Patent CH47085A successfully refreshed from Google Patents.
US5367167A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Uncooled infrared detector and method for forming the same
Assignee: L3 Technologies Inc
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Filing: 1993-08-16
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Granted: 1994-11-22
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Expires: 2013-08-16
Abstract
Abstract A bolometer for detecting radiation in a spectral range is described herein. The bolometer includes an integrated circuit substrate 122 and a pixel body 120 spaced from the substrate 122 by at least one pillar 124. The pixel body 120 comprises an absorber material 132, such as titanium for example, for absorbing radiation in the spectral range, which may be 7 to 12 microns for example. The absorber material 132 heats the pixel body 120 to a temperature which is proportional to the absorbed radiation. An insulating material 134 is formed over the absorber material 132. In addition, a variable resistor material 136, possible amorphous silicon for example, with an electrical resistance corresponding to the temperature of the pixel body 120 is formed over said insulating layer 134. A current flows through the variable resistor material 136 substantially parallel to the integrated circuit substrate 122 for detection. Other systems and methods are also disclosed.
Inventors
- 👤 William F. Keenan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 22:44
CPC Classifications
G; G01; G01J; G01J5/00; G01J5/10; G01J5/20; H; H10; H10F; H10F30/00; H10F30/10; H04; H04N; H04N23/00; H04N23/20; H04N25/00; H04N25/60; H04N5/00; H04N5/30; H04N5/33; H10F39/00; H10F39/10; H10F39/12; H10F39/191; H10F39/193; H10F39/1935
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
91 words
A bolometer for detecting radiation in a spectral range comprising: an integrated circuit substrate; and a pixel body spaced from said substrate by at least one pillar, said pixel body comprising: an absorber material for absorbing radiation in said spectral range, said absorber material heating said pixel body to a temperature in proportion to the absorbed radiation; an insulating material formed over said absorber material; and a variable resistor material with an electrical resistance corresponding to the temperature of said pixel body, said variable resistor material formed over said insulating material.
Claim 2
Dependent Claim
91 words
A bolometer for detecting radiation in a spectral range comprising: an integrated circuit substrate; and a pixel body spaced from said substrate by at least one pillar, said pixel body comprising: an absorber material for absorbing radiation in said spectral range, said absorber material heating said pixel body to a temperature in proportion to the absorbed radiation; an insulating material formed over said absorber material; and a variable resistor material with an electrical resistance corresponding to the temperature of said pixel body, said variable resistor material formed over said insulating material.
Claim 3
Dependent Claim
15 words
The bolometer of claim 1 wherein said spectral range is between 7 and 12 microns.
Claim 4
Dependent Claim
22 words
The bolometer of claim 1 wherein said pixel body is spaced between about 2 and 3 microns from said integrated circuit substrate.
Claim 5
Dependent Claim
16 words
The bolometer of claim 1 and further comprising a passivation layer formed beneath said absorber material.
Claim 6
Dependent Claim
12 words
The bolometer of claim 4 wherein said passivation layer comprises silicon oxide.
Claim 7
Dependent Claim
11 words
The bolometer of claim 1 wherein said absorber material is titanium.
Claim 8
Dependent Claim
13 words
The bolometer of claim 1 wherein said variable resistor material is amorphous silicon.
Claim 9
Dependent Claim
12 words
The bolometer of claim 1 wherein said insulating material comprises amorphous silicon.
Claim 10
Dependent Claim
12 words
The bolometer of claim 1 wherein said insulating material comprises silicon dioxide.
Claim 11
Dependent Claim
12 words
The bolometer of claim 9 wherein said passivation layer comprises silicon dioxide.
Claim 12
Dependent Claim
12 words
The bolometer of claim 1 wherein said insulating material comprises silicon nitride.
Claim 13
Dependent Claim
19 words
The bolometer of claim 1 and further comprising a mirror region formed on said substrate beneath said pixel body.
Claim 14
Dependent Claim
11 words
The bolometer of claim 12 wherein said mirror region comprises aluminum.
Claim 15
Dependent Claim
25 words
The bolometer of claim 1 wherein said variable resistor includes a resistor path region, said resistor path region substantially parallel to said integrated circuit substrate.
Claim 16
Dependent Claim
113 words
An infrared detection array comprising: an array of bolometers, each of said bolometers comprising: an integrated circuit substrate; and a pixel body spaced from said substrate by at least one pillar, said pixel body comprising: an absorber material for absorbing radiation in a selected spectral range, said absorber material heating said pixel body to a temperature in proportion to the absorbed radiation; an insulating material formed over said absorber material; and a variable resistor material with an electrical resistance corresponding to the temperature of said pixel body, said variable resistor material formed over said insulating material; and circuitry formed in said substrate for detecting changes in said resistance of said variable resistor material.
Claim 17
Dependent Claim
113 words
An infrared detection array comprising: an array of bolometers, each of said bolometers comprising: an integrated circuit substrate; and a pixel body spaced from said substrate by at least one pillar, said pixel body comprising: an absorber material for absorbing radiation in a selected spectral range, said absorber material heating said pixel body to a temperature in proportion to the absorbed radiation; an insulating material formed over said absorber material; and a variable resistor material with an electrical resistance corresponding to the temperature of said pixel body, said variable resistor material formed over said insulating material; and circuitry formed in said substrate for detecting changes in said resistance of said variable resistor material.
Claim 18
Dependent Claim
16 words
The array of claim 15 wherein said spectral range is between about 7 and 12 microns.
Claim 19
Dependent Claim
11 words
The array of claim 15 wherein said absorber material is titanium.
Claim 20
Dependent Claim
13 words
The array of claim 15 wherein said variable resistor material is amorphous silicon.
Claim 21
Dependent Claim
12 words
The array of claim 15 wherein said insulating material comprises amorphous silicon.
Claim 22
Dependent Claim
20 words
The array of claim 15 wherein each of said bolometers further comprise a passivation layer formed beneath said absorber material.
Claim 23
Dependent Claim
12 words
The array of claim 20 wherein said passivation layer comprises silicon dioxide.
Claim 24
Dependent Claim
25 words
The array of claim 15 wherein said variable resistor includes a resistor path region, said resistor path region substantially parallel to said integrated circuit substrate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-11-21 | 1998-05-23 | 1998-11-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-11-21 | 2002-05-23 | 2002-11-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-11-21 | 2006-05-23 | 2006-11-22 | $7700.00 | Window Closed / Lapsed |