US5260832A
Expired / Lapsed
US
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Projection lens system
Assignee: Nikon Corp
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Filing: 1991-10-22
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Granted: 1993-11-09
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Expires: 2011-10-22
Abstract
Abstract This invention relates to a projection lens system used for transferring circuit or other patterns from masks, etc. on which the circuit patterns are drawn onto semiconductor wafers by projection photolithography, and provides a projection lens system which makes high resolving power of the order of a few micrometers and wide exposure coverages compatible with each other. This projection lens system includes at least two sets of lens groups, each built up of lenses having concave surfaces located opposite to each other, and includes at least one lens surface of positive refractive power between said two sets of lens groups, said two sets of lens groups all satisfying the following conditions: (1) 1/L<|φ.sub.1 |<20/L (2) 1/L<|φ.sub.2 |<20/L wherein φ 1 and φ 2 stand for the respective negative refractive powers of said oppositely located concave surfaces, and L is the distance between object and image.
Inventors
- 👤 Takayoshi Togino
- 👤 Yoshiko Tezuka
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 18:33
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70216; G02; G02B; G02B13/00; G02B13/24; G02B9/00; G02B9/64
Claims Analysis
Total Claims: 35
Claim 1
Independent Claim
149 words
A projection lens system comprising: first and second lens groups, each of said first and second lens groups including lens components having concave surfaces located opposite to each other; at least one lens component having a surface with a positive refractive power disposed between said first and second lens groups; and a third lens group disposed on an image side of said first and second lens groups, said third lens group including three lens components having a positive refractive power and one lens component having a negative refractive power; wherein a distance between an object and an image has a specific value, and said first and second lens groups satisfy the following conditions (1) and (2) 1/L<|φ.sub.1 |<20/L (1) 1/L<|φ.sub.2 |<20/L (2) where φ 1 and φ 2 represent respective negative refractive powers of said facing concave surfaces, and L is the distance between the object and the image.
Claim 2
Dependent Claim
149 words
A projection lens system comprising: first and second lens groups, each of said first and second lens groups including lens components having concave surfaces located opposite to each other; at least one lens component having a surface with a positive refractive power disposed between said first and second lens groups; and a third lens group disposed on an image side of said first and second lens groups, said third lens group including three lens components having a positive refractive power and one lens component having a negative refractive power; wherein a distance between an object and an image has a specific value, and said first and second lens groups satisfy the following conditions (1) and (2) 1/L<|φ.sub.1 |<20/L (1) 1/L<|φ.sub.2 |<20/L (2) where φ 1 and φ 2 represent respective negative refractive powers of said facing concave surfaces, and L is the distance between the object and the image.
Claim 3
Dependent Claim
62 words
A projection lens system as claim 1, further comprising an additional lens group having a positive refractive power and including at least two lens components having a positive refractive power disposed between said first and second lens groups, and said additional lens group satisfies the following condition (3): f<L/4 (3) where f is the composite focal length of the additional lens group.
Claim 4
Dependent Claim
38 words
A projection lens system as claimed in claim 1, further comprising an additional lens group including at least four lens components having a positive refractive power disposed on the image side of said first and second lens units.
Claim 5
Dependent Claim
57 words
A projection lens system as claimed in claim 3, wherein a lens component having a concave surface on the image side is disposed on the image side of said first and second lens groups, and said concave surface satisfies the following condition (4): 1/L<|φ.sub.3 |<20/L (4) where φ 3 is the refractive power of said concave surface.
Claim 6
Dependent Claim
20 words
A projection lens system as claimed in claim 4, wherein all lens elements as formed of the same vitreous material.
Claim 7
Dependent Claim
39 words
A projection lens system as claimed in claim 4, wherein a second additional lens group including at least one lens component having a negative refractive power is disposed on the object side of said first and second lens groups.
Claim 8
Dependent Claim
20 words
A projection lens system as claimed in claim 6, wherein all lens elements are formed of the same vitreous material.
Claim 9
Dependent Claim
32 words
A projection lens system as claimed in claim 6, further comprising a third additional lens group, said third additional lens group including lens components having concave surfaces located opposite to each other.
Claim 10
Dependent Claim
20 words
A projection lens system as claimed in claim 8, wherein all lens elements are formed of the same vitreous material.
Claim 11
Dependent Claim
32 words
A projection lens system as claimed in claim 4, further comprising a second additional lens group, said second additional lens group including lens components having concave surfaces located opposite to each other.
Claim 12
Dependent Claim
20 words
A projection lens system as claimed in claim 10, wherein all lens elements are formed of the same vitreous material.
Claim 13
Dependent Claim
40 words
A projection lens system as claimed in claim 3, further comprising a second additional lens group including at least one lens component having a negative refractive power is disposed on the object side of said first and second lens groups.
Claim 14
Dependent Claim
32 words
A projection lens system as claimed in claim 12, further comprising a third additional lens group, said third additional lens group including lens components having concave surfaces located opposite to each other.
Claim 15
Dependent Claim
20 words
A projection lens system as claimed in claim 13, wherein all lens elements are formed of the same vitreous material.
Claim 16
Dependent Claim
20 words
A projection lens system as claimed in claim 12, wherein all lens elements are formed of the same vitreous material.
Claim 17
Dependent Claim
31 words
A projection lens system as claimed in 3, further comprising a second additional lens group, said second additional lens group including lens components having concave surfaces located opposite to each other.
Claim 18
Dependent Claim
20 words
A projection lens system as claimed in claim 16, wherein all lens elements are formed of the same vitreous material.
Claim 19
Dependent Claim
20 words
A projection lens system as claimed in claim 3, wherein all lens elements are formed of the same vitreous material.
Claim 20
Dependent Claim
56 words
A projection lens system as claimed in claim 1, wherein a lens component having a concave surface on the image side is disposed on the image side of said first and second lens groups, said concave surface satisfies the following condition (5): 1/L<|φ.sub.3 |<20/L (5) where φ 3 is the refractive power of said concave surface.
Claim 21
Dependent Claim
39 words
A projection lens system as claimed in claim 19, further comprising an additional lens group including at least one lens component having a negative refractive power is disposed on the object side of said first and second lens groups.
Claim 22
Dependent Claim
32 words
A projection lens system as claimed in claim 20, further comprising a second additional lens group, said second additional lens group including lens components having concave surfaces located opposite to each other.
Claim 23
Dependent Claim
20 words
A projection lens system as claimed in claim 21, wherein all lens elements are formed of the same vitreous material.
Claim 24
Dependent Claim
20 words
A projection lens system as claimed in claim 20, wherein all lens elements are formed of the same vitreous material.
Claim 25
Dependent Claim
30 words
A projection lens system as claimed in claim 19, further comprising an additional lens group, said additional lens group including lens components having concave surfaces located opposite to each other.
Claim 26
Dependent Claim
20 words
A projection lens system as claimed in claim 24, wherein all lens elements are formed of the same vitreous material.
Claim 27
Dependent Claim
20 words
A projection lens system as claimed in claim 19, wherein all lens elements are formed of the same vitreous material.
Claim 28
Dependent Claim
39 words
A projection lens system as claimed in claim 1, further comprising an additional lens group including at least one lens component having a negative refractive power is disposed on the object side of said first and second lens groups.
Claim 29
Dependent Claim
32 words
A projection lens system as claimed in claim 27, further comprising a second additional lens group, said second additional lens group including lens components having concave surfaces located opposite to each other.
Claim 30
Dependent Claim
20 words
A projection lens system as claimed in claim 28, wherein all lens elements are formed of the same vitreous material.
Claim 31
Dependent Claim
20 words
A projection lens system as claimed in claim 27, wherein all lens elements are formed of the same vitreous material.
Claim 32
Dependent Claim
30 words
A projection lens system as claimed in claim 1, further comprising an additional lens group, said additional lens group including lens components having concave surfaces located opposite to each other.
Claim 33
Dependent Claim
20 words
A projection lens system as claimed in claim 31, wherein all lens elements are formed of the same vitreous material.
Claim 34
Dependent Claim
20 words
A projection lens system as claimed in claim 1, wherein all lens elements are formed of the same vitreous material.
Claim 35
Dependent Claim
20 words
A projection lens system as claimed in claim 2, wherein all lens elements are formed of the same vitreous material.
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1996-11-08 | 1997-05-10 | 1997-11-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-11-08 | 2001-05-10 | 2001-11-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-11-08 | 2005-05-10 | 2005-11-09 | $7700.00 | Window Closed / Lapsed |