US5834770A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Ion collecting electrode for total pressure collector
Assignee: Inficon GmbH Deutschland
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Filing: 1997-07-11
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Granted: 1998-11-10
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Expires: 2017-07-11
Abstract
Abstract A mass spectrometer gas analyzer includes an ion source for producing ions of a sample gas in a defined ion volume. An ion analyzer collects and analyzes a first portion of the produced ions to determine a partial pressure for a selected gas species within the sample gas. An oppositely disposed ion collector collects a second portion of the ions to determine a total pressure of the contained gas sample. A collecting surface of the ion collector is positioned relative to the incoming ion beam to allow collection of ion current but the surface is configured such that a substantial portion of a plurality of secondary electrons produced by ion bombardment with the ion collector are deflected away from the ionization volume. The partial pressure is thus determined by the ion analyzer without secondary electrons entering the ion analyzer.
Inventors
- 👤 David H. Holkeboer
- 👤 Louis C. Frees
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 15:19
CPC Classifications
H; H01; H01J; H01J49/00; H01J49/02; H01J49/10; H01J41/00; H01J41/02; H01J41/10
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
94 words
A mass spectrometer gas analyzer, comprising: source means for producing ions of a sample gas in a defined ionization volume; first analyzing means for collecting and analyzing a first portion of produced ions to determine a partial pressure for a selected gas species within said sample gas; second analyzing means for collecting and analyzing a second portion of said ions to determine a total pressure of said gas sample; and deflection means for deflecting a substantial portion of a plurality of secondary electrons produced by said second analyzing means away from said ionization volume.
Claim 2
Dependent Claim
94 words
A mass spectrometer gas analyzer, comprising: source means for producing ions of a sample gas in a defined ionization volume; first analyzing means for collecting and analyzing a first portion of produced ions to determine a partial pressure for a selected gas species within said sample gas; second analyzing means for collecting and analyzing a second portion of said ions to determine a total pressure of said gas sample; and deflection means for deflecting a substantial portion of a plurality of secondary electrons produced by said second analyzing means away from said ionization volume.
Claim 3
Dependent Claim
64 words
A mass spectrometer gas analyzer as recited in claim 1, wherein: said second analyzing means includes a total pressure ion collector arranged in proximity to said ionization volume; and said deflection means includes a collecting surface of said total pressure ion collector, said collecting surface being configured to prevent secondary electrons formed from contacting said collecting surface to be redirected into said ionization volume.
Claim 4
Dependent Claim
50 words
A mass spectrometer gas analyzer as recited in claim 2, wherein said first analyzing means includes a quadrupole mass filter oppositely arranged with respect to said source means from said total pressure collector, said mass filter having means for analyzing a specific portion of ions created by said source means.
Claim 5
Dependent Claim
51 words
A mass spectrometer gas analyzer as recited in claim 2, wherein a normal of said collecting surface of said total pressure ion collector is angled with respect to an ion stream comprising said second portion of ions, said angle being in a range from about 15 degrees to about 45 degrees.
Claim 6
Dependent Claim
48 words
A mass spectrometer gas analyzer as recited in claim 4, wherein said collecting surface of said total pressure ion collector is essentially planar, said surface being angled relative to said ionization volume to prevent secondary electrons produced by said collecting surface from being directed into said ionization volume.
Claim 7
Dependent Claim
17 words
A mass spectrometer gas analyzer as recited in claim 4, wherein said collector surface is essentially V-shaped.
Claim 8
Dependent Claim
111 words
A mass spectrometer gas analyzer, comprising: an ion source for producing ions of a sample gas in an ionization volume; an ion analyzer for analyzing a first portion of said ions to determine a partial pressure for a selected gas species within said sample gas; and an ion collector, for collecting a second portion of said ions to determine a total pressure of said gas sample, wherein a collecting surface of said ion collector is configured relative to said second beam such that a substantial portion of a plurality of secondary electrons produced by ion bombardment of said ion collector by said second beam are deflected away from said ionization volume.
Claim 9
Dependent Claim
111 words
A mass spectrometer gas analyzer, comprising: an ion source for producing ions of a sample gas in an ionization volume; an ion analyzer for analyzing a first portion of said ions to determine a partial pressure for a selected gas species within said sample gas; and an ion collector, for collecting a second portion of said ions to determine a total pressure of said gas sample, wherein a collecting surface of said ion collector is configured relative to said second beam such that a substantial portion of a plurality of secondary electrons produced by ion bombardment of said ion collector by said second beam are deflected away from said ionization volume.
Claim 10
Dependent Claim
19 words
A mass spectrometer gas analyzer as recited in claim 7, wherein said ion analyzer is a quadrupole mass filter.
Claim 11
Dependent Claim
37 words
A mass spectrometer gas analyzer as recited in claim 8, wherein said ion collector is a total pressure collector capable of measuring ions for establishing a total pressure for a sample gas retained in said ionization volume.
Claim 12
Dependent Claim
59 words
A mass spectrometer gas analyzer as recited in claim 9, wherein said total pressure collector includes a collecting surface arranged in proximity to said ionization volume, said surface being configured for receiving ions from said volume, said surface being further configured for deflecting secondary electrons produced by contact with said collecting surface from being directed into said ionization volume.
Claim 13
Dependent Claim
41 words
A mass spectrometer gas analyzer as recited in claim 10, wherein said collecting surface is angled with respect to said ionization volume, said angle being in the range of between approximately 20 to 45 degrees relative to an incoming ion beam.
Claim 14
Dependent Claim
18 words
A mass spectrometer gas analyzer as recited in claim 10, wherein said collecting surface includes a beveled shape.
Claim 15
Dependent Claim
16 words
A mass spectrometer gas analyzer as recited in claim 12, wherein said collecting surface is V-shaped.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-11-09 | 2002-05-11 | 2002-11-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-11-09 | 2006-05-11 | 2006-11-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-11-09 | 2010-05-11 | 2010-11-10 | $7700.00 | Window Closed / Lapsed |