US4654622A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Monolithic integrated dual mode IR/mm-wave focal plane sensor
Assignee: Honeywell Inc
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Filing: 1985-09-30
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Granted: 1987-03-31
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Expires: 2005-09-30
Abstract
Abstract A monolithic integrated focal plane sensor array having elements sensitive to IR radiation and elements sensitive to mm-wave radiation. The sensor elements of the array sensitive to mm-wave have microantennas coupled to the sensors.
Inventors
- 👤 Norman A. Foss
- 👤 Paul W. Kruse, Jr.
- 👤 R. Andrew Wood
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 16:13
CPC Classifications
H; H01; H01Q; H01Q19/00; H01Q19/06; H01Q19/062; G; G01; G01J; G01J5/00; G01J5/02; G01J5/08; G01J5/0837; G01J5/10; G01J5/20; H01Q1/00; H01Q1/36; H01Q1/38; H01Q15/00; H01Q15/02; H01Q5/00; H01Q5/40; H01Q5/42; H01Q9/00; H01Q9/04; H01Q9/06; H01Q9/065; H01Q9/16; H10; H10F; H10F39/00; H10F39/80; H10F39/802
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
128 words
An integrated dual-mode infrared and millimeter-wave focal plane sensor array monolithically fabricated on the same silicon wafer comprising: a wafer of single crystal silicon having opposing flat surfaces; a first linear or two-dimensional array of infrared sensitive sensors being fabricated on a first surface of said wafer said infrared sensors each having electrical output means; and, a further linear or two dimensional array of mm-wave sensitive sensors fabricated on said first surface interspersed with said first array sensors, said further array sensors being dimensionally too small to effectively couple mm-wave energy, said mm-wave sensors each having connected thereto a microantenna of a size substantially matched to the wavelength of the mm-waves for coupling received mm-wave radiation to the mm-wave sensors, said mm-wave sensors each having electrical output means.
Claim 2
Dependent Claim
128 words
An integrated dual-mode infrared and millimeter-wave focal plane sensor array monolithically fabricated on the same silicon wafer comprising: a wafer of single crystal silicon having opposing flat surfaces; a first linear or two-dimensional array of infrared sensitive sensors being fabricated on a first surface of said wafer said infrared sensors each having electrical output means; and, a further linear or two dimensional array of mm-wave sensitive sensors fabricated on said first surface interspersed with said first array sensors, said further array sensors being dimensionally too small to effectively couple mm-wave energy, said mm-wave sensors each having connected thereto a microantenna of a size substantially matched to the wavelength of the mm-waves for coupling received mm-wave radiation to the mm-wave sensors, said mm-wave sensors each having electrical output means.
Claim 3
Dependent Claim
18 words
The article according to claim 1 in which the first array and the further array are linear arrays.
Claim 4
Dependent Claim
19 words
The article according to claim 1 in which the first array and the further array are two dimensional arrays.
Claim 5
Dependent Claim
13 words
The article according to claim 1 in which said microantennas are bow-tie antennas.
Claim 6
Dependent Claim
31 words
The article according to claim 4 in which said bow-tie antennas are fabricated on a second of said opposing flat surfaces and are connected through the wafer to the mm-wave sensors.
Claim 7
Dependent Claim
14 words
The article according to claim 1 in which said microantennas are full-wave dipole antennas.
Claim 8
Dependent Claim
17 words
The article according to claim 1 in which said infrared sensors and said mm-wave sensors are bolometers.
Claim 9
Dependent Claim
15 words
The article according to claim 1 in which said microantennas are fabricated to said wafer.
References Cited (Backward Citations)
US3801949A
Cited
US4472239A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-03-30 | 1990-09-29 | 1991-03-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-03-30 | 1994-09-29 | 1995-03-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-03-30 | 1998-09-29 | 1999-03-31 | $7700.00 | Window Closed / Lapsed |