Electroless plating method and apparatus

Claim 2

An electroless plating method for plating a disk, comprising the steps of rotating said disk to be plated with its main surface upturned, causing a plating-pretreating solution to fall onto said main surface from above said main surface so as to bring said plating-pretreating solution into contact with said main surface, causing a cleaning solution to fall from above said main surface onto said main surface to thereby clean said main surface, causing a plating solution to fall from above said main surface onto said main surface to bring said plating solution into contact with said main surface, and causing a cleaning solution to fall from above said main surface onto said main surface to thereby clean said main surface.

Claim 3

An electroless plating method according to claim 1, wherein the respective steps of causing said plating-pretreating solution, said cleaning solution and said plating solution to fall on said main surface includes the steps of one of dropping and spraying the respective solution onto the main surface.

Claim 4

An electroless plating appratus for plating a disk, comprising: a turntable for carrying said disk thereon; an open-headed and close-bottomed cylindrical container for surrounding said turntable; and a liquid supply means for separately causing a cleaning solution and a treating solution individually to fall toward said turntable through the open head of said cylindrical container.

Claim 5

An electroless plating appratus for plating a disk, comprising: a turntable for carrying said disk thereon; an open-headed and close-bottomed cylindrical container for surrounding said turntable; and a liquid supply means for separately causing a cleaning solution and a treating solution individually to fall toward said turntable through the open head of said cylindrical container.

Claim 6

An electroless plating apparatus according to claim 3, further including means for moving said turntable to either one of upper and lower positions along its rotational axis, and wherein said cylindrical container includes an intermediate partition having an opening to a flange extending inwardly to the outer edge of said turntable when said turntable is in the middle between said upper position and said lower position: said intermediate partition sloping down, and outwardly to thereby communicate with a recovery hole provided in an upper-half portion of the inside of said cylindrical container separated by said intermediate partition.

Claim 7

An electroless plating apparatus according to claim 3, wherein said liquid supply means comprises a treating solution tank, a pump for pumping the treating solution form said tank to a first three way valve, a treating solution return pipe and a nozzle means coupled to two outputs of said first three way valve, said nozzle means having means to reciprocate a nozzle of said nozzle means between the interior and exterior of said main surface, a water line coupled to said nozzle means, and a liquid return means comprising a second three way valve, a first pipe connected to said second three way valve for returning liquid to said tank and a second pipe to coupled to said second three way valve for discharging liquid from said container to a waste pipe.