US4634600A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Surface treatment process
Assignee: Sumitomo Electric Industries Ltd
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Filing: 1985-06-19
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Granted: 1987-01-06
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Expires: 2005-06-19
Abstract
Abstract A substrate is treated for forming a thin film on the surface of the substrate to obtain a hard layer adhering to the substrate surface. For this purpose the substrate is placed in a metal vapor atmosphere and simultaneously bombarded by metal or nonmetal ions which are implanted into the substrate while the metal vapor atmosphere is also being ionized.
Inventors
- 👤 Yasuhiro Shimizu
- 👤 Akira Doi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 05:37
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/0021; C23C14/24; C23C14/32
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
94 words
A surface treatment process for forming a thin film on the surface of a substrate positioned in an evaporation chamber for treatment, comprising the following steps: (a) vaporizing an evaporation metal in said evaporation chamber, (b) ionizing said metal vapor, (c) depositing said ionized metal vapor on said substrate, and (d) simultaneously with steps (a), (b), and (c) accelerating metal or nonmetal ions into said evaporation chamber for a simultaneous implanting of accelerated metal or nonmetal ions in or on said substrate for forming a coating of improved hardness and adhesion on said substrate.
Claim 2
Dependent Claim
94 words
A surface treatment process for forming a thin film on the surface of a substrate positioned in an evaporation chamber for treatment, comprising the following steps: (a) vaporizing an evaporation metal in said evaporation chamber, (b) ionizing said metal vapor, (c) depositing said ionized metal vapor on said substrate, and (d) simultaneously with steps (a), (b), and (c) accelerating metal or nonmetal ions into said evaporation chamber for a simultaneous implanting of accelerated metal or nonmetal ions in or on said substrate for forming a coating of improved hardness and adhesion on said substrate.
Claim 3
Dependent Claim
17 words
The surface treatment process of claim 1, wherein said substrate to be treated is a cutting tool.
Claim 4
Dependent Claim
39 words
The surface treatment process of claim 1, wherein said evaporation metal is made of a substance or two or more substances selected from a group of Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Si, Al and B.
Claim 5
Dependent Claim
51 words
The surface treatment process of claim 1, wherein said metal or nonmetal ions are made of a substance or two or more substances selected from a group of N 2 + , N + , O 2 + , O + , C + , Si + and B + .
Claim 6
Dependent Claim
22 words
The surface treatment process of claim 1, wherein said first mentioned ionizing of said metal vapor is performed by a high-frequency discharge.
Claim 7
Dependent Claim
22 words
The surface treatment process of claim 1, wherein said first mentioned ionizing of said metal vapor is performed by DC arc discharge.
Claim 8
Dependent Claim
21 words
The surface treatment process of claim 1, wherein said first mentioned ionizing of said metal vapor is performed by thermoion emission.
Claim 9
Dependent Claim
33 words
The surface treatment process of claim 1, wherein said metal vapor is obtained by an HCD gun, said first mentioned ionizing of said metal vapor being performed by electrons of said HCD gun.
Claim 10
Dependent Claim
19 words
The surface treatment process of claim 1, wherein an acceleration voltage is applied to said substrate to be treated.
Claim 11
Dependent Claim
29 words
The surface treatment process of claim 1, wherein a compound of said evaporation metal and said implanted ion is formed on and coated onto said substrate to be treated.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-01-05 | 1990-07-07 | 1991-01-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-01-05 | 1994-07-07 | 1995-01-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-01-05 | 1998-07-07 | 1999-01-06 | $7700.00 | Window Closed / Lapsed |