US3988066A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Light exposure apparatus for printing
Assignee: Canon Inc
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Filing: 1974-12-30
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Granted: 1976-10-26
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Expires: 1994-12-30
Abstract
Abstract In the apparatus, an image of a mask is printed on a light-sensitive layer while minimizing the debasing influences due to the diffraction occurring on the layer surface as well as due to the standing wave occurring in the layer. This apparatus includes an arrangement such that the rays coming from a light source are collimated and then directed to a fly's eye lens assembly, and the exit rays from this assembly are again collimated to illuminate the mask. The luminous fluxes of parallel rays impinging upon the mask at various angles of incidence remove the influences of diffraction on the image of the mask. Also this apparatus includes a filter removably inserted in the optical path between the light source and the assembly to remove the influence of the standing wave.
Inventors
- 👤 Akiyoshi Suzuki
- 👤 Ichiro Kano
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 07:39
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/7055; G03F7/70583
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
155 words
A light exposure apparatus for printing comprising: a light source; a converging optical system arranged to substantially collimate the rays coming from said light source; a multiple flux generating assembly arranged in the path of a flux of rays exiting from said condenser lens system to form a great number of component fluxes while causing each of the component fluxes to spread; a collimating lens system disposed with its primary focal point substantially coinciding with a plane containing the origins of the component fluxes formed by said multiple flux generating assembly; a mask carrying a microscopic pattern constructed in the form of an array of light-permeable and light-impermeable regions; and mask supporting means supporting said mask above the surface on which an image of the mask is projected and spaced apart therefrom by a distance which is in the order of microns; whereby said collimating lens system collimates said component fluxes which illuminate said mask.
Claim 2
Dependent Claim
155 words
A light exposure apparatus for printing comprising: a light source; a converging optical system arranged to substantially collimate the rays coming from said light source; a multiple flux generating assembly arranged in the path of a flux of rays exiting from said condenser lens system to form a great number of component fluxes while causing each of the component fluxes to spread; a collimating lens system disposed with its primary focal point substantially coinciding with a plane containing the origins of the component fluxes formed by said multiple flux generating assembly; a mask carrying a microscopic pattern constructed in the form of an array of light-permeable and light-impermeable regions; and mask supporting means supporting said mask above the surface on which an image of the mask is projected and spaced apart therefrom by a distance which is in the order of microns; whereby said collimating lens system collimates said component fluxes which illuminate said mask.
Claim 3
Dependent Claim
136 words
A light exposure apparatus for printing according to claim 1, further comprising: a light source of small luminous region; a condenser lens system for substantially collimating the rays coming from said light source; a lens array assembly constructed in the form of an array of a plurality of component lenses; a collimating lens system; and a mask carrying a pattern constructed in the form of an array of light-permeable and light-impermeable regions; the arrangement being such that the primary focal point of said collimating lens system substantially coincides with a plane containing the focal points of the component lens of said lenses array assembly, and the position of said mask is in almost coincidence with the entrance pupil of said collimating lens system; whereby said collimating lens system collimates said component fluxes which illuminate said mask.
Claim 4
Dependent Claim
43 words
A light exposure apparatus for printing according to claim 2, wherein said lens array assembly is constructed in the form of an array of a plurality of negative lenses disposed on a common plane with their optical axes being parallel to each other.
Claim 5
Dependent Claim
43 words
A light exposure apparatus for printing according to claim 2, wherein said lens array assembly is constructed in the form of an array of a plurality of positive lenses disposed on a common plane with their optical axes being parallel to each other.
Claim 6
Dependent Claim
25 words
A light exposure apparatus for printing according to claim 2, wherein said condenser lens system comprises a convergent lens group and a divergent lens group.
Claim 7
Dependent Claim
34 words
A light exposure apparatus for printing according to claim 1, further comprising aperture control means positioned adjacent said multiple flux generating assembly to vary the inclination angle of the rays impinging upon the mask.
Claim 8
Dependent Claim
31 words
A light exposure apparatus for printing according to claim 6, wherein said aperture control means is arranged on the exit side of said multiple flux generating assembly in close relation thereto.
Claim 9
Dependent Claim
132 words
A light exposure apparatus for printing according to claim 1, wherein said light source has a plurality of given wavelengths different from one another; and a member which comprises a substrate having coated thereon a photosensitive layer and a light-permeable layer arranged between the substrate and the photosensitive layer and having an index of refraction almost equal to that of the photosensitive layer and disposed with the exposed surface of the photosensitive layer coinciding with the plane on which the image of said mask is projected, and which apparatus further includes standing wave control means arranged between said condenser lens system and said multiple flux generating assembly to compensate the intensity ratios of the given wavelengths so that the actions of these wavelengths on the photosensitive layer are identical to one another.
Claim 10
Dependent Claim
24 words
A light exposure apparatus for printing according to claim 8, wherein said standing wave control means is an interference filter having given transmission characteristics.
Claim 11
Dependent Claim
39 words
A light exposure apparatus for printing according to claim 1, further comprising illumination compensating means arranged between said converging optical system and said mask to make uniform the illumination of the mask over the entire area of the mask.
Claim 12
Dependent Claim
25 words
A light exposure apparatus for printing according to claim 10, wherein said illumination compensating means is a filter of which the transmittance increases with radius.
Claim 13
Dependent Claim
65 words
A light exposure apparatus for printing according to claim 11, wherein said filter is constructed from a plano-convex lens and a plano-concave lens arranged in mating relation to each other, said plano-convex lens being made of a material having a larger absorbance for the mask illumination light, and said plano-concave lens being made of a material having a smaller absorbance for the mask illumination light.
Claim 14
Dependent Claim
22 words
A light exposure apparatus for printing according to claim 1, wherein said converging optical system comprises a concave mirror and lens means.
Claim 15
Dependent Claim
21 words
A light exposure apparatus for printing according to claim 1, wherein said multiple flux generating assembly is a light diffusing element.
Claim 16
Dependent Claim
20 words
A light exposure apparatus for printing according to claim 14, wherein said light diffusing element is an opal glass plate.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1979-10-26 | 1980-04-26 | 1980-10-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1983-10-26 | 1984-04-26 | 1984-10-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1987-10-26 | 1988-04-26 | 1988-10-26 | $7700.00 | Window Closed / Lapsed |