Ellipsometric method and device

Claim 2

In an ellipsometric measuring method using linearly polarized parallel monochromatic light, with phase and azimuth modulation, the improvements consisting in simultaneously applying at two different frequencies a phase modulation and a polarization direction modulation to the polarized light.

Claim 3

An ellipsometer for simultaneously applying at two different frequencies, a phase modulation and a polarization direction modulation, the combination including, means for providing a parallel monochromatic beam; a polarizer, a phase equalizer, an analyzer, a photoreceiver, as well as a saMple in the path of the beam; in the path of the beam emerging from the polarizer, polarization modulator means operating at one frequency and phase modulator means simultaneously operating at a different frequency; and means for angularly displacing, with respect to one another, on the one hand the assembly consisting of said beam polarizer phase and azimuth modulator means, on the other hand, the sample and finally the equalizer, analyzer and photoreceiver.

Claim 4

An ellipsometer for simultaneously applying at two different frequencies, a phase modulation and a polarization direction modulation, the combination including, means for providing a parallel monochromatic beam; a polarizer, a phase equalizer, an analyzer, a photoreceiver, as well as a saMple in the path of the beam; in the path of the beam emerging from the polarizer, polarization modulator means operating at one frequency and phase modulator means simultaneously operating at a different frequency; and means for angularly displacing, with respect to one another, on the one hand the assembly consisting of said beam polarizer phase and azimuth modulator means, on the other hand, the sample and finally the equalizer, analyzer and photoreceiver.

Claim 5

Ellipsometer according to claim 2 with said polarization modulator means placed between the polarizer and the sample.

Claim 6

Ellipsometer according to claim 2 with said phase modulator means placed between the polarization modulator means and the sample.

Claim 7

Ellipsometer according to claim 2, with said polarization modulator means comprising a melted silica transparent cylinder, a symmetrical winding, an electric current power supply for this winding, said cylinder being placed along the axis of said winding.

Claim 8

Ellipsometer according to claim 2 with said phase modulator means comprising a melted silica tube, two plates made of piezoceramic material, each mounted against one of two parallel faces of the cube, so as to clamp the cube between them, two metallic cylinders clamping said plates and means for applying to the plates, an alternating voltage at the resonance frequency of the mechanical system forming the phase modulator means.