US5552327A
Expired / Lapsed
US
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Methods for monitoring and controlling deposition and etching using p-polarized reflectance spectroscopy
Assignee: North Carolina State University
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Filing: 1994-08-26
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Granted: 1996-09-03
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Expires: 2014-08-26
Abstract
Abstract Deposition or etching of a layer on a substrate is monitored by impinging P-polarized light on the layer during deposition at an angle which is approximately the Brewster's angle for the substrate, and detecting radiation which is reflected from the structure during deposition. In heterodeposition, a quarter wavelength interference signal having a predetermined periodicity is monitored. Maxima and/or minima in the quarter wavelength ratio are monitored and an amplitude modulated fine signal which is superimposed on the quarter wavelength interference signal is also monitored. The deposition process is controlled based on the monitored quarter wavelength interference signal, ratio of the maxima and/or minima, fine signal, fine signal amplitude modulation and/or combinations thereof by comparing the signals to a reference derived from mathematical models or empirical data. A heterodeposition or etching can also be used to calibrate a homodeposition or etching. Scattered light may also be correlated to the reflected light to reduce the scattering component of the reflected light.
Inventors
- 👤 Klaus J. Bachmann
- 👤 Nikolaus Dietz
- 👤 Amy E. Miller
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:21
CPC Classifications
B; B24; B24B; B24B37/00; B24B37/005; B24B37/013; C; C23; C23C; C23C14/00; C23C14/22; C23C14/54; C30; C30B; C30B23/00; C30B23/002; C30B25/00; C30B25/02; H; H10; H10P; H10P74/00; H10P74/23; H10P74/238
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
96 words
A method of monitoring deposition or etching of a layer on a substrate to form a heterostructure, comprising the steps of: impinging polarized radiation on said layer during deposition or etching thereof on said substrate, at an angle which is approximately the Brewster's angle for said substrate; detecting radiation which is reflected from said heterostructure during said deposition or etching of said layer to produce a quarter wavelength interference signal having a periodicity; detecting extrema in said quarter wavelength interference signal; and calculating a ratio of selected extrema to monitor deposition or etching of said layer.
Claim 2
Independent Claim
96 words
A method of monitoring deposition or etching of a layer on a substrate to form a heterostructure, comprising the steps of: impinging polarized radiation on said layer during deposition or etching thereof on said substrate, at an angle which is approximately the Brewster's angle for said substrate; detecting radiation which is reflected from said heterostructure during said deposition or etching of said layer to produce a quarter wavelength interference signal having a periodicity; detecting extrema in said quarter wavelength interference signal; and calculating a ratio of selected extrema to monitor deposition or etching of said layer.
Claim 3
Dependent Claim
33 words
A method according to claim 1 wherein said monitoring step is followed by the step of controlling said deposition or etching of said layer on said substrate based upon said ratio of extrema.
Claim 4
Dependent Claim
39 words
A method according to claim 2 wherein said controlling step comprises the steps of: comparing the ratio of extrema to a reference; and controlling said deposition or etching based upon differences between the ratio of extrema and the reference.
Claim 5
Independent Claim
114 words
A method of monitoring deposition or etching of a layer on a substrate to form a heterostructure, comprising the steps of: impinging polarized radiation on said layer during deposition or etching thereof on said substrate, at an angle which is approximately the Brewster's angle for said substrate; detecting radiation which is reflected from said heterostructure during said deposition or etching of said layer to produce a quarter wavelength interference signal having a periodicity; and detecting a fine signal which is superimposed on said quarter wavelength interference signal and which has periodicity substantially higher than said periodicity of said quarter wavelength interference signal, to thereby monitor deposition or etching of said layer on a substrate.
Claim 6
Independent Claim
114 words
A method of monitoring deposition or etching of a layer on a substrate to form a heterostructure, comprising the steps of: impinging polarized radiation on said layer during deposition or etching thereof on said substrate, at an angle which is approximately the Brewster's angle for said substrate; detecting radiation which is reflected from said heterostructure during said deposition or etching of said layer to produce a quarter wavelength interference signal having a periodicity; and detecting a fine signal which is superimposed on said quarter wavelength interference signal and which has periodicity substantially higher than said periodicity of said quarter wavelength interference signal, to thereby monitor deposition or etching of said layer on a substrate.
Claim 7
Dependent Claim
34 words
A method according to claim 4 wherein said fine signal detecting step is followed by the step of controlling said deposition or etching of said layer on said substrate based upon said fine signal.
Claim 8
Dependent Claim
39 words
A method according to claim 5 wherein said controlling step comprises the steps of: comparing the monitored fine signal to a reference; and controlling said deposition or etching based upon differences between the compared fine signal and the reference.
Claim 9
Independent Claim
115 words
A method of monitoring deposition or etching of a layer on a substrate in a chamber to form a structure, comprising the steps of: pulsing at least one precursor or etchant of said layer in said chamber at a periodicity to deposit or etch said layer on said substrate; impinging polarized radiation on said layer during deposition or etching thereof on said substrate, at an angle which is approximately the Brewster's angle for said substrate; detecting radiation which is reflected from said structure during said deposition or etching of said layer to produce an amplitude modulated signal having said periodicity; and monitoring the amplitude modulation of said amplitude modulated signal during said deposition or etching.
Claim 10
Independent Claim
115 words
A method of monitoring deposition or etching of a layer on a substrate in a chamber to form a structure, comprising the steps of: pulsing at least one precursor or etchant of said layer in said chamber at a periodicity to deposit or etch said layer on said substrate; impinging polarized radiation on said layer during deposition or etching thereof on said substrate, at an angle which is approximately the Brewster's angle for said substrate; detecting radiation which is reflected from said structure during said deposition or etching of said layer to produce an amplitude modulated signal having said periodicity; and monitoring the amplitude modulation of said amplitude modulated signal during said deposition or etching.
Claim 11
Dependent Claim
77 words
A method according to claim 7 wherein said layer is different from said substrate to produce a heterostructure, and wherein said detecting step comprises the step of detecting radiation which is reflected from said heterostructure during said deposition or etching of said layer to produce a quarter wavelength interference signal having a second periodicity and including said amplitude modulated signal superimposed thereon, wherein said periodicity of said amplitude modulated signal is substantially greater than said second periodicity.
Claim 12
Dependent Claim
30 words
A method according to claim 8 wherein said monitoring step further comprises the steps of: detecting extrema in said quarter wavelength interference signal; and monitoring a ratio of selected extrema.
Claim 13
Dependent Claim
38 words
A method according to claim 7 wherein said monitoring step is followed by the step of controlling said deposition or etching of said layer on said substrate based upon said monitored amplitude modulation of said amplitude modulated signal.
Claim 14
Dependent Claim
41 words
A method according to claim 10 wherein said controlling step comprises the steps of: comparing the monitored amplitude modulated signal to a reference; and controlling said deposition or etching based upon differences between the compared amplitude modulated signal and the reference.
Claim 15
Independent Claim
209 words
A method of monitoring deposition or etching of a first layer of a first material on a first substrate of said first material to form a homostructure, comprising the steps of: depositing or etching a second layer of said first material on a second substrate of a second material to form a heterostructure; impinging polarized radiation on said second layer during deposition or etching thereof on said second substrate, at an angle which is approximately the Brewster's angle for said second substrate; detecting radiation which is reflected from said heterostructure during said deposition or etching to produce a quarter wavelength interference signal having a periodicity; depositing or etching said first layer on said first substrate to form a homostructure; impinging polarized radiation on said first layer during deposition or etching thereof on said first substrate, at an angle which is approximately equal to the Brewster's angle for said first substrate; detecting radiation which is reflected from said homostructure during said deposition or etching to produce a fine signal which has a periodicity which is substantially higher than said periodicity of said quarter wavelength interference signal; calibrating said fine signal using said periodicity of said quarter wavelength interference signal; and monitoring the calibrated fine signal during said deposition or etching.
Claim 16
Independent Claim
209 words
A method of monitoring deposition or etching of a first layer of a first material on a first substrate of said first material to form a homostructure, comprising the steps of: depositing or etching a second layer of said first material on a second substrate of a second material to form a heterostructure; impinging polarized radiation on said second layer during deposition or etching thereof on said second substrate, at an angle which is approximately the Brewster's angle for said second substrate; detecting radiation which is reflected from said heterostructure during said deposition or etching to produce a quarter wavelength interference signal having a periodicity; depositing or etching said first layer on said first substrate to form a homostructure; impinging polarized radiation on said first layer during deposition or etching thereof on said first substrate, at an angle which is approximately equal to the Brewster's angle for said first substrate; detecting radiation which is reflected from said homostructure during said deposition or etching to produce a fine signal which has a periodicity which is substantially higher than said periodicity of said quarter wavelength interference signal; calibrating said fine signal using said periodicity of said quarter wavelength interference signal; and monitoring the calibrated fine signal during said deposition or etching.
Claim 17
Dependent Claim
36 words
A method according to claim 12 wherein said monitoring step is followed by the step of controlling said deposition or etching of said first layer on said first substrate based upon said monitored calibrated fine signal.
Claim 18
Dependent Claim
41 words
A method according to claim 13 wherein said controlling step comprises the steps of: comparing the monitored calibrated fine signal to a reference; and controlling said deposition or etching based upon differences between the compared calibrated fine signal and the reference.
Claim 19
Independent Claim
146 words
A method of monitoring deposition or etching of a layer on a substrate in a chamber to form a structure, comprising the steps of: pulsing at least one precursor or etchant of said layer in said chamber at a periodicity to deposit or etch said layer on said substrate; impinging polarized radiation on said layer during deposition or etching thereof on said substrate, at an angle which is approximately the Brewster's angle for said substrate; detecting radiation which is reflected from said structure during said deposition or etching of said layer to produce a first signal having said periodicity; detecting radiation which is scattered from said structure during deposition or etching of said layer to produce a second signal; correlating said first and second signals to produce a third signal; and monitoring said third signal during said deposition to monitor deposition or etching of said layer.
Claim 20
Independent Claim
146 words
A method of monitoring deposition or etching of a layer on a substrate in a chamber to form a structure, comprising the steps of: pulsing at least one precursor or etchant of said layer in said chamber at a periodicity to deposit or etch said layer on said substrate; impinging polarized radiation on said layer during deposition or etching thereof on said substrate, at an angle which is approximately the Brewster's angle for said substrate; detecting radiation which is reflected from said structure during said deposition or etching of said layer to produce a first signal having said periodicity; detecting radiation which is scattered from said structure during deposition or etching of said layer to produce a second signal; correlating said first and second signals to produce a third signal; and monitoring said third signal during said deposition to monitor deposition or etching of said layer.
Claim 21
Dependent Claim
36 words
A method according to claim 15 wherein said correlating step comprises the step of subtracting said second signal from said first signal to produce said third signal having reduced scattering component relative to said first signal.
Claim 22
Dependent Claim
77 words
A method according to claim 15 wherein said layer is different from said substrate to produce a heterostructure, and wherein said reflected radiation detecting step comprises the step of detecting radiation which is reflected from said heterostructure during said deposition or etching of said layer to produce a quarter wavelength interference signal having a second periodicity and including said first signal superimposed thereon, wherein said periodicity of said first signal is substantially greater than said second periodicity.
Claim 23
Dependent Claim
35 words
A method according to claim 15 wherein said monitoring step comprises the steps of: detecting extrema in said third signal; and monitoring a ratio of selected extrema to monitor deposition or etching of said layer.
Claim 24
Dependent Claim
33 words
A method according to claim 15 wherein said monitoring step is followed by the step of controlling said deposition or etching of said layer on said substrate based upon said monitored third signal.
Claim 25
Dependent Claim
39 words
A method according to claim 19 wherein said controlling step comprises the steps of: comparing the monitored third signal to a reference; and controlling said deposition or etching based upon differences between the compared third signal and the reference.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-09-03 | 2000-03-04 | 2000-09-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-09-03 | 2004-03-04 | 2004-09-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-09-03 | 2008-03-04 | 2008-09-03 | $7700.00 | Window Closed / Lapsed |