US5358907A
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Method of electrolessly depositing metals on a silicon substrate by immersing the substrate in hydrofluoric acid containing a buffered metal salt solution
Assignee: Xerox Corp
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Filing: 1993-05-10
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Granted: 1994-10-25
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Expires: 2013-05-10
Abstract
Abstract A thin layer of Class 1B, IIB, IIIA, IVB, VB, VIB, VIIB or VIIIB metal is deposited on silicon or a silicon-based compound by immersion in a buffered metallic salt bath containing a hydrofluoric acid etchant followed by an electroless plating bath to build up the metal thickness. This process can also be used to pattern deposited metal on silicon or a silicon-based compound. An additional use of this process is to form metal silicides out of the deposited metal.
Inventors
- 👤 Kaiser H. Wong
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 16:24
CPC Classifications
H; H10; H10D; H10D64/00; H10D64/01; H10D64/011; H10D64/0111; H10D64/0112; H10P; H10P14/00; H10P14/40; H10P14/46
Claims Analysis
Total Claims: 35
Claim 1
Independent Claim
124 words
A method of deposition of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, or VIII metals on a solid silicon compound member comprising the step of: depositing an approximately from 1000 angstroms to 2000 angstroms thick layer of metal of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, or VIII on said solid silicon compound member by immersing said solid silicon compound member in a buffered aqueous salt solution comprising an etchant of hydrofluoric acid, a buffer and a dissolved metallic salt, wherein said metallic salt comprises a metal of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, or VIII metals, and wherein said buffered aqueous salt solution has a molarity of less than about 0.032M of metal cations from said dissolved metallic salt.
Claim 2
Independent Claim
124 words
A method of deposition of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, or VIII metals on a solid silicon compound member comprising the step of: depositing an approximately from 1000 angstroms to 2000 angstroms thick layer of metal of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, or VIII on said solid silicon compound member by immersing said solid silicon compound member in a buffered aqueous salt solution comprising an etchant of hydrofluoric acid, a buffer and a dissolved metallic salt, wherein said metallic salt comprises a metal of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, or VIII metals, and wherein said buffered aqueous salt solution has a molarity of less than about 0.032M of metal cations from said dissolved metallic salt.
Claim 3
Dependent Claim
78 words
The method of deposition of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, or VIII metals on a solid silicon compound member of claim 1 comprising the further step of: immersing said solid silicon compound member coated with said approximately from 1000 angstroms to 2000 angstroms thick layer in an electroless plating bath and depositing metal of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, and VIII on said approximately from 1000 angstroms to 2000 angstroms thick layer.
Claim 4
Dependent Claim
63 words
The method of deposition of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, or VIII metals on a solid silicon compound member of claim 1 wherein said solid silicon compound member is chosen from the group consisting of: crystalline doped silicon, crystalline undoped silicon, crystalline doped polysilicon, crystalline undoped polysilicon, amorphous doped silicon, amorphous undoped silicon, amorphous doped polysilicon, and amorphous undoped polysilicon.
Claim 5
Dependent Claim
43 words
The method of deposition of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, or VIII metals on a solid silicon compound member of claim 3 wherein said buffered aqueous salt solution is a buffered copper/fluoride solution comprising cupric sulfate and ammonium acid fluoride.
Claim 6
Dependent Claim
54 words
The method of deposition of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, or VIII metals on a solid silicon compound member of claim 4 wherein said solid silicon compound member is initially immersed in an ammonium acid fluoride solution prior to immersion of said solid silicon compound member in said buffered copper/fluoride solution.
Claim 7
Dependent Claim
43 words
The method of deposition of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, or VIII metals on a solid silicon compound member of claim 3 wherein said buffered aqueous salt solution is a buffered palladium/chloride solution comprising palladium chloride and ammonium acid fluoride.
Claim 8
Dependent Claim
54 words
The method of deposition of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, or VIII metals on a solid silicon compound member of claim 6 wherein said solid silicon compound member is initially immersed in an ammonium acid fluoride solution prior to immersion of said solid silicon compound member in said buffered palladium/chloride solution.
Claim 9
Dependent Claim
76 words
The method of deposition of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, or VIII metals on a solid silicon compound member of claim 3 comprising the further step of: immersing said silicon compound coated with said approximately from 1000 angstroms to 2000 angstroms thick layer in an electroless plating bath and depositing metal of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, and VIII on said approximately from 1000 angstroms to 2000 angstroms thick layer.
Claim 10
Dependent Claim
35 words
The method of deposition of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, or VIII metals on a solid silicon compound member of claim 3 wherein said buffered aqueous salt solution includes ammonium acid fluoride.
Claim 11
Dependent Claim
33 words
The method of deposition of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, or VIII metals on a solid silicon compound member of claim 3 wherein said metallic salt is a copper salt.
Claim 12
Dependent Claim
33 words
The method of deposition of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, or VIII metals on a solid silicon compound member of claim 3 wherein said metallic salt is a palladium salt.
Claim 13
Dependent Claim
35 words
The method of deposition of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, or VIII metals on a solid silicon compound member of claim 1 wherein said buffered aqueous salt solution includes ammonium acid fluoride.
Claim 14
Dependent Claim
33 words
The method of deposition of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, or VIII metals on a solid silicon compound member of claim 1 wherein said metallic salt is a copper salt.
Claim 15
Dependent Claim
33 words
The method of deposition of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, or VIII metals on a solid silicon compound member of claim 1 wherein said metallic salt is a palladium salt.
Claim 16
Dependent Claim
35 words
The method of deposition of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, or VIII metals on a solid silicon compound member of claim 1 wherein the metallic salt is provided by using a replenisher.
Claim 17
Independent Claim
200 words
A method of fabricating patterned metal of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, or VIII on a solid silicon compound member comprising the steps of: depositing an insulatng layer on said solid silicon compound member, coating said insulating layer of said sold silicon compound member with photoresist or polyimide, exposing and developing said photoresist or polyimide, depositing an approximately from 1000 angstroms to 2000 angstroms thick layer metal of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, or VIII on said insulating layer in the areas of said insulating layer not covered by said photoresist or polyimide to form a pattern by immersing sad solid silicon compound member in a buffered aqueous salt solution comprising an etchant of hydrofluoric acid, a buffer and a dissolved metallic salt, wherein said metallic salt comprises a metal of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, or VIII metals, and wherein said buffered aqueous salt solution has a molarity of less than about 0.032M of metal cations from said dissolved metallic salt, removing said photoresist or polyimide leaving patterned metal of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, or VIII on said insulating layer of said solid silicon compound member.
Claim 18
Independent Claim
200 words
A method of fabricating patterned metal of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, or VIII on a solid silicon compound member comprising the steps of: depositing an insulatng layer on said solid silicon compound member, coating said insulating layer of said sold silicon compound member with photoresist or polyimide, exposing and developing said photoresist or polyimide, depositing an approximately from 1000 angstroms to 2000 angstroms thick layer metal of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, or VIII on said insulating layer in the areas of said insulating layer not covered by said photoresist or polyimide to form a pattern by immersing sad solid silicon compound member in a buffered aqueous salt solution comprising an etchant of hydrofluoric acid, a buffer and a dissolved metallic salt, wherein said metallic salt comprises a metal of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, or VIII metals, and wherein said buffered aqueous salt solution has a molarity of less than about 0.032M of metal cations from said dissolved metallic salt, removing said photoresist or polyimide leaving patterned metal of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, or VIII on said insulating layer of said solid silicon compound member.
Claim 19
Dependent Claim
74 words
The method of fabricating patterned metal of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, or VIII on a solid silicon compound member of claim 16 further comprising the step of: depositing metal of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, and VIII on said insulating layer in the areas of said insulating layer not covered by said photoresist or polyimide by immersing sad solid silicon compound member in an electroless plating bath.
Claim 20
Dependent Claim
63 words
The method of fabricating patterned metal of classes IVB, VB, VIB, VIIB, or VIII on a solid silicon compound member of claim 17 wherein: said solid silicon compound member comprises silicon or polysilicon, and a further step is performed to sinter said metal of classes IVB, VB, VIB, VIIB, and VIII deposited on the solid silicon compound member to form a metal silicide.
Claim 21
Dependent Claim
64 words
The method of fabricating patterned metal of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, or VIII on a solid silicon compound member of claim 16 wherein said solid silicon compound member is chosen from the group consisting of: crystalline doped silicon, crystalline undoped silicon, crystalline doped polysilicon, crystalline undoped polysilicon, amorphous doped silicon, amorphous undoped silicon, amorphous doped polysilicon, and amorphous undoped polysilicon.
Claim 22
Dependent Claim
46 words
The method of fabricating patterned metal of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, or VIII metals on a solid silicon compound member of claim 19 wherein said buffered aqueous salt solution is a buffered copper/fluoride solution comprising cupric sulfate pentahydrate and ammonium acid fluoride.
Claim 23
Dependent Claim
56 words
The method of fabricating patterned metal of classes IB, IIB, IIIA, IVB, VB, IB, VIIB, or VIII metals on a solid silicon compound member of claim 20, wherein said solid silicon compound member is initially immersed in an ammonium acid fluoride solution prior to immersion of said solid silicon compound member in said buffered copper/fluoride solution.
Claim 24
Dependent Claim
45 words
The method of fabricating patterned metal of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, or VIII metals on a solid silicon compound member of claim 19 wherein said buffered aqueous salt solution is a buffered palladium/chloride solution comprising palladium chloride and ammonium acid fluoride.
Claim 25
Dependent Claim
56 words
The method of fabricating patterned metal of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, or VIII metals on a solid silicon compound member of claim 22 wherein said solid silicon compound member is initially immersed in an ammonium acid fluoride solution prior to immersion of said solid silicon compound member in said buffered palladium/chloride solution.
Claim 26
Dependent Claim
75 words
The method of fabricating patterned metal of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, or VIII deposition on a solid silicon compound member of claim 19 further comprising the step of: depositing metal of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, and VIII on said insulating layer in the areas of said insulating layer not covered by said photoresist or polyimide by immersing said solid silicon compound member in an electroless plating bath.
Claim 27
Dependent Claim
37 words
The method of fabricating patterned metal of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, or VIII deposition on a solid silicon compound member of claim 19 wherein said buffered aqueous salt solution includes ammonium acid fluoride.
Claim 28
Dependent Claim
35 words
The method of fabricating patterned metal of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, or VIII metals on a solid silicon compound member of claim 19 wherein said metallic salt is a copper salt.
Claim 29
Dependent Claim
35 words
The method of fabricating patterned metal of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, or VIII metals on a solid silicon compound member of claim 19 wherein said metallic salt is a palladium salt.
Claim 30
Dependent Claim
36 words
The method of fabricating patterned metal of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, or VIII on a solid silicon compound member of claim 16 wherein said buffered aqueous salt solution includes ammonium acid fluoride.
Claim 31
Dependent Claim
36 words
The method of fabricating patterned metal of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, or VIII on a solid silicon compound member of claim 16 wherein said insulating layer comprises a layer of undoped polysilicon.
Claim 32
Dependent Claim
35 words
The method of fabricating patterned metal of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, or VIII metals on a solid silicon compound member of claim 16 wherein said metallic salt is a copper salt.
Claim 33
Dependent Claim
35 words
The method of fabricating patterned metal of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, or VIII metals on a solid silicon compound member of claim 16 wherein said metallic salt is a palladium salt.
Claim 34
Dependent Claim
61 words
The method of fabricating patterned metal of classes IVB, VB, VIB, VIIB, or VIII on a solid silicon compound member of claim 16 wherein said solid silicon compound member comprises silicon or polysilicon, comprising the further step of sintering said metal of classes IVB, VB, VIB, VIIB, and VIII deposited on the solid silicon compound member to form a metal silicide.
Claim 35
Dependent Claim
35 words
The method of deposition of classes IB, IIB, IIIA, IVB, VB, VIB, VIIB, or VIII metals on a solid silicon compound member of claim 16 wherein the metallic salt is provided by using a replenisher.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-10-24 | 1998-04-25 | 1998-10-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-10-24 | 2002-04-25 | 2002-10-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-10-24 | 2006-04-25 | 2006-10-25 | $7700.00 | Window Closed / Lapsed |