US5871805A
Expired / Lapsed
US
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Computer controlled vapor deposition processes
Assignee: Syndia Corp
•
Filing: 1996-04-08
•
Granted: 1999-02-16
•
Expires: 2016-04-08
Abstract
Abstract A method for computerized control of vapor deposition processes, including chemical vapor deposition and electron beam physical vapor deposition processes, uses optical imaging sensors and/or laser interferometers or infrared ellipsometers focused on the substrate being coated or on a nearby test blank to provide information which is computer analyzed to yield optimum control points for the coating process. A method is also disclosed for shaping or contouring one or more surfaces of an object(s) using the techniques disclosed here.
Inventors
- 👤 Jerome Lemelson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:34
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/54; C23C16/00; C23C16/44; C23C16/52
Claims Analysis
Total Claims: 42
Claim 1
Independent Claim
220 words
A method for controlling a vapor deposition process comprising: a. providing a substrate to be coated; b. exposing said substrate to a gas atmosphere; c. depositing a coating from said gas atmosphere onto said substrate in an ongoing coating process; d. providing at least one imaging sensor operatively situated to provide an image of said substrate; e. scanning said substrate during said coating process, and using said imaging sensor to produce images of said coating; f. providing a programmable computer having a memory; g. processing said image signals using said computer and comparing the image signals to those of a predetermined computer model of said coating process resident within the memory of said computer, to thereby generate one or more objective functions related to the quality of said coating; h. numerically applying to said one or more objective functions a feedback optimization algorithm to yield control points for said coating process; i. modifying at least one of said control points based on the results obtained from said optimization algorithm; j. providing a laser interferometer or an infrared ellipsometer to measure thickness of said coating, in addition to said imaging sensor; and k. switching to thickness measurements from said laser interferometer or said infrared ellipsometer as an input to said computer model when said coating thickness approaches a predetermined, desired value.
Claim 2
Independent Claim
220 words
A method for controlling a vapor deposition process comprising: a. providing a substrate to be coated; b. exposing said substrate to a gas atmosphere; c. depositing a coating from said gas atmosphere onto said substrate in an ongoing coating process; d. providing at least one imaging sensor operatively situated to provide an image of said substrate; e. scanning said substrate during said coating process, and using said imaging sensor to produce images of said coating; f. providing a programmable computer having a memory; g. processing said image signals using said computer and comparing the image signals to those of a predetermined computer model of said coating process resident within the memory of said computer, to thereby generate one or more objective functions related to the quality of said coating; h. numerically applying to said one or more objective functions a feedback optimization algorithm to yield control points for said coating process; i. modifying at least one of said control points based on the results obtained from said optimization algorithm; j. providing a laser interferometer or an infrared ellipsometer to measure thickness of said coating, in addition to said imaging sensor; and k. switching to thickness measurements from said laser interferometer or said infrared ellipsometer as an input to said computer model when said coating thickness approaches a predetermined, desired value.
Claim 3
Dependent Claim
28 words
The method of claim 1 wherein said image signals are reconstructed and define images of slices of a profile of said coating, using a polygonal curve approximation technique.
Claim 4
Dependent Claim
25 words
The method of claim 2 wherein said image signals are further processed using triangulation algorithms to construct a wireframe approximation of the substrate and coating.
Claim 5
Dependent Claim
20 words
The method of claim 3 wherein said wireframe approximation is compared with a predetermined model of a desired manufactured part.
Claim 6
Dependent Claim
35 words
The method of claim 2, wherein at least two of said slices of a profile of said coating correspond to different materials, and parameters describing physical behavior for said materials reside within said computer memory.
Claim 7
Dependent Claim
29 words
The method of claim 1 wherein said imaging sensor scans the entire thickness of said coating at a fixed rate and said thickness is calculated from the scanning frequency.
Claim 8
Dependent Claim
18 words
The method of claim 1 wherein said imaging sensor uses fluorescent light to determine thickness of the coating.
Claim 9
Dependent Claim
39 words
The method of claim 1 wherein said coating process is a chemical vapor deposition process, and said control points include at least one of the reactant gas flowrates, reactor pressure, reactor and substrate temperature profiles and heat input rates.
Claim 10
Dependent Claim
24 words
The method of claim 8, further comprising controlling flow of a purge gas operatively adapted to maintain said imaging sensor free of deposited coating.
Claim 11
Dependent Claim
14 words
The method of claim 9 wherein said purge gas comprises a cold reactant gas.
Claim 12
Dependent Claim
45 words
The method of claim 1 wherein said coating process is an electron beam physical vapor deposition process, and said control points include at least one of the oxygen flowrate, reactor pressure, substrate temperature, ingot temperature, electron beam focus, electron beam intensity and substrate rotational speed.
Claim 13
Dependent Claim
23 words
The method of claim 11, further comprising providing a heating device operatively adapted to maintain said imaging sensor substantially free of deposited coating.
Claim 14
Dependent Claim
53 words
The method of claim 1, comprising the steps of: j. providing a laser interferometer to measure coating thickness, in addition to employing said imaging sensor for measurement; and k. switching to thickness measurements from said laser interferometer as an input to said computer model when said coating thickness approaches a predetermined, desired value.
Claim 15
Dependent Claim
34 words
The method of claim 13, wherein the rate of said coating process is reduced when said thickness measurements are switched and are provided as an input to said computer model by said laser interferometer.
Claim 16
Dependent Claim
50 words
The method of claim 1, comprising the steps of: j. providing an infrared ellipsometer to measure coating thickness, in addition to said imaging sensor; and k. switching to thickness measurements from said infrared ellipsometer as an input to said computer model when said coating thickness approaches a predetermined, desired value.
Claim 17
Dependent Claim
34 words
The method of claim 15, wherein the rate of said coating process is reduced when said thickness measurements are switched and are provided as an input to said computer model by said infrared ellipsometer.
Claim 18
Dependent Claim
39 words
The method of claim 1, wherein said substrate is located within a reaction chamber, and continuously-cleaned fiber optics located within said reaction chamber are used to convey a visible light image of the substrate to a remotely-located TV sensor.
Claim 19
Dependent Claim
36 words
The method of claim 1, wherein said scanning of said substrate coating is accomplished using one or any combination of the following forms of energy: x-rays, T-rays, radio waves, infrared radiation, ultrasonic radiation or laser energy.
Claim 20
Dependent Claim
36 words
The method of claim 1, wherein said scanning of said substrate coating is accomplished using one or any combination of the following techniques or devices: magnetic resonance imaging, PET, CAT, spectrometry, fiber optics, or television cameras.
Claim 21
Dependent Claim
27 words
The method of claim 1, further comprising the step of generating three dimensional slices of a profile of said coating that visually indicate changes in material composition.
Claim 22
Dependent Claim
30 words
The method of claim 1, wherein said coating is a ceramic and a metallic bond layer is applied to said substrate to improve adhesion of said ceramic to said substrate.
Claim 23
Dependent Claim
42 words
The method of claim 1, wherein said substrate is in revolving movement during said coating process, and said imaging sensor is operatively adjustable to said revolving movement, thereby enabling said imaging sensor to maintain focus of said substrate during said coating operation.
Claim 24
Dependent Claim
22 words
The method of claim 1, wherein said imaging sensor is used to determine the thickness or the surface texture of said substrate.
Claim 25
Dependent Claim
52 words
The method of claim 1, further comprising the step of generating a multivariable linearized mathematical model by establishing steady state operation of said coating process based on a predetermined set of conditions, and then perturbing the controlled variables to facilitate the prediction of behavior in a region near said steady state operation.
Claim 26
Dependent Claim
70 words
The method of claim 24, further comprising the step of using said computer model and said optimization algorithm to adaptively control said coating process by continuously changing, in predetermined increments, said controlled variables to thereby maximize the chances for reaching said one or more objective functions, said adaptive control continuing until a set of predetermined coating specifications have been reached, or further improvement in said objective functions is not possible.
Claim 27
Independent Claim
257 words
A method for controlling a vapor deposition process comprising: a. providing a substrate to be coated; b. exposing said substrate to a gas atmosphere; c. depositing a coating from said gas atmosphere onto said substrate during an ongoing coating process; d. providing a test blank exposed to said gas atmosphere under substantially the same conditions as said substrate, thereby depositing said coating on said test blank; e. providing at least one imaging sensor operatively situated to provide image signals of said test blank; f. scanning said test blank using said imaging sensor to produce image signals of said coating during the coating process; g. providing a programmable computer having a memory; h. processing said image signals using said computer and comparing the image signals to those of a predetermined computer model of said coating process resident within said computer memory to generate one or more objective functions related to the quality of said coating; i. numerically applying to said one or more objective functions a feedback optimization algorithm to yield control points for said coating process, said optimization algorithm being designed to maximize the quality of said coating; j. modifying at least one of said control points based on the results obtained from said optimization algorithm; k. providing a laser interferometer or an infrared ellipsometer to measure thickness of said coating, in addition to said imaging sensor; and l. switching to thickness measurements from said laser interferometer or said infrared ellipsometer as an input to said computer model when said coating thickness approaches a predetermined, desired value.
Claim 28
Independent Claim
257 words
A method for controlling a vapor deposition process comprising: a. providing a substrate to be coated; b. exposing said substrate to a gas atmosphere; c. depositing a coating from said gas atmosphere onto said substrate during an ongoing coating process; d. providing a test blank exposed to said gas atmosphere under substantially the same conditions as said substrate, thereby depositing said coating on said test blank; e. providing at least one imaging sensor operatively situated to provide image signals of said test blank; f. scanning said test blank using said imaging sensor to produce image signals of said coating during the coating process; g. providing a programmable computer having a memory; h. processing said image signals using said computer and comparing the image signals to those of a predetermined computer model of said coating process resident within said computer memory to generate one or more objective functions related to the quality of said coating; i. numerically applying to said one or more objective functions a feedback optimization algorithm to yield control points for said coating process, said optimization algorithm being designed to maximize the quality of said coating; j. modifying at least one of said control points based on the results obtained from said optimization algorithm; k. providing a laser interferometer or an infrared ellipsometer to measure thickness of said coating, in addition to said imaging sensor; and l. switching to thickness measurements from said laser interferometer or said infrared ellipsometer as an input to said computer model when said coating thickness approaches a predetermined, desired value.
Claim 29
Dependent Claim
29 words
The method of claim 26 wherein said image sensor scans the entire thickness of said coating at a fixed rate and said thickness is calculated from the scanning frequency.
Claim 30
Dependent Claim
18 words
The method of claim 26 wherein said image sensor uses fluorescent light to determine thickness of said coating.
Claim 31
Dependent Claim
29 words
The method of claim 26 wherein said image signals are employed to reconstruct image information as slices of a profile of said coating, using a polygonal curve approximation technique.
Claim 32
Dependent Claim
25 words
The method of claim 29 wherein said image signals are further processed using triangulation algorithms to construct a wireframe approximation of the substrate and coating.
Claim 33
Dependent Claim
20 words
The method of claim 30 wherein said wireframe approximation is compared with a predetermined model of a desired manufactured part.
Claim 34
Dependent Claim
39 words
The method of claim 26 wherein said coating process is a chemical vapor deposition process, and said control points include at least one of the reactant gas flowrates, reactor pressure, reactor and substrate temperature profiles and heat input rates.
Claim 35
Dependent Claim
27 words
The method of claim 32, further comprising a purge gas associated with said imaging sensor and operatively adapted to maintain said imaging sensor free of deposited coating.
Claim 36
Dependent Claim
13 words
The method of claim 33 wherein said purge gas comprises cold reactant gas.
Claim 37
Dependent Claim
45 words
The method of claim 26 wherein said coating process is an electron beam physical vapor deposition process, and said control points include at least one of the oxygen flowrate, reactor pressure, substrate temperature, ingot temperature, electron beam focus, electron beam intensity and substrate rotational speed.
Claim 38
Dependent Claim
27 words
The method of claim 35, further comprising a heating device associated with said imaging sensor and operatively adapted to maintain said imaging sensor free of deposited coating.
Claim 39
Dependent Claim
50 words
The method of claim 26, comprising the steps of: k. providing a laser interferometer to measure coating thickness, in addition to said imaging sensor; and l. switching to thickness measurements from said laser interferometer as an input to said computer model when said coating thickness approaches a predetermined, desired value.
Claim 40
Dependent Claim
50 words
The method of claim 26, comprising the steps of: k. providing an infrared ellipsometer to measure coating thickness, in addition to said imaging sensor; and l. switching to thickness measurements from said infrared ellipsometer as an input to said computer model when said coating thickness approaches a predetermined, desired value.
Claim 41
Dependent Claim
21 words
The method of claim 26, wherein said substrate is in motion during said coating process, and said test blank remains stationary.
Claim 42
Dependent Claim
23 words
The method of claim 26, wherein said imaging sensor is used to determine the thickness or the surface texture of said test blank.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2002-02-15 | 2002-08-17 | 2003-02-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-02-15 | 2006-08-17 | 2007-02-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-02-15 | 2010-08-17 | 2011-02-16 | $7700.00 | Window Closed / Lapsed |