US4683524A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Illumination apparatus
Assignee: Canon Inc
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Filing: 1986-10-16
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Granted: 1987-07-28
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Expires: 2006-10-16
Abstract
Abstract An illumination apparatus for illuminating a surface, having formed thereon a pattern, to transfer the pattern onto a semiconductor wafer. The apparatus includes an elliptic mirror for forming an image of a light source, an imaging system for re-imaging the image of the light source, formed by the elliptical mirror, while causing a curvature of field, a multi-beam generating system disposed relative to the imaging system so that the optimum focus located at the off-axis position of the imaging system is coincident with an input surface of the multi-beam generating system, and a collimator for directing to the pattern surface a number of discrete light beams generated by the multi-beam generating system to illuminate the pattern surface. Whereby a uniform intensity distribution of the light illuminating the pattern surface and a high light-collecting efficiency are assured.
Inventors
- 👤 Masakatsu Ohta
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 06:39
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70058
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
100 words
An illumination apparatus, comprising: a light source; an elliptical mirror for forming an image of said light source; an imaging system for re-imaging the image formed by said elliptical mirror, while causing a curvature of field; a multi-beam generating system for producing, from a light beam emitted from said light source, a number of discrete light beams, said multi-beam generating system having an input surface disposed in a predetermined relation to the image of said light source formed by said imaging system; and a collimating system for collimating each of the discrete light beams emerging from said multi-beam generating system.
Claim 2
Dependent Claim
100 words
An illumination apparatus, comprising: a light source; an elliptical mirror for forming an image of said light source; an imaging system for re-imaging the image formed by said elliptical mirror, while causing a curvature of field; a multi-beam generating system for producing, from a light beam emitted from said light source, a number of discrete light beams, said multi-beam generating system having an input surface disposed in a predetermined relation to the image of said light source formed by said imaging system; and a collimating system for collimating each of the discrete light beams emerging from said multi-beam generating system.
Claim 3
Dependent Claim
30 words
An apparatus according to claim 1, wherein an optimum focus point at an off-axis position of said imaging system is located on said input surface of said multi-beam generting system.
Claim 4
Dependent Claim
35 words
An apparatus according to claim 2, wherein the optimum focus point at the off-axis position of said imaging system is located at the outermost off-axis portion on said input surface of said multi-beam generating system.
Claim 5
Independent Claim
84 words
An apparatus, comprising: a light source; an imaging system for forming an image of said light source, while causing a curvature of field; a multi-beam generating system for generating, from a light beam emitted from said light source, a number of discrete light beams, said multi-beam generating system having an input surface disposed at an optimum focus point at an off-axis position of said imaging system; and a collimating system for collimating each of the discrete light beams emerging from said multi-beam generating system.
Claim 6
Independent Claim
84 words
An apparatus, comprising: a light source; an imaging system for forming an image of said light source, while causing a curvature of field; a multi-beam generating system for generating, from a light beam emitted from said light source, a number of discrete light beams, said multi-beam generating system having an input surface disposed at an optimum focus point at an off-axis position of said imaging system; and a collimating system for collimating each of the discrete light beams emerging from said multi-beam generating system.
Claim 7
Dependent Claim
35 words
An apparatus according to claim 4, wherein the outermost off-axis portion of said input surface of said multi-beam generating system is coincident with the optimum focus point at the off-axis position of said imaging system.
Claim 8
Dependent Claim
98 words
An illumination apparatus, comprising: a light source; an elliptical mirror for forming an image of said light source; an imaging system for re-imaging, in a predetermined state, the image formed by said elliptical mirror; a multi-beam generating system for producing, from a light beam emitted from said light source, a number of discrete light beams, said multi-beam generating system having an input surface disposed in a predetermined relation to the image of said light source formed by said imaging system; and a collimating system for collimating each of the discrete light beams emerging from said multi-beam generating system.
Claim 9
Dependent Claim
98 words
An illumination apparatus, comprising: a light source; an elliptical mirror for forming an image of said light source; an imaging system for re-imaging, in a predetermined state, the image formed by said elliptical mirror; a multi-beam generating system for producing, from a light beam emitted from said light source, a number of discrete light beams, said multi-beam generating system having an input surface disposed in a predetermined relation to the image of said light source formed by said imaging system; and a collimating system for collimating each of the discrete light beams emerging from said multi-beam generating system.
Claim 10
Dependent Claim
31 words
An apparatus according to claim 6, wherein said imaging system is effective to define, between an on-axis portion and an off-axis portion, optimum focus positions which are displaced from each other.
Claim 11
Dependent Claim
97 words
An illumination apparatus for illuminating a plane, said apparatus comprising: a light source; an imaging system for forming an image of said light source, while causing a curvature of field; a multi-beam generating system for producing, from a light beam emitted from said light source, a number of discrete light beams, said multi-beam generating system having an input surface disposed in a predetermined relation to the image of said light source formed by said imaging system; and optical means for directing each of the light beams from said multi-beam generating system to the plane to be illuminated.
Claim 12
Dependent Claim
97 words
An illumination apparatus for illuminating a plane, said apparatus comprising: a light source; an imaging system for forming an image of said light source, while causing a curvature of field; a multi-beam generating system for producing, from a light beam emitted from said light source, a number of discrete light beams, said multi-beam generating system having an input surface disposed in a predetermined relation to the image of said light source formed by said imaging system; and optical means for directing each of the light beams from said multi-beam generating system to the plane to be illuminated.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-07-27 | 1991-01-26 | 1991-07-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-07-27 | 1995-01-26 | 1995-07-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-07-27 | 1999-01-26 | 1999-07-28 | $7700.00 | Window Closed / Lapsed |