Patent US3481444A successfully refreshed from Google Patents.
US6008884A
Expired / Lapsed
US
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Projection lens system and apparatus
Assignee: Nikon Corp
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Filing: 1998-04-27
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Granted: 1999-12-28
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Expires: 2018-04-27
Abstract
Abstract A high-performance dioptric reduction projection lens and projection exposure apparatus and projection exposure method using same. The projection lens includes six lens groups and has a positive negative positive negative positive refractive power arrangement. The third and fifth lens groups have overall positive refractive power and include at least three lens elements having positive refractive power. The fourth lens group has negative refractive power and includes at least three lens elements having negative refractive power. At least one lens element in either the fourth lens group or the fifth lens group includes an aspheric surface. The projection lens preferably satisfies at least one of a number of design conditions.
Inventors
- 👤 Kotaro Yamaguchi
- 👤 Kiyoshi Hayashi
- 👤 Tomawaki Takahashi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 12:58
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70216; G03F7/70241; G02; G02B; G02B13/00; G02B13/24; G02B13/26
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
139 words
A projection lens having an object plane and an image plane and comprising objectwise to imagewise: a) a first lens group having positive refractive power; b) a second lens group having negative refractive power; c) a third lens group having overall positive refractive power, and including at least three lens elements having positive refractive power; d) a fourth lens group having overall negative refractive power and including at least three lens elements having negative refractive power; e) a fifth lens group having overall positive refractive power and including at least three lens elements having positive refractive power; f) a sixth lens group having positive refractive power; g) wherein at least one of said fourth lens group and said fifth lens group includes at least one aspheric surface; and h) the projection lens having a numerical aperture larger than 0.6.
Claim 2
Dependent Claim
139 words
A projection lens having an object plane and an image plane and comprising objectwise to imagewise: a) a first lens group having positive refractive power; b) a second lens group having negative refractive power; c) a third lens group having overall positive refractive power, and including at least three lens elements having positive refractive power; d) a fourth lens group having overall negative refractive power and including at least three lens elements having negative refractive power; e) a fifth lens group having overall positive refractive power and including at least three lens elements having positive refractive power; f) a sixth lens group having positive refractive power; g) wherein at least one of said fourth lens group and said fifth lens group includes at least one aspheric surface; and h) the projection lens having a numerical aperture larger than 0.6.
Claim 3
Dependent Claim
116 words
A projection lens according to claim 1, satisfying one or more of the following design conditions: 0.1<f.sub.1 /f.sub.3 <15 0.05<f.sub.2 /f.sub.4 <6 0.01<f.sub.5 /L<1.2 0.02<f.sub.6 /L<1.8 -0.3<f.sub.4 /L<-0.005 -0.5<f.sub.2 /L<-0.005 wherein the focal length of said first lens group is f 1 , the focal length of said second lens group is f 2 , the focal length of said third lens group is f 3 , the focal length of said fourth lens group is f 4 , the focal length of said fifth lens group is f 5 , the focal length of said sixth lens group is f 6 , and the distance from the object plane to the image plane is L.
Claim 4
Dependent Claim
57 words
A projection lens according to claim 2 wherein said second lens group includes at least five lens elements, three of which have negative refractive power, and further satisfying the design condition -0.3<f.sub.2 n/L<-0.01 wherein the composite focal length of said third lens element through said fifth lens element in said second lens group is f 2 n.
Claim 5
Dependent Claim
27 words
A projection lens according to claim 3, wherein at least one of said five lens elements in said second lens group includes at least one aspheric surface.
Claim 6
Dependent Claim
36 words
A projection lens according to claim 4 wherein said first lens group includes one or more lens elements and at least one aspheric surface on one of said one or more first lens group lens elements.
Claim 7
Dependent Claim
33 words
A projection lens according to claim 5, wherein said third lens group includes one or more lens elements, and at least one aspheric surface on one of said third lens group lens elements.
Claim 8
Dependent Claim
33 words
A projection lens according to claim 6, wherein said sixth lens group includes one or more lens elements and at least one aspheric surface on one of said sixth lens group lens elements.
Claim 9
Dependent Claim
42 words
A projection lens according to claim 3, wherein said fifth lens group includes a negative meniscus lens element having a concave surface, and further satisfying the design condition 0.1<|R.sub.5 n|/L<0.5 wherein said concave surface has a radius of curvature R 5 n.
Claim 10
Dependent Claim
42 words
A projection lens according to claim 8 wherein said sixth lens group includes a negative meniscus lens element having a concave surface and further satisfying the design condition 0.03<|R.sub.6 n|/L<0.15 wherein said concave surface has a radius of curvature R 6 n.
Claim 11
Dependent Claim
38 words
A projection lens according to claim 9 wherein said first lens group includes a lens element having negative refractive power and an image-plane-side radius of curvature of R 1 n and further satisfying the design condition 0.1<|R.sub.1 n|/L<0.5.
Claim 12
Dependent Claim
78 words
A projection exposure apparatus comprising: a) the projection lens of claim 1; b) a reticle holder capable of holding a reticle at or near the object plane of said projection lens; c) a source of illumination disposed adjacent said reticle holder and opposite said projection lens; and d) a workpiece holder disposed adjacent said projection lens on the image-plane side, said workpiece holder capable of holding a workpiece at or near the image plane of said projection lens.
Claim 13
Dependent Claim
78 words
A projection exposure apparatus comprising: a) the projection lens of claim 10; b) a reticle holder capable of holding a reticle at or near the object plane of said projection lens; c) a source of illumination disposed adjacent said reticle holder and opposite said projection lens; and d) a workpiece holder disposed adjacent said projection lens on the image-plane side, said workpiece holder capable of holding a workpiece at or near the image plane of said projection lens.
Claim 14
Dependent Claim
70 words
A method of projection exposing patterns onto a workpiece, the method comprising the steps of: a) providing the projection lens of claim 1; b) disposing a reticle containing the patterns at or near said object plane of said projection lens; c) disposing the workpiece at or near said image plane; and d) illuminating said reticle with a source of Kohler illumination disposed adjacent said reticle and opposite said projection lens.
Claim 15
Dependent Claim
70 words
A method of projection exposing patterns onto a workpiece, the method comprising the steps of: a) providing the projection lens of claim 10; b) disposing a reticle containing the patterns at or near said object plane of said projection lens; c) disposing the workpiece at or near said image plane; and d) illuminating said reticle with a source of Kohler illumination disposed adjacent said reticle and opposite said projection lens.
Claim 16
Dependent Claim
47 words
A projection exposure apparatus comprising: a) the projection lens of claim 1; b) an object disposed at or near said projection lens object plane; and c) an illumination optical system disposed so as to illuminate said object to form an image at said projection lens object plane.
Claim 17
Dependent Claim
117 words
A projection exposure apparatus according to claim 15, satisfying one or more of the following design conditions: 0.1<f.sub.1 /f.sub.3 <15 0.05<f.sub.2 /f.sub.4 <6 0.01<f.sub.5 /L<1.2 0.02<f.sub.6 /L<1.8 -0.3<f.sub.4 /L<-0.005 -0.5<f.sub.2 /L<-0.005 wherein the focal length of said first lens group is f 1 , the focal length of said second lens group is f 2 , the focal length of said third lens group is f 3 , the focal length of said fourth lens group is f 4 , the focal length of said fifth lens group is f 5 , the focal length of said sixth lens group is f 6 , and the distance from the object plane to the image plane is L.
Claim 18
Dependent Claim
58 words
A projection exposure apparatus according to claim 16, wherein said second lens group includes at least five lens elements, three of which have negative refractive power, and further satisfying the design condition -0.3<f.sub.2 n/L<-0.01 wherein the composite focal length of said third lens element through said fifth lens element in said second lens group is f 2 n.
Claim 19
Dependent Claim
28 words
A projection exposure apparatus according to claim 17, wherein at least one of said five lens elements in said second lens group includes at least one aspheric surface.
Claim 20
Dependent Claim
37 words
A projection exposure apparatus according to claim 18, wherein said first lens group includes one or more lens elements and at least one aspheric surface on one of said one or more first lens group lens elements.
Claim 21
Dependent Claim
34 words
A projection exposure apparatus according to claim 19, wherein said third lens group includes one or more lens elements, and at least one aspheric surface on one of said third lens group lens elements.
Claim 22
Dependent Claim
34 words
A projection exposure apparatus according to claim 20, wherein said sixth lens group includes one or more lens elements and at least one aspheric surface on one of said sixth lens group lens elements.
Claim 23
Dependent Claim
43 words
A projection exposure apparatus according to claim 20, wherein said fifth lens group includes a negative meniscus lens element having a concave surface, and further satisfying the design condition 0.1<|R.sub.5 n|/L<0.5 wherein said concave surface has a radius of curvature R 5 n.
Claim 24
Dependent Claim
43 words
A projection exposure apparatus according to claim 21, wherein said sixth lens group includes a negative meniscus lens element having a concave surface and further satisfying the design condition 0.03<|R.sub.6 n|/L<0.15 wherein said concave surface has a radius of curvature R 6 n.
Claim 25
Dependent Claim
39 words
A projection exposure apparatus according to claim 23, wherein said first lens group includes a lens element having negative refractive power and an image-plane-side radius of curvature of R 1 n and further satisfying the design condition 0.1<|R.sub.1 n|/L<0.5.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-12-27 | 2003-06-28 | 2003-12-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-12-27 | 2007-06-28 | 2007-12-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-12-27 | 2011-06-28 | 2011-12-28 | $7700.00 | Window Closed / Lapsed |