US4627989A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and system for a vacuum evaporative deposition process
Assignee: Balzers und Leybold Deutschland Holding AG
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Filing: 1984-08-08
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Granted: 1986-12-09
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Expires: 2004-08-08
Abstract
Abstract A method and system for a vacuum-evaporative film-deposition process displays bar charts of the local evaporation power of each vapor source in the process and the film thickness deposited thereby in spatial coordination on a single display screen.
Inventors
- 👤 Albert Feuerstein
- 👤 Gernot Thorn
- 👤 Horst Ranke
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:06
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/54; C23C14/542; C23C14/545; C23C14/547; H; H01; H01J; H01J37/00; H01J37/30; H01J37/302
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
139 words
A method for a vacuum evaporative deposition process in which the local evaporation power of a vapor source is adjustable to control the evaporation rate from the vapor source for controlling the thickness of a film deposited on a substrate by the vapor evaporated from the vapor source, comprising: determining the local evaporation power of each vapor source and the thickness of the film deposited on the substrate by each vapor source; displaying the determined local evaporation power and film thickness as spatially-coordinated bars of charts thereof on a single display screen, at least the film-thickness bar chart being at least relatively calibrated on the display screen; and adjusting the local evaporation power of any vapor source to correct any deviation of any bar of the film-thickness bar chart from a film thickness desired relative to the calibration thereof.
Claim 2
Independent Claim
139 words
A method for a vacuum evaporative deposition process in which the local evaporation power of a vapor source is adjustable to control the evaporation rate from the vapor source for controlling the thickness of a film deposited on a substrate by the vapor evaporated from the vapor source, comprising: determining the local evaporation power of each vapor source and the thickness of the film deposited on the substrate by each vapor source; displaying the determined local evaporation power and film thickness as spatially-coordinated bars of charts thereof on a single display screen, at least the film-thickness bar chart being at least relatively calibrated on the display screen; and adjusting the local evaporation power of any vapor source to correct any deviation of any bar of the film-thickness bar chart from a film thickness desired relative to the calibration thereof.
Claim 3
Independent Claim
145 words
A system for a vacuum evaporative deposition process in which the local evaporation power of a vapor source is adjustable to control the evaporation rate from the vapor source for controlling the thickness of a film deposited on a substrate by the vapor evaporated from the vapor source, comprising: means for determining the local evaporation power of each vapor source and the thickness of the film deposited on the substrate by each vapor source; means for displaying the determined local evaporation power and film thickness as spatially-coordinated bars of charts thereof on a single display screen, at least the film-thickness bar chart being at least relatively calibrated on the display screen; and means for adjusting the local evaporation power of any vapor source to correct any deviation of any bar of the film-thickness bar chart from a film thickness desired relative to the calibration thereof.
Claim 4
Independent Claim
145 words
A system for a vacuum evaporative deposition process in which the local evaporation power of a vapor source is adjustable to control the evaporation rate from the vapor source for controlling the thickness of a film deposited on a substrate by the vapor evaporated from the vapor source, comprising: means for determining the local evaporation power of each vapor source and the thickness of the film deposited on the substrate by each vapor source; means for displaying the determined local evaporation power and film thickness as spatially-coordinated bars of charts thereof on a single display screen, at least the film-thickness bar chart being at least relatively calibrated on the display screen; and means for adjusting the local evaporation power of any vapor source to correct any deviation of any bar of the film-thickness bar chart from a film thickness desired relative to the calibration thereof.
Claim 5
Dependent Claim
53 words
The system of claim 2, wherein the means for adjusting the local evaporation power comprises a light pen and means operatively associating it with each bar of the local evaporation power and each respective vapor source for controlling the former in dependence upon the movement of the light pen relative to the bar.
Claim 6
Dependent Claim
44 words
The system of claim 2, wherein the means for adjusting the local evaporation power comprises a tolerance memory storing an upper and lower tolerance for each bar of the film-thickness bar chart and means adjusting the local evaporation power for reversing any deviation therefrom.
Claim 7
Independent Claim
153 words
A system for a vacuum evaporative deposition process, comprising, in combination: an elongated array of vapor sources in which the local evaporation power of each vapor source is adjustable to control the evaporation rate from each vapor source for controlling the thickness of a film deposited on a substrate by the vapor evaporated from each vapor source; means for determining the local evaporation power of each vapor source and the thickness of the film deposited on the substrate by each vapor source; means for displaying the determined local evaporation power and film thickness as spatially-coordinated bars of charts thereof on a single display screen, at least the film-thickness bar chart being at least relatively calibrated on the display screen; and means for adjusting the local evaporation power of any vapor source to correct any deviation of any bar of the film-thickness bar chart from a film thickness desired relative to the calibration thereof.
Claim 8
Independent Claim
153 words
A system for a vacuum evaporative deposition process, comprising, in combination: an elongated array of vapor sources in which the local evaporation power of each vapor source is adjustable to control the evaporation rate from each vapor source for controlling the thickness of a film deposited on a substrate by the vapor evaporated from each vapor source; means for determining the local evaporation power of each vapor source and the thickness of the film deposited on the substrate by each vapor source; means for displaying the determined local evaporation power and film thickness as spatially-coordinated bars of charts thereof on a single display screen, at least the film-thickness bar chart being at least relatively calibrated on the display screen; and means for adjusting the local evaporation power of any vapor source to correct any deviation of any bar of the film-thickness bar chart from a film thickness desired relative to the calibration thereof.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-12-08 | 1990-06-09 | 1990-12-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-12-08 | 1994-06-09 | 1994-12-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-12-08 | 1998-06-09 | 1998-12-09 | $7700.00 | Window Closed / Lapsed |