Dual-modulation interferometric ellipsometer

Claim 1

An infrared ellipsometer for measuring a sample, comprising: a) an exciter group including a source, a Michelson interferometer providing a first reference signal, a polarizer, and optical means for aligning said source and the sample, said exciter group generating infrared source energy directed at the sample; b) a sample support for supporting the sample; c) an analysis group including a polarizer-analyzer, a detector, and optical means for aligning the sample and said detector, said analysis group being aligned for receiving infrared source energy reflected from said sample; d) an electro-optical phase modulator, located along a beam path of the infrared source energy, for providing a second reference signal, and modulating at a frequency ω; and e) electronic means for controlling said exciter group including the Michelson interferometer, for controlling said electro-optical phase modulator, for receiving signals from said analysis group, and for supplying a measurement result, wherein said electronic means includes: 1) a pre-amplifier for receiving a signal produced by said detector in said analysis group and for providing a pre-amplifier output signal; 2) an analog-to-digital converter receiving the pre-amplifier output signal and for providing a digital output signal; 3) a Fourier analyzer for receiving (A) the digital output signal from said analog-to-digital converter, (B) the first reference signal originating from said Michelson interferometer and (C) the second reference signal originating from said electro-optical phase modulator, for simultaneously extracting the dc component of the digital signal and components of the digital signal at frequencies ω and 2ω, and for producing values which are representative data of the input signal in response to the first reference signal and the second reference signal; 4) a register for receiving the values produced by said Fourier analyzer; and 5) a microcomputer for storing the values produced by said Fourier analyzer, and for generating values of ellipsometer angles of the measurement result by inverse optical Fourier transform.

Claim 7

A method of infrared ellipsometric measuring of representative parameters of a sample using an ellipsometer, in which the sample is illuminated by a luminous flux of an incident light beam produced by an infrared source, and in which the luminous flux is reflected by the sample, analyzed by an analyzer and then measured by a photodetector, said method comprising: a) passing the luminous flux of the incident light beam through a Michelson interferometer having a moving mirror whose displacement is x; b) generating a first reference signal from the Michelson interferometer; c) modulating the luminous flux with a phase modulator at a time t; d) generating a second reference signal from the phase modulator; e) inputting into a Fourier analyzer an input signal representative of the luminous flux measured by the photodetector, the first reference signal from the Michelson interferometer, and the second reference signal from the phase modulator; f) simultaneously extracting from the input signal to the Fourier analyzer, dc component S 0 , and components S 1 and S 2 at respective frequencies ω and 2ω, based on an intensity I of the incident luminous flux defined as: I(x)=∫I(θ,t)[(1+cos 2πx)/2]dθ wherein: θ is the frequency of the luminous flux at a given moment; t is time; and I(θ, t) is modulated by the phase modulator at frequency ω; and g) generating output signals representative of the values ψ and Δ based on trigonometric relationships with I 0 , I S , I C which are calculated in a microcomputer from the extracted dc components using inverse spatial Fourier transform to determine S 0 , S 1 , S 2 , wherein: S.sub.0 =I.sub.o +I.sub.c J.sub.0 (kθ), S.sub.1 =2T.sub.1 J.sub.1 (kθ) I.sub.s S.sub.2 =2T.sub.2 J.sub.2 (kθ) I.sub.c wherein: J 0 , J 1 and J 2 are Bessel functions of order 0, 1, 2, respectively; k is a constant; T 1 and T 2 are specific constants of the ellipsometer; and T 1 , T 2 and k are measured by calibration.

Claim 8

A method of infrared ellipsometric measuring of representative parameters of a sample using an ellipsometer, in which the sample is illuminated by a luminous flux of an incident light beam produced by an infrared source, and in which the luminous flux is reflected by the sample, analyzed by an analyzer and then measured by a photodetector, said method comprising: a) passing the luminous flux of the incident light beam through a Michelson interferometer having a moving mirror whose displacement is x; b) generating a first reference signal from the Michelson interferometer; c) modulating the luminous flux with a phase modulator at a time t; d) generating a second reference signal from the phase modulator; e) inputting into a Fourier analyzer an input signal representative of the luminous flux measured by the photodetector, the first reference signal from the Michelson interferometer, and the second reference signal from the phase modulator; f) simultaneously extracting from the input signal to the Fourier analyzer, dc component S 0 , and components S 1 and S 2 at respective frequencies ω and 2ω, based on an intensity I of the incident luminous flux defined as: I(x)=∫I(θ,t)[(1+cos 2πx)/2]dθ wherein: θ is the frequency of the luminous flux at a given moment; t is time; and I(θ, t) is modulated by the phase modulator at frequency ω; and g) generating output signals representative of the values ψ and Δ based on trigonometric relationships with I 0 , I S , I C which are calculated in a microcomputer from the extracted dc components using inverse spatial Fourier transform to determine S 0 , S 1 , S 2 , wherein: S.sub.0 =I.sub.o +I.sub.c J.sub.0 (kθ), S.sub.1 =2T.sub.1 J.sub.1 (kθ) I.sub.s S.sub.2 =2T.sub.2 J.sub.2 (kθ) I.sub.c wherein: J 0 , J 1 and J 2 are Bessel functions of order 0, 1, 2, respectively; k is a constant; T 1 and T 2 are specific constants of the ellipsometer; and T 1 , T 2 and k are measured by calibration.