Patent US5654580A successfully refreshed from Google Patents.
US5654580A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Semiconductor structure for fabrication of a thermal sensor
Assignee: Texas Instruments Inc
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Filing: 1995-06-05
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Granted: 1997-08-05
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Expires: 2015-06-05
Abstract
Abstract An etching process is provided using electromagnetic radiation and a selected etchant (52) to selectively remove various types of materials (53) from a substrate (48). Contacts (49, 56, 64) may be formed to shield the masked regions (51) of the substrate (48) having an attached coating (20) during irradiation of the unmasked regions (53) of the substrate (48). The unmasked regions (53) are then exposed to an etchant (52) and irradiated to substantially increase their reactivity with the etchant (52) such that the etchant (52) etches the unmasked regions (53) substantially faster than the masked regions (51) and the contacts (49, 56, 64).
Inventors
- 👤 Howard R. Beratan
- 👤 James F. Belcher
- 👤 Scott R. Summerfelt
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 13:42
CPC Classifications
C; C23; C23F; C23F1/00; C23F1/02; G; G01; G01J; G01J5/00; G01J5/10; G01J5/20; H; H10; H10N; H10N15/00; H10N15/10
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
219 words
A semiconductor structure for use in fabricating a thermal sensitive element for a thermal sensor comprising: a substrate formed from thermal sensitive material having a first side and a second side; a coating attached to said first side of said substrate; said second side of said substrate having a number of masked regions and a number of unmasked regions; each of said masked regions defined in part by a respective first mask layer; a first set of contacts disposed on said second side of said substrate in respective alignment with said masked regions of said substrate, said first set of contacts located between said respective first mask layers and said respective masked regions for shielding said masked regions during irradiation of said unmasked regions of said substrate with ultraviolet electromagnetic radiation; said first mask layers disposed respectively on a portion of each of said first set of contacts opposite said substrate, said first mask layers formed from a material selected to etch slower than said unmasked regions when exposed to a selected etchant during said irradiation; said first mask layers encapsulating respectively exposed portions of said first set of contacts; a second set of contacts disposed respectively on said first mask layers; and a second mask layer encapsulating respectively exposed portions of each of said second set of contacts.
Claim 2
Dependent Claim
219 words
A semiconductor structure for use in fabricating a thermal sensitive element for a thermal sensor comprising: a substrate formed from thermal sensitive material having a first side and a second side; a coating attached to said first side of said substrate; said second side of said substrate having a number of masked regions and a number of unmasked regions; each of said masked regions defined in part by a respective first mask layer; a first set of contacts disposed on said second side of said substrate in respective alignment with said masked regions of said substrate, said first set of contacts located between said respective first mask layers and said respective masked regions for shielding said masked regions during irradiation of said unmasked regions of said substrate with ultraviolet electromagnetic radiation; said first mask layers disposed respectively on a portion of each of said first set of contacts opposite said substrate, said first mask layers formed from a material selected to etch slower than said unmasked regions when exposed to a selected etchant during said irradiation; said first mask layers encapsulating respectively exposed portions of said first set of contacts; a second set of contacts disposed respectively on said first mask layers; and a second mask layer encapsulating respectively exposed portions of each of said second set of contacts.
Claim 3
Dependent Claim
22 words
The semiconductor structure of claim 1 further comprising an intermediate mask layer disposed between said first set of contacts and said substrate.
Claim 4
Dependent Claim
19 words
The semiconductor structure of claim 2 wherein said intermediate mask layer comprises spun-on silicon oxide doped with transition metals.
Claim 5
Dependent Claim
43 words
The semiconductor structure of claim 2 wherein said intermediate mask layer comprises material selected from the group consisting of SiO 2 , Si 3 N 4 , Al 2 O 3 , B 2 O 3 , and Ta 2 O 5 .
Claim 6
Dependent Claim
34 words
The semiconductor structure of claim 1 wherein said first mask layers comprise spun-on silicon oxide doped with selected transition metals and said second mask layer comprises spun-on silicon oxide doped with selected transition metals.
Claim 7
Dependent Claim
79 words
The semiconductor structure of claim 1 wherein said first mask layers comprise material selected from the group consisting of SiO 2 , Si 3 N 4 , Al 2 O 3 , B 2 O 3 , and Ta 2 O 5 and said second mask layer comprises material selected from the group consisting of SiO 2 , Si 3 N 4 , Al 2 O 3 , B 2 O 3 , and Ta 2 O 5 .
Claim 8
Dependent Claim
175 words
A semiconductor structure for use in fabricating a thermal sensitive element for a thermal sensor comprising: a substrate formed from thermal sensitive material having a first side and a second side; a first set of contacts disposed on said first side of said substrate; a common electrode attached to said second side of said substrate; said first side of said substrate having a number of masked regions and a number of unmasked regions with said masked regions generally aligned with said first set of contacts whereby said first contacts respectively shield said masked regions during irradiation of said unmasked regions of said substrate with electromagnetic radiation; a first mask layer disposed on a portion of each of said first set of contacts opposite said substrate to further define said respective masked regions; said first mask layers respectively encapsulating exposed portions of said first set of contacts; and said first mask layers formed from a material selected to etch at a slower rate than said unmasked regions when exposed to a selected etchant during said irradiation.
Claim 9
Dependent Claim
175 words
A semiconductor structure for use in fabricating a thermal sensitive element for a thermal sensor comprising: a substrate formed from thermal sensitive material having a first side and a second side; a first set of contacts disposed on said first side of said substrate; a common electrode attached to said second side of said substrate; said first side of said substrate having a number of masked regions and a number of unmasked regions with said masked regions generally aligned with said first set of contacts whereby said first contacts respectively shield said masked regions during irradiation of said unmasked regions of said substrate with electromagnetic radiation; a first mask layer disposed on a portion of each of said first set of contacts opposite said substrate to further define said respective masked regions; said first mask layers respectively encapsulating exposed portions of said first set of contacts; and said first mask layers formed from a material selected to etch at a slower rate than said unmasked regions when exposed to a selected etchant during said irradiation.
Claim 10
Dependent Claim
46 words
The semiconductor structure of claim 7 further comprising: a second set of contacts disposed respectively on said first mask layers; a second mask layer encapsulating exposed portions of each of said second set of contacts; and said second mask layers further defining said respective masked regions.
Claim 11
Dependent Claim
20 words
The semiconductor structure of claim 8 wherein said second mask layers comprise spun-on silicon oxide doped with selected transition metals.
Claim 12
Dependent Claim
43 words
The semiconductor structure of claim 8 wherein said second mask layers comprise material selected from the group consisting of SiO 2 , Si 3 N 4 , Al 2 O 3 , B 2 O 3 , and Ta 2 O 5 .
Claim 13
Dependent Claim
34 words
The semiconductor structure of claim 7 further comprising: a number of etch stops disposed between said substrate and said common electrode; and said etch stops generally aligned with said unmasked regions of said substrate.
Claim 14
Dependent Claim
20 words
The semiconductor structure of claim 7 wherein said first mask layers comprise spun-on silicon oxide doped with selected transition metals.
Claim 15
Dependent Claim
43 words
The semiconductor structure of claim 7 wherein said first mask layers comprise material selected from the group consisting of SiO 2 , Si 3 N 4 , Al 2 O 3 , B 2 O 3 , and Ta 2 O 5 .
Claim 16
Dependent Claim
173 words
A semiconductor structure for use in fabricating a thermal sensitive element for a thermal sensor comprising: a substrate formed from thermal sensitive material having a first side and a second side; a first set of contacts disposed on said first side of said substrate; said first side of said substrate having a number of masked regions and a number of unmasked regions with said masked regions generally aligned with said first set of contacts whereby said first contacts shield said masked regions during irradiation of said substrate with electromagnetic radiation; a first mask layer disposed on a portion of each of said first set of contacts opposite said substrate to further define said masked regions; said first mask layers respectively encapsulating exposed portions of said first set of contacts; said first mask layers formed from a material selected to etch at a rate slower than said unmasked regions when exposed to a selected etchant during said irradiation; and an intermediate layer disposed between each of said first set of contacts and said substrate.
Claim 17
Dependent Claim
173 words
A semiconductor structure for use in fabricating a thermal sensitive element for a thermal sensor comprising: a substrate formed from thermal sensitive material having a first side and a second side; a first set of contacts disposed on said first side of said substrate; said first side of said substrate having a number of masked regions and a number of unmasked regions with said masked regions generally aligned with said first set of contacts whereby said first contacts shield said masked regions during irradiation of said substrate with electromagnetic radiation; a first mask layer disposed on a portion of each of said first set of contacts opposite said substrate to further define said masked regions; said first mask layers respectively encapsulating exposed portions of said first set of contacts; said first mask layers formed from a material selected to etch at a rate slower than said unmasked regions when exposed to a selected etchant during said irradiation; and an intermediate layer disposed between each of said first set of contacts and said substrate.
References Cited (Backward Citations)
DE2111746A1
Cited
US3846820A
Cited
US4018608A
Cited
US4080532A
Cited
DE2752704A1
Cited
US4143269A
Cited
US4162402A
Cited
US4379232A
Cited
US4142207A
Cited
US4275302A
Cited
US4366229A
Cited
US4594507A
Cited
US4663529A
Cited
US4678536A
Cited
US4750979A
Cited
US4751387A
Cited
US4705593A
Cited
US4661201A
Cited
US4705361A
Cited
US4980338A
Cited
US4871416A
Cited
US4949783A
Cited
US5010251A
Cited
US5021663A
Cited
US5021663B1
Cited
US5051591A
Cited
US5047644A
Cited
US5264326A
Cited
US5183531A
Cited
US4994672A
Cited
GB2251952A
Cited
WO1991016607A1
Cited
US5242537A
Cited
US5196703A
Cited
US5367167A
Cited
US5374330A
Cited
US5312516A
Cited
US5238530A
Cited
US5238529A
Cited
US5201989A
Cited
US5279702A
Cited
US5460687A
Cited
US5466332A
Cited
US5457318A
Cited
US5520299A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-08-04 | 2001-02-03 | 2001-08-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-08-04 | 2005-02-03 | 2005-08-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-08-04 | 2009-02-03 | 2009-08-05 | $7700.00 | Window Closed / Lapsed |