US5100479A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Thermopile infrared detector with semiconductor supporting rim
Assignee: University of Michigan (System)
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Filing: 1991-07-01
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Granted: 1992-03-31
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Expires: 2011-07-01
Abstract
Abstract A thermopile detector is disclosed consisting of a semiconductor supporting rim which is doped across all of the rim. The rim supports a series of polycrystalline silicon and metal thermocouples. The fully doped semiconductor area serves as an etch stop for a single-sided etch which eliminates the need for front-to-back alignment of the device. The semiconductor doped rim also serves as a good thermal conductor for supporting the cold junctions. The hot junctions of the thermocouples may be supported by a thin dielectric membrane spanning the device and the cold junctions are formed on the doped rim. The thin dielectric window provides thermal isolation between the semiconductor rim and the center of the window where the hot junctions are located. The thermocouple material layers may be stacked to enable greater thermocouple density on the device. Refractory metals may be employed as the thermocouple metal, to increase sensitivity.
Inventors
- 👤 Kensall D. Wise
- 👤 Khalil Najafi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 19:33
CPC Classifications
H; H10; H10N; H10N10/00; H10N10/80; H10N10/81; H10N10/817; G; G01; G01J; G01J5/00; G01J5/10; G01J5/12; H10N10/01; G01J2005/123
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
43 words
A thermopile comprising: a semiconductor supporting rim, all of said semiconductor supporting rim being doped with a first dopant, said doped semiconductor supporting rim having an aperture therein; and a plurality of thermocouples in said aperture, extending onto said doped semiconductor supporting rim.
Claim 2
Dependent Claim
43 words
A thermopile comprising: a semiconductor supporting rim, all of said semiconductor supporting rim being doped with a first dopant, said doped semiconductor supporting rim having an aperture therein; and a plurality of thermocouples in said aperture, extending onto said doped semiconductor supporting rim.
Claim 3
Dependent Claim
39 words
The thermopile of claim 1 wherein said plurality of thermocouples comprises: a patterned polycrystalline silicon layer formed over said aperture, extending onto said doped semiconductor supporting rim; and a patterned refractory metal layer on said patterned polycrystalline silicon layer.
Claim 4
Dependent Claim
46 words
The thermopile of claim 1 wherein the plurality of thermocouples further comprises a dielectric layer between said patterned polycrystalline layer and said refractory metal layer, said dielectric layer including a plurality of apertures, said refractory metal layer contacting said polycrystalline layer through said plurality of apertures.
Claim 5
Dependent Claim
12 words
The thermopile of claim 2 wherein said refractory metal layer comprises tantalum.
Claim 6
Dependent Claim
19 words
The thermopile of claim 1 wherein said semiconductor supporting rim comprises silicon and wherein said first dopant comprises boron.
Claim 7
Dependent Claim
16 words
The thermopile of claim 1 wherein said semiconductor supporting rim comprises a toroid-shaped semiconductor supporting rim.
Claim 8
Dependent Claim
71 words
A thermopile comprising: a silicon supporting rim, all of said silicon supporting rim being doped with boron, said doped silicon supporting rim having an aperture therein; a dielectric membrane formed on said silicon supporting rim and spanning said aperture; a patterned polycrystalline silicon layer formed over said aperture on said dielectric membrane, extending onto said boron-doped silicon supporting rim; and a patterned refractory metal layer on said patterned polycrystalline silicon layer.
Claim 9
Dependent Claim
71 words
A thermopile comprising: a silicon supporting rim, all of said silicon supporting rim being doped with boron, said doped silicon supporting rim having an aperture therein; a dielectric membrane formed on said silicon supporting rim and spanning said aperture; a patterned polycrystalline silicon layer formed over said aperture on said dielectric membrane, extending onto said boron-doped silicon supporting rim; and a patterned refractory metal layer on said patterned polycrystalline silicon layer.
Claim 10
Dependent Claim
16 words
The thermopile of claim 7 wherein said silicon supporting rim comprises a toroid-shaped silicon supporting rim.
Claim 11
Dependent Claim
11 words
The thermopile of claim 7 wherein said refractory metal is tantalum.
Claim 12
Dependent Claim
53 words
A thermopile comprising: a silicon supporting rim having an aperture therein; a dielectric membrane formed on said supporting rim and spanning said aperture; a patterned polycrystalline silicon layer formed over said aperture on said dielectric membrane, extending onto said supporting rim; and a patterned refractory metal layer on said patterned polycrystalline silicon layer.
Claim 13
Dependent Claim
53 words
A thermopile comprising: a silicon supporting rim having an aperture therein; a dielectric membrane formed on said supporting rim and spanning said aperture; a patterned polycrystalline silicon layer formed over said aperture on said dielectric membrane, extending onto said supporting rim; and a patterned refractory metal layer on said patterned polycrystalline silicon layer.
Claim 14
Dependent Claim
15 words
The thermopile of claim 10 wherein said supporting rim comprises a toroid-shaped silicon supporting rim.
Claim 15
Dependent Claim
11 words
The thermopile of claim 10 wherein said refractory metal is tantalum.
Claim 16
Dependent Claim
44 words
The thermopile of claim 10 further comprising a dielectric layer between said patterned polycrystalline layer and said patterned refractory metal layer, said dielectric layer including a plurality of apertures, said patterned refractory metal layer contacting said patterned polycrystalline layer through said plurality of apertures.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-03-31 | 1995-09-30 | 1996-03-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-03-31 | 1999-09-30 | 2000-03-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-03-31 | 2003-09-30 | 2004-03-31 | $7700.00 | Window Closed / Lapsed |