytic growth of copper.
Claim 3
Dependent Claim
16 words
The method of claim 1 wherein said barrier layer is comprised of titanium nitride or tantalum.
Claim 4
Dependent Claim
37 words
The method of claim 2 wherein said aqueous copper contact displacement solution includes copper sulfate (CuSO 4 ) and hydrofluoric acid (HF) to provide necessary copper and fluorine ions for said contact displacement of copper to occur.
Claim 5
Dependent Claim
38 words
The method of claim 3 wherein said aqueous copper contact displacement solution is further comprised of 0.001-2 mol/liter of Cu +2 ions, 0.001-5 mol/liter of F - ions and 0.01-10 gm/liter of surfactant material mixed in de-ionized water.
Claim 6
Dependent Claim
34 words
The method of claim 4 wherein said step of subjecting said barrier layer surface to said aqueous copper contact displacement solution occurs for approximately 1-600 seconds at an approximate temperature of 18-25 degrees C.
Claim 7
Dependent Claim
139 words
In a fabrication of a semiconductor device, a method of activating a surface of a material used as a copper diffusion barrier when disposed as a barrier layer for electroless deposition of copper, comprising the steps of: depositing said barrier layer, wherein said barrier layer is comprised of titanium nitride or tantalum; subjecting said surface of said barrier layer to an aqueous copper contact displacement solution; activating said barrier layer surface for autocatalytic growth of copper by forming at least a mono-layer of copper atoms on said barrier layer surface by contact displacement of copper to form a copper activation seed layer on said barrier layer surface; subjecting said copper activation seed layer to an electroless deposition solution; depositing copper electrolessly on said barrier layer surface by having said copper activation seed layer initiate said autocatalytic growth of copper.
Claim 8
Dependent Claim
139 words
In a fabrication of a semiconductor device, a method of activating a surface of a material used as a copper diffusion barrier when disposed as a barrier layer for electroless deposition of copper, comprising the steps of: depositing said barrier layer, wherein said barrier layer is comprised of titanium nitride or tantalum; subjecting said surface of said barrier layer to an aqueous copper contact displacement solution; activating said barrier layer surface for autocatalytic growth of copper by forming at least a mono-layer of copper atoms on said barrier layer surface by contact displacement of copper to form a copper activation seed layer on said barrier layer surface; subjecting said copper activation seed layer to an electroless deposition solution; depositing copper electrolessly on said barrier layer surface by having said copper activation seed layer initiate said autocatalytic growth of copper.
Claim 9
Dependent Claim
37 words
The method of claim 6 wherein said aqueous copper contact displacement solution includes copper sulfate (CUSO 4 ) and hydrofluoric acid (HF) to provide necessary copper and fluorine ions for said contact displacement of copper to occur.
Claim 10
Dependent Claim
38 words
The method of claim 7 wherein said aqueous copper contact displacement solution is further comprised of 0.001-2 mol/liter of Cu +2 ions, 0.001-5 mol/liter of F - ions and 0.01-10 gm/liter of surfactant material mixed in de-ionized water.
Claim 11
Dependent Claim
33 words
The method of claim 8 wherein said step of subjecting said barrier layer to said aqueous copper contact displacement solution occurs for approximately 1-600 seconds at an approximate temperature of 18-25 degrees C.
Claim 12
Dependent Claim
155 words
In a formation of a semiconductor interconnect structure in which two conductive regions are separated by a dielectric layer and connected by said interconnect structure, a method of electrolessly depositing copper to form said interconnect structure, comprising the steps of: forming an opening in said dielectric layer; depositing a diffusion barrier layer in said opening, wherein said barrier layer is comprised of titanium nitride or tantalum; subjecting said barrier layer to an aqueous copper contact displacement solution; activating a surface of said barrier layer for autocatalytic growth of copper by forming at least a mono-layer of copper atoms on said barrier layer surface by contact displacement of copper to form a copper activation seed layer on said barrier layer; subjecting said copper activation seed layer to an electroless deposition solution; depositing copper electrolessly on said barrier layer by having said copper activation seed layer initiate said autocatalytic growth of copper to form said interconnect structure.
Claim 13
Dependent Claim
155 words
In a formation of a semiconductor interconnect structure in which two conductive regions are separated by a dielectric layer and connected by said interconnect structure, a method of electrolessly depositing copper to form said interconnect structure, comprising the steps of: forming an opening in said dielectric layer; depositing a diffusion barrier layer in said opening, wherein said barrier layer is comprised of titanium nitride or tantalum; subjecting said barrier layer to an aqueous copper contact displacement solution; activating a surface of said barrier layer for autocatalytic growth of copper by forming at least a mono-layer of copper atoms on said barrier layer surface by contact displacement of copper to form a copper activation seed layer on said barrier layer; subjecting said copper activation seed layer to an electroless deposition solution; depositing copper electrolessly on said barrier layer by having said copper activation seed layer initiate said autocatalytic growth of copper to form said interconnect structure.
Claim 14
Dependent Claim
37 words
The method of claim 10 wherein said aqueous copper contact displacement solution includes copper sulfate (CuSO 4 ) and hydrofluoric acid (HF) to provide necessary copper and fluorine ions for said contact displacement of copper to occur.
Claim 15
Dependent Claim
38 words
The method of claim 11 wherein said aqueous copper contact displacement solution is further comprised of 0.001-2 mol/liter of Cu +2 ions, 0.001-5 mol/liter of F - ions and 0.01-10 gm/liter of surfactant material mixed in de-ionized water.
Claim 16
Dependent Claim
33 words
The method of claim 12 wherein said step of subjecting said barrier layer to said aqueous copper contact displacement solution occurs for approximately 1-600 seconds at an approximate temperature of 18-25 degrees C.
Claim 17
Dependent Claim
18 words
The method of claim 10 wherein said barrier layer is deposited to a thickness of approximately 50-1500 angstroms.
Claim 18
Dependent Claim
22 words
The method of claim 14 wherein said interconnect structure is a plug formed in a via opening or in a contact opening.
Claim 19
Dependent Claim
18 words
The method of claim 14 wherein said interconnect structure is a metal line formed in a trench opening.
Claim 20
Dependent Claim
27 words
The method of claim 14 wherein said opening is for both via and trench fill and said interconnect structure forms both a plug and a metal line.
Claim 21
Dependent Claim
206 words
In a formation of a semiconductor interconnect structure in which two conductive regions are separated by a dielectric layer and connected by said interconnect structure, a method of electrolessly depositing copper to form said interconnect structure, comprising the steps of: forming an opening in said dielectric layer; depositing a diffusion barrier layer over said dielectric layer and within said opening, wherein said barrier layer is comprised of titanium nitride or tantalum; subjecting said barrier layer to an aqueous copper contact displacement solution; activating a surface of said barrier layer for autocatalytic growth of copper by forming at least a mono-layer of copper atoms on said barrier layer surface by contact displacement of copper to form a copper activation seed layer on said barrier layer; subjecting said copper activation seed layer to an electroless deposition solution; depositing copper electrolessly on said barrier layer by having said copper activation seed layer initiate said autocatalytic growth of copper; maintaining said electroless copper depositing step until said opening is filled; removing excess copper residing above said dielectric layer, but retaining copper within said opening; wherein said copper retained in said opening forms said interconnect structure and in which said copper is isolated from said dielectric layer by said barrier layer.
Claim 22
Dependent Claim
206 words
In a formation of a semiconductor interconnect structure in which two conductive regions are separated by a dielectric layer and connected by said interconnect structure, a method of electrolessly depositing copper to form said interconnect structure, comprising the steps of: forming an opening in said dielectric layer; depositing a diffusion barrier layer over said dielectric layer and within said opening, wherein said barrier layer is comprised of titanium nitride or tantalum; subjecting said barrier layer to an aqueous copper contact displacement solution; activating a surface of said barrier layer for autocatalytic growth of copper by forming at least a mono-layer of copper atoms on said barrier layer surface by contact displacement of copper to form a copper activation seed layer on said barrier layer; subjecting said copper activation seed layer to an electroless deposition solution; depositing copper electrolessly on said barrier layer by having said copper activation seed layer initiate said autocatalytic growth of copper; maintaining said electroless copper depositing step until said opening is filled; removing excess copper residing above said dielectric layer, but retaining copper within said opening; wherein said copper retained in said opening forms said interconnect structure and in which said copper is isolated from said dielectric layer by said barrier layer.
Claim 23
Dependent Claim
37 words
The method of claim 18 wherein said aqueous copper contact displacement solution includes copper sulfate (CuSO 4 ) and hydrofluoric acid (HF) to provide necessary copper and fluorine ions for said contact displacement of copper to occur.
Claim 24
Dependent Claim
38 words
The method of claim 19 wherein said aqueous copper contact displacement solution is further comprised of 0.001-2 mol/liter of Cu +2 ions, 0.001-5 mol/liter of F - ions and 0.01-10 gm/liter of surfactant material mixed in de-ionized water.
Claim 25
Dependent Claim
33 words
The method of claim 20 wherein said step of subjecting said barrier layer to said aqueous copper contact displacement solution occurs for approximately 1-600 seconds at an approximate temperature of 18-25 degrees C.
Claim 26
Dependent Claim
18 words
The method of claim 18 wherein said barrier layer is deposited to a thickness of approximately 50-1500 angstroms.
Claim 27
Dependent Claim
22 words
The method of claim 22 wherein said interconnect structure is a plug formed in a via opening or in a contact opening.
Claim 28
Dependent Claim
18 words
The method of claim 22 wherein said interconnect structure is a metal line formed in a trench opening.
Claim 29
Dependent Claim
27 words
The method of claim 22 wherein said opening is for both via and trench fill and said interconnect structure forms both a plug and a metal line.
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