US5170207A
Expired / Lapsed
US
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Projection lens system
Assignee: Olympus Corp
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Filing: 1991-12-12
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Granted: 1992-12-08
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Expires: 2011-12-12
Abstract
Abstract The present invention relates to a projection lens system well-fit for baking integrated circuit patterns onto silicon wafers using a light source having wavelengths ranging from an ultraviolet wavelength zone to a vacuum ultraviolet wavelength zone. This projection lens system is characterized by comprising a plurality of lens elements including a Fresnel lens element having negative dispersion characteristics, said Fresnel lens being located at a position lying somewhere in said projection lens system with the exception of the pupil thereof and satisfying the following condition: 2h.sub.MAX /3≦h. Here h MAX is the maximum height of a marginal ray in said projection lens system, and h is the height of a marginal ray at the position of said Fresnel lens.
Inventors
- 👤 Yoshiko Tezuka
- 👤 Keiichi Kuba
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 07:23
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70216; G03F7/70241; G02; G02B; G02B13/00; G02B13/14; G02B13/143; G02B13/24; G02B27/00; G02B27/0025; G02B27/0037; G02B27/0043; G02B27/42; G02B27/4205; G02B27/4211; G02B27/4222
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
131 words
A photographic exposure device comprising a light source, an object irradiated by light emitted from said light source, and a projection lens system for forming an image of said object on a predetermined position, wherein the wavelength of light emitted from said light source is shorter than 300 nm and said projection lens system comprising a plurality of lens elements including a Fresnel lens element having negative dispersion characteristics, said Fresnel lens element being located at a position lying somewhere in the projection lens system with the exception of the pupil thereof and satisfying the following condition: 2h.sub.MAX /3≦h where h MAX is the maximum height of a marginal ray in said projection lens system and h is the height of a marginal ray at the position of said Fresnel lens.
Claim 2
Dependent Claim
131 words
A photographic exposure device comprising a light source, an object irradiated by light emitted from said light source, and a projection lens system for forming an image of said object on a predetermined position, wherein the wavelength of light emitted from said light source is shorter than 300 nm and said projection lens system comprising a plurality of lens elements including a Fresnel lens element having negative dispersion characteristics, said Fresnel lens element being located at a position lying somewhere in the projection lens system with the exception of the pupil thereof and satisfying the following condition: 2h.sub.MAX /3≦h where h MAX is the maximum height of a marginal ray in said projection lens system and h is the height of a marginal ray at the position of said Fresnel lens.
Claim 3
Dependent Claim
19 words
A photographic exposure device as claimed in claim 1, characterized in that said light source is an excimer laser.
Claim 4
Dependent Claim
24 words
A photographic exposure device as claimed in claim 1, characterized in that said light source is a KrF, ArF or F 2 excimer laser.
Claim 5
Dependent Claim
83 words
A projection lens system characterized by comprising a plurality of lens elements including a Fresnel lens element having negative dispersion characteristics, said Fresnel lens element being located at a position lying somewhere in the projection lens system with the exception of the pupil thereof and satisfying the following condition: 2h.sub.MAX /3≦h where h MAX is the maximum height of a marginal ray in said projection lens system and h is the height of a marginal ray at the position of said Fresnel lens.
Claim 6
Dependent Claim
83 words
A projection lens system characterized by comprising a plurality of lens elements including a Fresnel lens element having negative dispersion characteristics, said Fresnel lens element being located at a position lying somewhere in the projection lens system with the exception of the pupil thereof and satisfying the following condition: 2h.sub.MAX /3≦h where h MAX is the maximum height of a marginal ray in said projection lens system and h is the height of a marginal ray at the position of said Fresnel lens.
Claim 7
Dependent Claim
28 words
A projection lens system as claimed in claim 4, characterized in that all the lens elements but said Fresnel lens element are made of a single vitreous material.
Claim 8
Dependent Claim
55 words
A projection lens system as claimed in claim 4, characterized by including two sets of component pairs, each having oppositely located concave surfaces, and satisfying the following condition: h.sub.MIN /h.sub.MAX <1/2 where h MIN and h MAX are the minimum and maximum values of the height of a marginal ray within said projection lens system.
Claim 9
Dependent Claim
37 words
A projection lens system as claimed in claim 4, characterized by including a first lens unit of negative refracting power, a second lens unit of positive refracting power and a third lens unit of positive refracting power.
Claim 10
Dependent Claim
23 words
A projection lens system as claimed in claim 7, characterized in that said Fresnel lens element is included in said third lens unit.
Claim 11
Dependent Claim
24 words
A projection lens system as claimed in claim 7, characterized in that said third lens unit comprises a positive lens and a negative lens.
Claim 12
Dependent Claim
23 words
A projection lens system as claimed in claim 9, characterized in that a positive lens is located before or after said Fresnel lens.
Claim 13
Dependent Claim
26 words
A projection lens system as claimed in claim 7, characterized in that said pupil of the projection lens system is located in said third lens unit.
Claim 14
Dependent Claim
20 words
A projection lens system as claimed in claim 4, characterized in that all the lens elements are made of quartz.
Claim 15
Dependent Claim
28 words
A projection lens system as claimed in claim 1, characterized in that the height of the marginal ray is maximized at a position of said Fresnel lens element.
References Cited (Backward Citations)
US4891663A
Cited
US4936665A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-12-08 | 1996-06-08 | 1996-12-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-12-08 | 2000-06-08 | 2000-12-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-12-08 | 2004-06-08 | 2004-12-08 | $7700.00 | Window Closed / Lapsed |