Patent DE29806830U1 successfully refreshed from Google Patents.
US4725345A
Expired / Lapsed
US
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Method for forming a hard carbon thin film on article and applications thereof
Assignee: Trio KK
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Filing: 1986-04-17
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Granted: 1988-02-16
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Expires: 2006-04-17
Abstract
Abstract A method of forming diamond-like carbon layer which is advantageously adaptable as a coating layer on acoustic diaphragms. In the method, carbon vaporized out of solid carbon source is deposited onto the surface of the diaphragm as the coating layer in the atmosphere of catalystic gas, for instance, H 2 +Ar or H 2 of about 10 -4 Torr. The deposited carbon layer on the surface of the diaphragm is an amorphous carbon of inclusion of hybridized orbital SP 2 bond and hybridized orbital SP 3 bond and crystalline carbon particles of hybridized orbital SP 3 bond dispersed in the amorphous carbon, or an amorphous carbon of inclusion of hybridized orbital SP 2 bond and hybridized orbital SP 3 bond.
Inventors
- 👤 Masakatsu Sakamoto
- 👤 Shuhei Ohta
- 👤 Shiro Iwakura
- 👤 Kaoru Yamazaki
- 👤 Yoichi Yaguchi
- 👤 Hiroaki Toshima
- 👤 Tsugio Sato
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 17:25
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/32; C23C14/06; C23C14/0605; H; H04; H04R; H04R31/00; H04R31/003; Y; Y10; Y10T; Y10T428/00; Y10T428/30; Y10T428/31504; Y10T428/31678
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
100 words
A method of forming a carbon layer on the surface of an article comprising the steps of: respective disposing the article and a solid carbon source at opposite portions in a vacuum chamber which contains catalystic gas of a predetermined pressure wherein said catalystic gas is a hydrogen gas or mixture gas of hydrogen and argon; vaporizing the solid carbon and applying an electric field to the vaporized carbon to ionize the vaporized carbon; and applying an electrical potential to the article so that the ionized vapor carbon is deposited onto the surface of the article as the carbon layer.
Claim 2
Independent Claim
100 words
A method of forming a carbon layer on the surface of an article comprising the steps of: respective disposing the article and a solid carbon source at opposite portions in a vacuum chamber which contains catalystic gas of a predetermined pressure wherein said catalystic gas is a hydrogen gas or mixture gas of hydrogen and argon; vaporizing the solid carbon and applying an electric field to the vaporized carbon to ionize the vaporized carbon; and applying an electrical potential to the article so that the ionized vapor carbon is deposited onto the surface of the article as the carbon layer.
Claim 3
Dependent Claim
43 words
A method according to claim 1, wherein said deposited carbon layer is amorphous carbon of inclusion of hybridized orbital SP 2 bond and hybridized orbital SP 3 bond and crystalline carbon particles of hybridized orbital SP 3 bond dispersed in said amorphous carbon.
Claim 4
Dependent Claim
28 words
A method according to claim 1, wherein said deposited carbon layer is amorphous carbon of inclusion of hybridized orbital SP 2 bond and hybridized orbital SP 3 bond.
Claim 5
Dependent Claim
13 words
A method according to claim 1, wherein said solid carbon source is graphite.
Claim 6
Dependent Claim
18 words
A method according to claim 1, wherein said predetermined pressure is in the order of 10 -4 Torr.
Claim 7
Dependent Claim
24 words
A method according to claim 1, wherein the deposition rate of the carbon layer is in the range of 0.02 μm/min to 0.1 μm/min.
Claim 8
Independent Claim
192 words
A method of forming a carbon layer and an intermediate layer on the surface of an article comprising the steps of: respectively disposing the article, a solid carbon source and an intermediate layer material solid source in a vacuum chamber which contains intermediate layer material gas of a predetermined pressure; vaporizing the intermediate layer material solid source and applying an electrical field to the vaporized intermediate layer material solid source to ionize it as plasma which decomposes the intermediate layer material gas, whereby an intermediate layer material compound is produced in the plasma; applying an electrical potential to the article so that the intermediate layer material compound is deposited onto the surface of the article as the intermediate layer; exhausting the hydrocarbon gas and introducing catalystic gas in the chamber wherein said catalystic gas is hydrogen gas or mixture gas of hydrogen and argon, and vaporizing the solid carbon and applying an electric field to the vaporized carbon to ionize the vaporized carbon; and applying an electrical potential to the article so that the ionized vapor carbon is deposited onto the intermediate thin layer on the article as the hard carbon layer.
Claim 9
Independent Claim
192 words
A method of forming a carbon layer and an intermediate layer on the surface of an article comprising the steps of: respectively disposing the article, a solid carbon source and an intermediate layer material solid source in a vacuum chamber which contains intermediate layer material gas of a predetermined pressure; vaporizing the intermediate layer material solid source and applying an electrical field to the vaporized intermediate layer material solid source to ionize it as plasma which decomposes the intermediate layer material gas, whereby an intermediate layer material compound is produced in the plasma; applying an electrical potential to the article so that the intermediate layer material compound is deposited onto the surface of the article as the intermediate layer; exhausting the hydrocarbon gas and introducing catalystic gas in the chamber wherein said catalystic gas is hydrogen gas or mixture gas of hydrogen and argon, and vaporizing the solid carbon and applying an electric field to the vaporized carbon to ionize the vaporized carbon; and applying an electrical potential to the article so that the ionized vapor carbon is deposited onto the intermediate thin layer on the article as the hard carbon layer.
Claim 10
Dependent Claim
14 words
A method according to claim 7, wherein said intermediate layer material gas is hydrocarbon.
Claim 11
Dependent Claim
13 words
A method according to claim 8, wherein said hydrocarbon is CH 4 .
Claim 12
Dependent Claim
14 words
A method according to claim 8, wherein said intermediate layer material compound is carbide.
Claim 13
Dependent Claim
14 words
A method according to claim 7, wherein the surface of said article is titanium.
Claim 14
Dependent Claim
15 words
A method according to claim 7, wherein said intermediate layer material solid source is titanium.
Claim 15
Dependent Claim
13 words
A method according to claim 7, wherein said solid carbon source is graphite.
Claim 16
Dependent Claim
18 words
A method according to claim 7, wherein said predetermined pressure is in the order of 10 -4 Torr.
Claim 17
Dependent Claim
24 words
A method according to claim 7, wherein the deposition rate of the carbon layer is in the range of 0.02 μm/min to 0.1 μm/min.
References Cited (Backward Citations)
US4173522A
Cited
US4470479A
Cited
US4460060A
Cited
US4525417A
Cited
US4486286A
Cited
US4551216A
Cited
US4552243A
Cited
US4490229A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-02-15 | 1991-08-17 | 1992-02-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-02-15 | 1995-08-17 | 1996-02-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-02-15 | 1999-08-17 | 2000-02-16 | $7700.00 | Window Closed / Lapsed |