Projection optical system and exposure apparatus and method

Claim 2

A projection optical system capable of forming an image of an object, comprising, objectwise to imagewise, along an optical axis: a) a first lens group having positive refractive power; b) a second lens group having negative refractive power; c) a third lens group having positive refractive power; d) a fourth lens group having negative refractive power and a first aspherical surface; e) a fifth lens group having positive refractive power and an aperture stop; f) wherein the projection optical system is designed such that paraxial rays travelling parallel to the optical axis imagewise to objectwise intersect the optical axis at a location Q between said fourth lens group and said fifth lens group; g) at least one of said fourth and fifth lens groups includes a second aspherical surface arranged between said first aspherical surface and said aperture stop; h) said fifth lens group includes a third aspherical surface arranged imagewise of said aperture stop; and i) wherein the following condition is satisfied: 0.01 <d Q /{L ×(1 −NA )}<0.4  (1) wherein the image and the object are separated by a distance L, said location Q and said aperture stop are separated by a distance d Q , and NA is an imagewise numerical aperture of the projection optical system.

Claim 3

A projection optical system according to claim 1 , wherein said aperture stop has a variable size and is located imagewise of said location Q such that vignetting is minimized when said variable size is changed.

Claim 4

A projection optical system according to claim 1 , wherein: a) said first aspherical surface is concave and includes refractive power at a paraxial region and refractive power at a periphery, wherein said refractive power at said periphery is weaker than said refractive power at said paraxial region; b) said second aspherical surface includes refractive power at a paraxial region and refractive power at a periphery, and is one of: i) a convex surface, with said refractive power at said periphery weaker than said refractive power at said paraxial region; and ii) a concave surface, with said refractive power at said periphery stronger than said refractive power at said paraxial region; and c) said third aspherical surface includes refractive power at a paraxial region, and refractive power at a periphery, and is one of: i) a convex surface, with said refractive power at said periphery weaker than said refractive power at said paraxial region; and ii) a concave surface, with said refractive power at said periphery stronger than said refractive power at said paraxial region.

Claim 5

A projection optical system according to claim 1 , wherein said first lens group has at least one aspherical surface.

Claim 6

A projection optical system according to claim 1 , wherein said second lens group has at least one aspherical surface.

Claim 7

A projection optical system according to claim 1 , wherein said third lens group has at least one aspherical surface.

Claim 8

A projection optical system according to claim 1 , satisfying the following conditions: 0.05 < f1 / L < 0.5 ( 2 ) 0.02 < - f2 / L < 0.2 ( 3 ) 0.04 < f3 / L < 0.4 ( 4 ) 0.03 < - f4 / L < 0.3 ( 5 ) 0.04 < f5 / L < 0.4 ( 6 ) wherein f1 through f5 are focal lengths of said first through fifth lens groups, respectively.

Claim 9

A projection optical system capable of forming an image of an object, comprising, objectwise to imagewise, along an optical axis: a) a first lens group having positive refractive power; b) a second lens group having negative refractive power; c) a third lens group having positive refractive power; d) a fourth lens group having negative refractive power and a first aspherical concave surface with refractive power at a paraxial region and refractive power at a periphery, wherein said refractive power at said periphery is weaker than said refractive power at said paraxial region; e) a second aspherical surface arranged imagewise of said first aspherical surface and having refractive power at a paraxial region and refractive power at a periphery, and being one of: i) a convex surface, with said refractive power at said periphery weaker than said refractive power at said paraxial region; and ii) a concave surface, with said refractive power at said periphery stronger than said refractive power at said paraxial region; f) a fifth lens group having positive refractive power, an aperture stop, and a third aspherical surface arranged imagewise of said aperture stop, wherein said third aspherical surface includes a paraxial region, a periphery and refractive power and is one of: i) a convex surface, with said refractive power at said periphery weaker than said refractive power at said paraxial region; and ii) a concave surface, with said refractive power at said periphery stronger than said refractive power at said paraxial region; and g) wherein the projection optical system is designed such that paraxial rays traveling parallel to the optical axis imagewise to objectwise intersect the optical axis at a location Q between said fourth lens group and said fifth lens group.

Claim 10

A projection optical system capable of forming an image of an object, comprising, objectwise to imagewise, along an optical axis: a) a first lens group having positive refractive power; b) a second lens group having negative refractive power; c) a third lens group having positive refractive power; d) a fourth lens group having negative refractive power and a first aspherical concave surface with refractive power at a paraxial region and refractive power at a periphery, wherein said refractive power at said periphery is weaker than said refractive power at said paraxial region; e) a second aspherical surface arranged imagewise of said first aspherical surface and having refractive power at a paraxial region and refractive power at a periphery, and being one of: i) a convex surface, with said refractive power at said periphery weaker than said refractive power at said paraxial region; and ii) a concave surface, with said refractive power at said periphery stronger than said refractive power at said paraxial region; f) a fifth lens group having positive refractive power, an aperture stop, and a third aspherical surface arranged imagewise of said aperture stop, wherein said third aspherical surface includes a paraxial region, a periphery and refractive power and is one of: i) a convex surface, with said refractive power at said periphery weaker than said refractive power at said paraxial region; and ii) a concave surface, with said refractive power at said periphery stronger than said refractive power at said paraxial region; and g) wherein the projection optical system is designed such that paraxial rays traveling parallel to the optical axis imagewise to objectwise intersect the optical axis at a location Q between said fourth lens group and said fifth lens group.

Claim 11

A projection optical system according to claim 8 , wherein said first lens group has at least one aspherical surface.

Claim 12

A projection optical system according to claim 8 , wherein said second lens group has at least one aspherical surface.

Claim 13

A projection optical system according to claim 8 , wherein said third lens group has a least one aspherical surface.

Claim 14

A projection optical system according to claim 8 , satisfying the following conditions: 0.05 < f1 / L < 0.5 ( 2 ) 0.02 < - f2 / L < 0.2 ( 3 ) 0.04 < f3 / L < 0.4 ( 4 ) 0.03 < - f4 / L < 0.3 ( 5 ) 0.04 < f5 / L < 0.4 ( 6 ) wherein f1 through f5 are focal lengths of said first through fifth lens groups, respectively.

Claim 15

An exposure apparatus for imaging a pattern present on a reticle onto a photosensitive workpiece, comprising: a) a first stage for supporting the reticle; b) an illumination optical system adjacent said first stage for illuminating the reticle; c) a second stage for supporting a workpiece; and d) a projection optical system arranged between said first stage and said second stage, said projection optical system comprising in order from said first to said second stage: i) a first lens group having positive refractive power; ii) a second lens group having negative refractive power; iii) a third lens group having positive refractive power; iv) a fourth lens group having negative refractive power and a first aspherical surface; v) a fifth lens group having positive refractive power and an aperture stop; vi) wherein the projection optical system is designed such that paraxial rays travelling parallel to the optical axis imagewise to objectwise intersect the optical axis at a location Q between said fourth lens group and said fifth lens group; vii) wherein at least one of said fourth and fifth lens groups includes a second aspherical surface arranged between said first aspherical surface in said fourth lens group and said aperture stop; viii) wherein said fifth lens group includes a third aspherical surface arranged imagewise of said aperture stop; and ix) wherein the following condition is satisfied: 0.01 <d Q /{L ×(1 −NA )}<0.4  (1) wherein said image and said workpiece are separated by a distance L, said position Q and said aperture stop are separated by a distance d Q , and NA is an imagewise numerical aperture of the projection optical system.

Claim 16

An exposure apparatus for imaging a pattern present on a reticle onto a photosensitive workpiece, comprising: a) a first stage for supporting the reticle; b) an illumination optical system adjacent said first stage for illuminating the reticle; c) a second stage for supporting a workpiece; and d) a projection optical system arranged between said first stage and said second stage, said projection optical system comprising in order from said first to said second stage: i) a first lens group having positive refractive power; ii) a second lens group having negative refractive power; iii) a third lens group having positive refractive power; iv) a fourth lens group having negative refractive power and a first aspherical surface; v) a fifth lens group having positive refractive power and an aperture stop; vi) wherein the projection optical system is designed such that paraxial rays travelling parallel to the optical axis imagewise to objectwise intersect the optical axis at a location Q between said fourth lens group and said fifth lens group; vii) wherein at least one of said fourth and fifth lens groups includes a second aspherical surface arranged between said first aspherical surface in said fourth lens group and said aperture stop; viii) wherein said fifth lens group includes a third aspherical surface arranged imagewise of said aperture stop; and ix) wherein the following condition is satisfied: 0.01 <d Q /{L ×(1 −NA )}<0.4  (1) wherein said image and said workpiece are separated by a distance L, said position Q and said aperture stop are separated by a distance d Q , and NA is an imagewise numerical aperture of the projection optical system.

Claim 17

An exposure apparatus according to claim 13 , wherein said first stage and said second stage are moveable along a scanning direction, and said projection optical system includes an exposure field having a first dimension orthogonal to said scanning direction and a second dimension along said scanning direction, wherein said first dimension is greater than said second dimension.

Claim 18

An exposure apparatus according to claim 14 , wherein said first dimension is at least 25 mm.

Claim 19

A projection optical system capable of forming an image of an object, comprising, along an optical axis: a) a first lens group, arranged in an optical path between the object and the image, having positive refractive power and a plurality of lenses including a negative lens; b) a second lens group, arranged in the optical path between the first lens group and the image, having negative refractive power and a plurality of negative lenses; c) a third lens group, arranged in the optical path between the second lens group and the image, having positive refractive power and a plurality of positive lenses; d) a fourth lens group, arranged in the optical path between the third lens group and the image, having negative refractive power; e) a fifth lens group, arranged in the optical path between the fourth lens group and the image, having positive refractive power and a plurality of lenses including a negative lens, and having an aperture stop located in said fifth lens group; f) an imagewise maximum numerical aperture NA MAX of at least 0.8; and g) wherein the number of lenses objectwise of said aperture stop is at least six, and the number of lenses imagewise of said aperture stop is at least four.

Claim 20

A projection optical system capable of forming an image of an object, comprising, along an optical axis: a) a first lens group, arranged in an optical path between the object and the image, having positive refractive power and a plurality of lenses including a negative lens; b) a second lens group, arranged in the optical path between the first lens group and the image, having negative refractive power and a plurality of negative lenses; c) a third lens group, arranged in the optical path between the second lens group and the image, having positive refractive power and a plurality of positive lenses; d) a fourth lens group, arranged in the optical path between the third lens group and the image, having negative refractive power; e) a fifth lens group, arranged in the optical path between the fourth lens group and the image, having positive refractive power and a plurality of lenses including a negative lens, and having an aperture stop located in said fifth lens group; f) an imagewise maximum numerical aperture NA MAX of at least 0.8; and g) wherein the number of lenses objectwise of said aperture stop is at least six, and the number of lenses imagewise of said aperture stop is at least four.

Claim 21

A projection optical system according to claim 16 , further including an exposure field having a dimension of at least 25 mm.

Claim 22

A projection optical system according to claim 16 , wherein said aperture stop has a variable size such that the projection optical system has a numerical aperture NA satisfying the relation: 0.6 ×Na max ≦NA≦Na max .

Claim 23

A projection optical system according to claim 16 , wherein the optical axis is unfolded.

Claim 24

A projection optical system according to claim 16 , satisfying the following conditions: 0.05 < f1 / L < 0.5 ( 2 ) 0.02 < - f2 / L < 0.2 ( 3 ) 0.04 < f3 / L < 0.4 ( 4 ) 0.03 < - f4 / L < 0.3 ( 5 ) 0.04 < f5 / L < 0.4 ( 6 ) wherein f1 through f5 are focal lengths of said first through fifth lens groups, respectively.

Claim 25

A projection optical system according to claim 16 , further comprising an aspherical lens surface in any one of the lens groups.

Claim 26

A projection optical system capable of forming an image of an object, comprising, along an optical axis: a) a first lens group, arranged in an optical path between the object and the image, having positive refractive power and a plurality of lenses including a negative lens; b) a second lens group, arranged in the optical path between the first lens group and the image, having negative refractive power and a plurality of negative lenses; c) a third lens group, arranged in the optical path between the second lens group and the image, having positive refractive power and a plurality of positive lenses; d) a fourth lens group, arranged in the optical path between the third lens group and the image, having negative refractive power; e) a fifth lens group, arranged in the optical path between the fourth lens group and the image, having positive refractive power and a plurality of lenses including a negative lens, and having an aperture stop located in said fifth lens group; f) an imagewise maximum numerical aperture NA MAX of at least 0.8; and g) said projection optical system further satisfying the following condition: 0.01 <d Q /{L ×(1 −NA )}<0.4  (1) wherein said image and said object are separated by a distance L, Q is a position located a distance d Q from said aperture stop wherein paraxial rays traveling parallel to the optical axis imagewise to objectwise intersect the optical axis, and wherein NA is an imagewise numerical aperture of the projection optical system.

Claim 27

A projection optical system capable of forming an image of an object, comprising, along an optical axis: a) a first lens group, arranged in an optical path between the object and the image, having positive refractive power and a plurality of lenses including a negative lens; b) a second lens group, arranged in the optical path between the first lens group and the image, having negative refractive power and a plurality of negative lenses; c) a third lens group, arranged in the optical path between the second lens group and the image, having positive refractive power and a plurality of positive lenses; d) a fourth lens group, arranged in the optical path between the third lens group and the image, having negative refractive power; e) a fifth lens group, arranged in the optical path between the fourth lens group and the image, having positive refractive power and a plurality of lenses including a negative lens, and having an aperture stop located in said fifth lens group; f) an imagewise maximum numerical aperture NA MAX of at least 0.8; and g) said projection optical system further satisfying the following condition: 0.01 <d Q /{L ×(1 −NA )}<0.4  (1) wherein said image and said object are separated by a distance L, Q is a position located a distance d Q from said aperture stop wherein paraxial rays traveling parallel to the optical axis imagewise to objectwise intersect the optical axis, and wherein NA is an imagewise numerical aperture of the projection optical system.

Claim 28

A projection optical system having specifications and characteristics as set forth in Tables 1A-1C.

Claim 29

A projection optical system having specifications and characteristics as set forth in Tables 1A-1C.

Claim 30

A projection optical system having specifications and characteristics as set forth in Tables 2A-2C.

Claim 31

A projection optical system having specifications and characteristics as set forth in Tables 2A-2C.

Claim 32

A projection optical system having specifications and characteristics as set forth in Tables 3A-3C.

Claim 33

A projection optical system having specifications and characteristics as set forth in Tables 3A-3C.

Claim 34

A projection optical system having specifications and characteristics as set forth in Tables 4A-4C.

Claim 35

A projection optical system having specifications and characteristics as set forth in Tables 4A-4C.

Claim 36

An exposure apparatus for imaging a pattern present on a reticle onto a photosensitive workpiece, comprising: (a) a first stage for supporting the reticle; (b) an illumination optical system adjacent said first stage for illuminating the reticle; (c) a second stage for supporting the workpiece; and (d) a projection optical system arranged between said first stage and said second stage, said projection optical system comprising in order from said first to said second stage: (i) a first lens group having positive refractive power; (ii) a second lens group having negative refractive power; (iii) a third lens group having positive refractive power; (iv) a fourth lens group having negative refractive power and a first aspherical concave surface with a paraxial region, a periphery and refractive power, wherein said refractive power at said periphery is weaker than said refractive power at said paraxial region; (v) a second aspherical surface arranged imagewise of said first aspherical surface and having a paraxial region, a periphery and refractive power, said second aspherical surface being one of: (1) a convex surface, with said refractive power at said periphery weaker than said refractive power at said paraxial region; and (2) a concave surface, with said refractive power at said periphery stronger than said refractive power at said paraxial region; (vi) a fifth lens group having positive refractive power, an aperture stop, and a third aspherical surface with a paraxial region, a periphery and refractive power, said third aspherical surface being one of: (1) a convex surface, with said refractive power at said periphery weaker then said refractive power at said paraxial region; and (2) a concave surface, with said refractive power at said periphery stronger than said refractive power at said paraxial region; and (vii) wherein the projection optical system is designed such that paraxial rays traveling parallel to the optical axis imagewise to objectwise intersect the optical axis at a location Q between said fourth lens group and said fifth lens group.

Claim 37

An exposure apparatus for imaging a pattern present on a reticle onto a photosensitive workpiece, comprising: (a) a first stage for supporting the reticle; (b) an illumination optical system adjacent said first stage for illuminating the reticle; (c) a second stage for supporting the workpiece; and (d) a projection optical system arranged between said first stage and said second stage, said projection optical system comprising in order from said first to said second stage: (i) a first lens group having positive refractive power; (ii) a second lens group having negative refractive power; (iii) a third lens group having positive refractive power; (iv) a fourth lens group having negative refractive power and a first aspherical concave surface with a paraxial region, a periphery and refractive power, wherein said refractive power at said periphery is weaker than said refractive power at said paraxial region; (v) a second aspherical surface arranged imagewise of said first aspherical surface and having a paraxial region, a periphery and refractive power, said second aspherical surface being one of: (1) a convex surface, with said refractive power at said periphery weaker than said refractive power at said paraxial region; and (2) a concave surface, with said refractive power at said periphery stronger than said refractive power at said paraxial region; (vi) a fifth lens group having positive refractive power, an aperture stop, and a third aspherical surface with a paraxial region, a periphery and refractive power, said third aspherical surface being one of: (1) a convex surface, with said refractive power at said periphery weaker then said refractive power at said paraxial region; and (2) a concave surface, with said refractive power at said periphery stronger than said refractive power at said paraxial region; and (vii) wherein the projection optical system is designed such that paraxial rays traveling parallel to the optical axis imagewise to objectwise intersect the optical axis at a location Q between said fourth lens group and said fifth lens group.

Claim 38

An exposure apparatus according to claim 27 , wherein said first stage and said second stage are movable along a scanning direction, and said projection optical system includes an exposure field having a first dimension orthogonal to said scanning direction, and a second dimension along said scanning direction, wherein said first dimension is greater than said second dimension.

Claim 39

A exposure apparatus according to claim 28 , wherein at least one of said plurality of lenses includes an aspherical surface.