US4230739A
Expired / Lapsed
US
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Method of evaporating melts of alloys of metals having different vapor pressures
Assignee: Balzers und Leybold Deutschland Holding AG
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Filing: 1978-11-22
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Granted: 1980-10-28
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Expires: 1998-11-22
Abstract
Abstract Method for evaporating melts of alloys of metals of different vapor pressures from continuously fed, large-area evaporating crucibles by direct bombardment of the bath surface with focused electron beams which are periodically deflected according to a pattern. The alloy material is deposited on a plurality of substrates such as turbine blades which are positioned in a field above the evaporating crucible with local adaptation of the energy density to the thermal economy of the melt bath. At least one electron beam is deflected onto at least two substantially rectangular beam fields and is guided in each of these fields through a line raster at a frequency of at least 100 Hz while shifting periodically from one to the other field with a shift frequency of at most 5 Hz.
Inventors
- 👤 Hans Aichert
- 👤 Walter Dietrich
- 👤 Alfred Hauff
- 👤 Peter Sommerkamp
- 👤 Herbert Stephan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:24
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/28; C23C14/30
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
210 words
Method for evaporating melts of alloys of metals of different vapor pressures from a continuously fed, large-area evaporating crucibles by direct bombardment of the bath surface with focused electron beams which are periodically deflected according to a pattern wherein the alloy material is deposited on a plurality of substrates which are disposed in a field above the evaporating crucible with local adaptation of the energy density to the thermal economy of the melt bath which comprises deflecting at least one electron beam onto at least two substantially rectangular beam fields F 1 , F 2 . . . , guiding the electron beam in each of these fields through a line raster at a frequency of at least 100 Hz, shifting periodically from one to the other field at a shift frequency of at most 5 Hz, the dwell time of the electron beam within each field being selected at T 1 , T 2 , . . . ; the area ratios of the beam fields F 1 , F 2 and the relative dwell times T 1 , T 2 being adjustable independently of one another, and the sum of the areas of all beam fields being between 10% and 80% of the area of the bath surface.
Claim 2
Dependent Claim
210 words
Method for evaporating melts of alloys of metals of different vapor pressures from a continuously fed, large-area evaporating crucibles by direct bombardment of the bath surface with focused electron beams which are periodically deflected according to a pattern wherein the alloy material is deposited on a plurality of substrates which are disposed in a field above the evaporating crucible with local adaptation of the energy density to the thermal economy of the melt bath which comprises deflecting at least one electron beam onto at least two substantially rectangular beam fields F 1 , F 2 . . . , guiding the electron beam in each of these fields through a line raster at a frequency of at least 100 Hz, shifting periodically from one to the other field at a shift frequency of at most 5 Hz, the dwell time of the electron beam within each field being selected at T 1 , T 2 , . . . ; the area ratios of the beam fields F 1 , F 2 and the relative dwell times T 1 , T 2 being adjustable independently of one another, and the sum of the areas of all beam fields being between 10% and 80% of the area of the bath surface.
Claim 3
Dependent Claim
34 words
Method of claim 1 wherein, in the case of a rectangular evaporation crucible, the individual beam fields F 1 , F 2 , . . . are disposed in tandem longitudinally of the crucible.
Claim 4
Dependent Claim
58 words
Method of claim 1 wherein the bath surface is bombarded on beam fields F 1 , F 2 . . . of different size and the arrangement of the beam fields is made symmetrical from the center of the bath (F 1 , F 2 . . . - . . . F 2 , F 1 ).
Claim 5
Dependent Claim
59 words
Method of claim 3 wherein the larger beam fields F 1 are on the outside, the area ratio F 1 :F 2 being between 1.2:1 and 5:1, and the longer dwell time T 1 of the electron beam is put in the outer beam fields, the relative dwell time T 1 :T 2 being between 1.2 1: and 3:1.
Claim 6
Dependent Claim
25 words
Method of claim 4 wherein the area ratio F 1 :F 2 is 2:1 and the relative dwell time T 1 :T 2 is 2:1.
Claim 7
Dependent Claim
26 words
Method of claim 1 wherein the beam fields F 1 , F 2 . . . are positioned partially overlapping one another on the bath surface.
Claim 8
Dependent Claim
35 words
Method of claim 1 wherein the line interval within at least one field is varied over one of the field dimensions, the line density per unit of length being adapted to the local energy requirement.
Claim 9
Dependent Claim
16 words
Method of claim 1 wherein turbine blades are vacuum coated with corrosion-resistant and oxidation-resistant alloy coatings.
Claim 10
Dependent Claim
14 words
Method of claim 8 wherein the alloy is from the group CoCrAlY and NiCoCrAlY.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1983-10-28 | 1984-04-28 | 1984-10-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1987-10-28 | 1988-04-28 | 1988-10-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1991-10-28 | 1992-04-28 | 1992-10-28 | $7700.00 | Window Closed / Lapsed |