Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
171 words
An illumination device for illuminating an object with light from a pulsed laser beam light source of wavelength λ that is directed toward said object by a vibration mirror, the vibration of which forms, from said pulsed laser beam, a secondary light source having N spots, comprising an array of M lens elements between said secondary light source and said object, said lens elements being arranged at a spacing d along one dimension of the array and disposed at a spatial coherent area of light from said secondary light source, said device meeting the following conditions: d=m.(λ/θ.sub.o) N.(λ/θ.sub.o)>M.d where m is an integer and θ o is an angle representing the range of variation of the angle of incidence of said light from said secondary light source incident on said lens elements, and means for adjusting the intensity of light illuminating said object such that the total light intensity of pulses of light emitted by said pulsed laser light source is substantially equal to a light intensity required by said object.
Claim 2
Dependent Claim
171 words
An illumination device for illuminating an object with light from a pulsed laser beam light source of wavelength λ that is directed toward said object by a vibration mirror, the vibration of which forms, from said pulsed laser beam, a secondary light source having N spots, comprising an array of M lens elements between said secondary light source and said object, said lens elements being arranged at a spacing d along one dimension of the array and disposed at a spatial coherent area of light from said secondary light source, said device meeting the following conditions: d=m.(λ/θ.sub.o) N.(λ/θ.sub.o)>M.d where m is an integer and θ o is an angle representing the range of variation of the angle of incidence of said light from said secondary light source incident on said lens elements, and means for adjusting the intensity of light illuminating said object such that the total light intensity of pulses of light emitted by said pulsed laser light source is substantially equal to a light intensity required by said object.
Claim 3
Dependent Claim
24 words
An illumination device in accordance with claim 1, wherein said array of lens elements is replicated in two dimensions to form a flyeye lens.
Claim 4
Dependent Claim
18 words
An illumination device in accordance with claim 1, wherein said pulsed laser light source comprises an excimer laser.
Claim 5
Dependent Claim
24 words
An illumination device in accordance with claim 1, wherein said light intensity adjusting means comprises a filter in the path of said laser beam.
Claim 6
Dependent Claim
28 words
An illumination device in accordance with claim 1, further comprising means for collimating light from said secondary light source which is incident upon said array of lens elements.