Process for forming protective diamond-like carbon coatings on metallic surfaces

Claim 2

A process for coating a metal surface, comprising the steps of: (a) immersing a metal workpiece comprising an uncoated metal surface in a Ni/P electroless deposition solution heated to a sufficient temperature that a Ni/P coating forms on the metal surface; (b) placing the workpiece in a vacuum chamber and heating the workpiece to approximately 315° C. for a sufficient amount of time to harden the Ni/P coating; (c) simultaneously with the heating step (b), directing a vaporized stream of silicon onto the Ni/P coating; (d) simultaneously with the heating and directing of steps (b) and (c), bombarding the stream of silicon over the Ni/P coating with an ion beam and at an energy level of 200 eV-100 KeV for a sufficient amount of time that a layer of NiSi 2 forms at the interface of the Ni/P coating and the silicon and that a silicon overlayer forms above the NiSi 2 interface layer; (e) directing a vaporized stream of carbon-containing precursor molecules having carbon-to-carbon and carbon-to-hydrogen bonds onto the surface of the silicon overlayer for a sufficient amount of time that a film of the precursor molecules condenses on the silicon overlayer; and (f) bombarding the film of precursor molecules with an ion beam of a sufficient energy level and for a sufficient amount of time that a sufficient number of the carbon-to-carbon and carbon-to-hydrogen bonds in the precursor molecules break to result in the formation of a diamond-like carbon coating on the silicon overlayer.

Claim 3

The process of claim 1, wherein the Ni/P solution is 3-12% phosphorus by atomic percent.

Claim 4

The process of claim 1, wherein the Ni/P solution comprises nickel sulfate, sodium hypophosphite, amino-acetic acid, acetic acid, and filtered water.

Claim 5

The process of claim 1, wherein the vaporized stream of silicon originates in an electron beam heated hearth.

Claim 6

The process of claim 1, wherein the ion beam used to bombard the stream of silicon over the Ni/P coating is aligned at approximately a 30° angle to the direction of the vaporized stream of silicon.

Claim 7

The process of claim 5, wherein the vaporized stream of silicon is directed at a substantially right angle to a surface of the Ni/P coating.

Claim 8

The process of claim 1, wherein the ion beam used to bombard the silicon comprises nitrogen.

Claim 9

The process of claim 1, wherein the ion beam used to bombard the silicon comprises argon.

Claim 10

The process of claim 1, wherein the heating of the workpiece to approximately 315° C. is for approximately three hours.

Claim 11

The process of claim 1, wherein the precursor is polydimethyl siloxane.

Claim 12

The process of claim 1, wherein the vaporized stream of precursor molecules originates from a vessel electrically heated to approximately 140° C.

Claim 13

The process of claim 1, wherein the precursor is polyphenyl ether.

Claim 14

The process of claim 1, wherein the step of directing a vaporized stream of carbon-containing precursor molecules takes place at a temperature below 100° C.

Claim 15

The process of claim 1, wherein the ion beam used to bombard the film of precursor molecules comprises nitrogen ions at energy levels of approximately 10 KeV.

Claim 16

The process of claim 1, further comprising the step of bombarding the diamond-like carbon coating with an ion beam comprising fluorine.

Claim 17

The process of claim 1, further comprising the step of bombarding the diamond-like carbon coating with an ion beam comprising sulfur.

Claim 18

A process for coating a metal surface, comprising the steps of: (a) immersing a metal workpiece comprising an uncoated metal surface in a Ni/B electroless deposition solution heated to a sufficient temperature that a Ni/B coating forms on the metal surface; (b) placing the workpiece in a vacuum chamber and heating the workpiece to approximately 315° C. for a sufficient amount of time to harden the Ni/B coating; (c) simultaneously with the heating step (b), directing a vaporized stream of silicon onto the Ni/B coating; (d) simultaneously with the heating and directing of steps (b) and (c), bombarding the stream of silicon over the Ni/B coating with an ion beam and at an energy level of 200 eV-100 KeV for a sufficient amount of time that a layer of NiSi 2 forms at the interface of the Ni/B coating and the silicon and that a silicon overlayer forms above the NiSi 2 interface layer; (e) directing a vaporized stream of carbon-containing precursor molecules having carbon-to-carbon and carbon-to-hydrogen bonds onto the surface of the silicon overlayer for a sufficient amount of time that a film of the precursor molecules condenses on the silicon overlayer; and (f) bombarding the film of precursor molecules with an ion beam of a sufficient energy level and for a sufficient amount of time that a sufficient number of the carbon-to-carbon and carbon-to-hydrogen bonds in the precursor molecules break to result in the formation of a diamond-like carbon coating on the silicon overlayer.

Claim 19

A process for coating a metal surface, comprising the steps of: (a) immersing a metal workpiece comprising an uncoated metal surface in a Ni/B electroless deposition solution heated to a sufficient temperature that a Ni/B coating forms on the metal surface; (b) placing the workpiece in a vacuum chamber and heating the workpiece to approximately 315° C. for a sufficient amount of time to harden the Ni/B coating; (c) simultaneously with the heating step (b), directing a vaporized stream of silicon onto the Ni/B coating; (d) simultaneously with the heating and directing of steps (b) and (c), bombarding the stream of silicon over the Ni/B coating with an ion beam and at an energy level of 200 eV-100 KeV for a sufficient amount of time that a layer of NiSi 2 forms at the interface of the Ni/B coating and the silicon and that a silicon overlayer forms above the NiSi 2 interface layer; (e) directing a vaporized stream of carbon-containing precursor molecules having carbon-to-carbon and carbon-to-hydrogen bonds onto the surface of the silicon overlayer for a sufficient amount of time that a film of the precursor molecules condenses on the silicon overlayer; and (f) bombarding the film of precursor molecules with an ion beam of a sufficient energy level and for a sufficient amount of time that a sufficient number of the carbon-to-carbon and carbon-to-hydrogen bonds in the precursor molecules break to result in the formation of a diamond-like carbon coating on the silicon overlayer.

Claim 20

The process of claim 17, wherein the Ni/B solution is 5% boron by atomic weight.

Claim 21

A process for coating a metal surface, comprising the steps of: (a) immersing a metal workpiece comprising an uncoated metal surface in a Ni/SiC electroless deposition solution heated to a sufficient temperature that a Ni/SiC coating forms on the metal surface; (b) placing the workpiece in a vacuum chamber and heating the workpiece to approximately 315° C. for a sufficient amount of time to harden the Ni/SiC coating; (c) simultaneously with the heating step (b), directing a vaporized stream of silicon onto the Ni/SiC coating; (d) simultaneously with the heating and directing of steps (b) and (c), bombarding the stream of silicon over the Ni/SiC coating with an ion beam and at an energy level of 200 eV-100 KeV for a sufficient amount of time that a layer of NiSi 2 forms at the interface of the Ni/SiC coating and the silicon and that a silicon overlayer forms above the NiSi 2 interface layer; (e) directing a vaporized stream of carbon-containing precursor molecules having carbon-to-carbon and carbon-to-hydrogen bonds onto the surface of the silicon overlayer for a sufficient amount of time that a film of the precursor molecules condenses on the silicon overlayer; and (f) bombarding the film of precursor molecules with an ion beam of a sufficient energy level and for a sufficient amount of time that a sufficient number of the carbon-to-carbon and carbon-to-hydrogen bonds in the precursor molecules break to result in the formation of a diamond-like carbon coating on the silicon overlayer.

Claim 22

A process for coating a metal surface, comprising the steps of: (a) immersing a metal workpiece comprising an uncoated metal surface in a Ni/SiC electroless deposition solution heated to a sufficient temperature that a Ni/SiC coating forms on the metal surface; (b) placing the workpiece in a vacuum chamber and heating the workpiece to approximately 315° C. for a sufficient amount of time to harden the Ni/SiC coating; (c) simultaneously with the heating step (b), directing a vaporized stream of silicon onto the Ni/SiC coating; (d) simultaneously with the heating and directing of steps (b) and (c), bombarding the stream of silicon over the Ni/SiC coating with an ion beam and at an energy level of 200 eV-100 KeV for a sufficient amount of time that a layer of NiSi 2 forms at the interface of the Ni/SiC coating and the silicon and that a silicon overlayer forms above the NiSi 2 interface layer; (e) directing a vaporized stream of carbon-containing precursor molecules having carbon-to-carbon and carbon-to-hydrogen bonds onto the surface of the silicon overlayer for a sufficient amount of time that a film of the precursor molecules condenses on the silicon overlayer; and (f) bombarding the film of precursor molecules with an ion beam of a sufficient energy level and for a sufficient amount of time that a sufficient number of the carbon-to-carbon and carbon-to-hydrogen bonds in the precursor molecules break to result in the formation of a diamond-like carbon coating on the silicon overlayer.

Claim 23

The process of claim 1, wherein the Ni/SiC solution is 25% SiC by volume.

Claim 24

A process for coating a metal surface, comprising the steps of: (a) immersing a metal workpiece comprising an uncoated metal surface in a Ni/P electroless deposition solution heated to a sufficient temperature that a Ni/P coating forms on the metal surface; (b) placing the workpiece in a vacuum chamber and heating the workpiece to approximately 315° C. for a sufficient amount of time to harden the Ni/P coating; (c) simultaneously with the heating step (b), directing a vaporized stream of germanium onto the Ni/P coating; (d) simultaneously with the heating and directing of steps (b) and (c), bombarding the stream of germanium over the Ni/P coating with an ion beam and at an energy level of 200 eV-100 KeV for a sufficient amount of time that a layer of NiGe 2 forms at the interface of the Ni/P coating and the germanium and that a germanium overlayer forms above the NiGe 2 interface layer; (e) directing a vaporized stream of carbon-containing precursor molecules having carbon-to-carbon and carbon-to-hydrogen bonds onto the surface of the germanium overlayer for a sufficient amount of time that a film of the precursor molecules condenses on the germanium overlayer; and (f) bombarding the film of precursor molecules with an ion beam of a sufficient energy level and for a sufficient amount of time that a sufficient number of the carbon-to-carbon and carbon-to-hydrogen bonds in the precursor molecules break to result in the formation of a diamond-like carbon coating on the germanium overlayer.

Claim 25

A process for coating a metal surface, comprising the steps of: (a) immersing a metal workpiece comprising an uncoated metal surface in a Ni/P electroless deposition solution heated to a sufficient temperature that a Ni/P coating forms on the metal surface; (b) placing the workpiece in a vacuum chamber and heating the workpiece to approximately 315° C. for a sufficient amount of time to harden the Ni/P coating; (c) simultaneously with the heating step (b), directing a vaporized stream of germanium onto the Ni/P coating; (d) simultaneously with the heating and directing of steps (b) and (c), bombarding the stream of germanium over the Ni/P coating with an ion beam and at an energy level of 200 eV-100 KeV for a sufficient amount of time that a layer of NiGe 2 forms at the interface of the Ni/P coating and the germanium and that a germanium overlayer forms above the NiGe 2 interface layer; (e) directing a vaporized stream of carbon-containing precursor molecules having carbon-to-carbon and carbon-to-hydrogen bonds onto the surface of the germanium overlayer for a sufficient amount of time that a film of the precursor molecules condenses on the germanium overlayer; and (f) bombarding the film of precursor molecules with an ion beam of a sufficient energy level and for a sufficient amount of time that a sufficient number of the carbon-to-carbon and carbon-to-hydrogen bonds in the precursor molecules break to result in the formation of a diamond-like carbon coating on the germanium overlayer.

Claim 26

The process of claim 21, wherein the vaporized stream of germanium originates in an electron beam heated hearth.

Claim 27

The process of claim 21, wherein the ion beam used to bombard the stream of germanium over the Ni/P coating is aligned at approximately a 30° angle to the direction of the vaporized stream of germanium.