US5277747A
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Extraction of spatially varying dielectric function from ellipsometric data
Assignee: STANFORD UNIVERSITY OTL LLC
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Filing: 1992-09-15
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Granted: 1994-01-11
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Expires: 2012-09-15
Abstract
Abstract A method of and apparatus for extracting dielectric constants from ellipsometric data taken during the growth of a semiconductor thin film and using the extracted dielectric constants to control the composition of the growing film by adjusting the growth conditions. An expression is used for the derivative of the pseudo-dielectric function with respect to the thickness of the thin film within a three-phase model, and the expression is exact to first order in thickness of the film. The expression is quadratic with respect to the dielectric function for a homogeneous thin film and additionally depends on the dielectric function of homogeneous substrate underlying the thin film. Values of the measured pseudo-dielectric function are substituted for the dielectric function of the substrate, and the expression is then solved for the dielectric function of the thin film.
Inventors
- 👤 David E. Aspnes
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 11:24
CPC Classifications
C; C30; C30B; C30B25/00; C30B25/02; G; G01; G01N; G01N21/00; G01N21/17; G01N21/21; G01N21/211
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
146 words
A method of extracting spatially varying material data for a material having its upper surface modified, comprising the steps of: while said material is being modified measuring a sequence of pairs of values of a type of ellipsometric data; obtaining an expression including a derivative with respect to an incremental thickness of said type of ellipsometric data exact to lowest order in said incremental thickness, said expression containing a first pair of a type of material data for an upper portion of said material and at least a second pair of said type of said material data for a lower portion of said material; substituting in said expression selected ones of said sequence for said derivative and for said second pair; solving said expression for said first pair; and associating said first pair with said upper portion of said material, thereby physically characterizing said upper portion.
Claim 2
Independent Claim
146 words
A method of extracting spatially varying material data for a material having its upper surface modified, comprising the steps of: while said material is being modified measuring a sequence of pairs of values of a type of ellipsometric data; obtaining an expression including a derivative with respect to an incremental thickness of said type of ellipsometric data exact to lowest order in said incremental thickness, said expression containing a first pair of a type of material data for an upper portion of said material and at least a second pair of said type of said material data for a lower portion of said material; substituting in said expression selected ones of said sequence for said derivative and for said second pair; solving said expression for said first pair; and associating said first pair with said upper portion of said material, thereby physically characterizing said upper portion.
Claim 3
Dependent Claim
21 words
A method as recited in claim 1, wherein said ellipsometric data comprise pseudo-dielectric functions and said material data comprise dielectric constants.
Claim 4
Dependent Claim
26 words
A method as recited in claim 2, wherein said expression is a quadratic equation with respect to one of said dielectric constants for said upper portion.
Claim 5
Dependent Claim
41 words
A method as recited in claim 1, further comparing said first pair with a pair of target values for said material and, in response to said comparing, readjusting a growth condition for depositing said material while said measuring step is continuing.
Claim 6
Dependent Claim
24 words
A method as recited in claim 1, wherein said ellipsometric data equals said material data within a three-phase model of said material being grown.
Claim 7
Independent Claim
138 words
A method of characterizing a thin film on a substrate, comprising the steps of: measuring by ellipsometry a sequence of effective complex dielectric constants of said thin film and substrate; substituting selected ones of said sequence of effective dielectric constants for first dielectric constants in an expression including a derivative of said effective dielectric constant with respect to an incremental thickness of said thin film, said expression being exact to first order in said thickness and additionally containing a second dielectric constant physically characterizing an upper portion of said thin film and substrate, said first dielectric constants physically characterizing a lower portion of said thin film and substrate, said expression being quadratic with respect to said second dielectric constant; solving said quadratic expression for said second dielectric constant, thereby physically characterizing said upper portion of said thin film.
Claim 8
Independent Claim
138 words
A method of characterizing a thin film on a substrate, comprising the steps of: measuring by ellipsometry a sequence of effective complex dielectric constants of said thin film and substrate; substituting selected ones of said sequence of effective dielectric constants for first dielectric constants in an expression including a derivative of said effective dielectric constant with respect to an incremental thickness of said thin film, said expression being exact to first order in said thickness and additionally containing a second dielectric constant physically characterizing an upper portion of said thin film and substrate, said first dielectric constants physically characterizing a lower portion of said thin film and substrate, said expression being quadratic with respect to said second dielectric constant; solving said quadratic expression for said second dielectric constant, thereby physically characterizing said upper portion of said thin film.
Claim 9
Dependent Claim
33 words
A method as recited in claim 6, wherein said effective dielectric constants are dielectric constants with a two-phase model and said second dielectric constant is for a middle portion of a three-phase model.
Claim 10
Dependent Claim
55 words
A method as recited in claim 6, further comprising the steps of: continuously depositing said thin film on said substrate while said measuring step is being performed; comparing said solved second dielectric constant to a predetermined dielectric constant; and adjusting a condition of said depositing step in response to a result of said comparing step.
Claim 11
Dependent Claim
55 words
A method as recited in claim 6, further comprising the steps of: continuously etching said thin film on said substrate while said measuring step is being performed; comparing said solved second dielectric constant to a predetermined dielectric constant; and adjusting a condition of said etching step in response to a result of said comparing step.
Claim 12
Dependent Claim
116 words
An ellipsometric feedback system for use in conjunction with a growth system for growing a multi-component thin film on a substrate, comprising: an ellipsometer measuring a sequence of a type of ellipsometric data of said thin film being grown; and computing means for obtaining a composition of an upper portion of said thin film from said ellipsometric data, said computing means solving an expression including a derivative of said type of ellipsometric data with respect to an incremental thickness of said thin film, said expression being exact to first order in said thickness and having substituted a plurality of said type of said ellipsometric data for data physically characterizing a lower portion of said thin film.
Claim 13
Dependent Claim
116 words
An ellipsometric feedback system for use in conjunction with a growth system for growing a multi-component thin film on a substrate, comprising: an ellipsometer measuring a sequence of a type of ellipsometric data of said thin film being grown; and computing means for obtaining a composition of an upper portion of said thin film from said ellipsometric data, said computing means solving an expression including a derivative of said type of ellipsometric data with respect to an incremental thickness of said thin film, said expression being exact to first order in said thickness and having substituted a plurality of said type of said ellipsometric data for data physically characterizing a lower portion of said thin film.
Claim 14
Dependent Claim
47 words
A system as recited in claim 10, further comprising: comparing means for comparing said obtained composition with a predetermined target composition of said thin film; and correcting means for taking an output of said comparing means and providing therefrom a corrected control signal to said growth system.
References Cited (Backward Citations)
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