US5627345A
Expired / Lapsed
US
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Multilevel interconnect structure
Assignee: Kawasaki Microelectronics Inc
•
Filing: 1994-02-18
•
Granted: 1997-05-06
•
Expires: 2014-02-18
Abstract
Abstract A multilevel interconnect structure for use in a semiconductor device includes a lower metal wiring having an aluminum or aluminum alloy film and a high melting point metal or high melting point metal alloy film. An interlayer insulating film is deposited on the lower metal wiring and a via hole is formed in the interlayer insulating film. A plug made of aluminum or aluminum alloy is formed in the via hole. An upper metal wiring has an aluminum or aluminum alloy film and a high melting point metal or high melting point metal alloy film. The plug directly contacts the aluminum or aluminum alloy film of at least one of the lower and upper metal wirings to decrease the via resistance without reducing the electromigration reliability.
Inventors
- 👤 Hiroshi Yamamoto
- 👤 Tomohiro Ohta
- 👤 Nobuyuki Takeyasu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 11:45
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/032; H10W20/038; H10W20/039; H10W20/063; H10W20/40; H10W20/41; H10W20/42; H10W20/425; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49124; Y10T29/49126; Y10T29/49155; Y10T29/49165
Claims Analysis
Total Claims: 93
Claim 1
Independent Claim
211 words
A multilevel interconnect structure formed on a surface of a substrate of a semiconductor device comprising: a lower metal wiring including one of an aluminum and an aluminum alloy film; an upper metal wiring including one of an aluminum and an aluminum alloy film; an interlayer insulating film formed between said lower and upper metal wirings such that the lower and upper metal wirings are electrically isolated from each other by said interlayer insulating film; a via hole formed in said interlayer insulating film such that the lower and upper metal wirings are communicated with each other by said via hole; and a plug made of one of aluminum and an aluminum alloy and formed in said via hole such that upper and lower ends of the plug contact the upper and lower metal wirings, respectively; wherein at least one of said lower and upper metal wirings further comprises one of a high melting point metal and a high melting point metal alloy film; and said plug contacts said at least one of the lower and upper metal wirings which comprises one of the high melting point metal and the high melting point metal alloy film by means of an interface including one of aluminum-aluminum, aluminum-aluminum alloy, and aluminum alloy-aluminum alloy.
Claim 2
Dependent Claim
211 words
A multilevel interconnect structure formed on a surface of a substrate of a semiconductor device comprising: a lower metal wiring including one of an aluminum and an aluminum alloy film; an upper metal wiring including one of an aluminum and an aluminum alloy film; an interlayer insulating film formed between said lower and upper metal wirings such that the lower and upper metal wirings are electrically isolated from each other by said interlayer insulating film; a via hole formed in said interlayer insulating film such that the lower and upper metal wirings are communicated with each other by said via hole; and a plug made of one of aluminum and an aluminum alloy and formed in said via hole such that upper and lower ends of the plug contact the upper and lower metal wirings, respectively; wherein at least one of said lower and upper metal wirings further comprises one of a high melting point metal and a high melting point metal alloy film; and said plug contacts said at least one of the lower and upper metal wirings which comprises one of the high melting point metal and the high melting point metal alloy film by means of an interface including one of aluminum-aluminum, aluminum-aluminum alloy, and aluminum alloy-aluminum alloy.
Claim 3
Dependent Claim
38 words
A structure according to claim 1, wherein said upper and lower ends of the plug contact the lower and upper metal wirings, respectively, by means of the interface including one of aluminum-aluminum, aluminum-aluminum alloy, and aluminum alloy-aluminum alloy.
Claim 4
Dependent Claim
26 words
A structure according to claim 2, wherein said lower metal wiring comprises one of the high melting point metal and the high melting metal alloy film.
Claim 5
Dependent Claim
57 words
A structure according to claim 3, wherein said lower metal wiring comprises one of the high melting point metal and the high melting point metal alloy film formed adjacent to the interlayer insulating film; and said lower end of the plug directly contacts one of the aluminum and the aluminum alloy film of the lower metal wiring.
Claim 6
Dependent Claim
29 words
A structure according to claim 1, wherein one of said high melting point metal and high melting point metal alloy film is formed adjacent to the interlayer insulating film.
Claim 7
Dependent Claim
50 words
A structure according to claim 5, wherein said lower metal wiring comprises one of the high melting point metal and the high melting point metal alloy film; and said lower end of the plug directly contacts one of the aluminum and the aluminum alloy film of the lower metal wiring.
Claim 8
Dependent Claim
57 words
A structure according to claim 5, wherein said upper metal wiring comprises one of the high melting point metal and the high melting point metal alloy film formed adjacent to the interlayer insulating film; and said upper end of the plug directly contacts one of the aluminum and the aluminum alloy film of the upper metal wiring.
Claim 9
Dependent Claim
32 words
A structure according to claim 5, wherein said plug contacts both of the lower and upper metal wirings by means of the interface one of aluminum-aluminum, aluminum-aluminum alloy, and aluminum alloy-aluminum alloy.
Claim 10
Dependent Claim
106 words
A structure according to claim 8, wherein said lower metal wiring comprises one of the high melting point metal and the high melting point metal alloy film formed adjacent to the interlayer insulating film; said lower end of the plug directly contacts one of the aluminum and the aluminum alloy film of the lower metal wiring; said upper metal wiring comprises one of the high melting point metal and the high melting point metal alloy film formed adjacent to the interlayer insulating film; and said upper end of the plug directly contacts one of the aluminum and the aluminum alloy film of the lower metal wiring.
Claim 11
Dependent Claim
32 words
A structure according to claim 1, wherein an inner wall of the via hole is covered with one of a high melting point metal and a high melting point metal alloy film.
Claim 12
Dependent Claim
38 words
A structure according to claim 1, further comprising an intralayer insulating film formed on the interlayer insulating film, wherein said intralayer insulating film has formed therein a recess and said upper metal wiring is provided in the recess.
Claim 13
Dependent Claim
101 words
A structure according to claim 1, wherein said upper metal wiring comprises one of the high melting point metal and the high melting point metal alloy film formed adjacent to the interlayer insulating film, and the upper end of the plug indirectly contacts one of the aluminum and the aluminum alloy film of the upper metal wiring; and said lower metal wiring comprises one of the high melting point metal and the high melting point metal alloy film, and the lower end of the plug directly contacts one of the aluminum and the aluminum alloy film of the lower metal wiring.
Claim 14
Dependent Claim
73 words
A structure according to claim 1, wherein said upper metal wiring comprises one of the high melting point metal and the high melting point metal alloy film formed adjacent to the interlayer insulating film; said lower end of the plug directly contacts one of the aluminum and the aluminum alloy film of the lower metal wiring; and said plug directly contact the interlayer insulating film at an inner will of the via hole.
Claim 15
Dependent Claim
20 words
A structure according to claim 13, wherein a diameter of the vial hole is not larger than about 0.5 μm.
Claim 16
Dependent Claim
29 words
A structure according to claim 14, wherein the inner wall of the via hole is formed substantially at a right angle with respect to the surface of the substrate.
Claim 17
Dependent Claim
115 words
A structure according to claim 1, wherein said upper metal wiring comprises one of the high melting point metal and the high melting point metal alloy film formed adjacent to the interlayer insulating film; said upper metal wiring comprises at least two adjacent lines; said interlayer insulating film comprises at least one silicon dioxide film, and the via hole is formed exclusively through said at least one silicon dioxide film; and said structure further comprising an intralayer insulating film formed between said at least two adjacent lines of the upper metal wiring, said intralayer insulating film comprising a low dielectric constant insulating film having a dielectric constant smaller than that of a silicon dioxide film.
Claim 18
Dependent Claim
29 words
A structure according to claim 16, wherein said upper end of the plug directly contacts one of the aluminum and the aluminum alloy film of the upper metal wiring.
Claim 19
Dependent Claim
25 words
A structure according to claim 16, wherein a portion of an upper surface of the upper metal wiring above the via hole is substantially flat.
Claim 20
Dependent Claim
26 words
A structure according to claim 16, wherein said intralayer insulating film has formed therein a recess and said upper metal wiring is provided in the recess.
Claim 21
Dependent Claim
31 words
A structure according to claim 16, wherein side walls of the adjacent lines of the upper metal wiring directly contact the low dielectric constant insulating film of the intralayer insulating film.
Claim 22
Dependent Claim
25 words
A structure according to claim 20, wherein a portion of an upper surface of the upper metal wiring above the via hole is substantially flat.
Claim 23
Dependent Claim
26 words
A structure according to claim 20, wherein said intralayer insulating film has formed therein a recess and said upper metal wiring is provided in the recess.
Claim 24
Dependent Claim
17 words
A structure according to claim 20, wherein said low dielectric constant insulating film is a polyimide film.
Claim 25
Dependent Claim
25 words
A structure according to claim 23, wherein a portion of an upper surface of the upper metal wiring above the via hole is substantially flat.
Claim 26
Dependent Claim
23 words
A structure according to claim 2, wherein said plug directly contacts the interlayer insulating film at an inner wall of the via hole.
Claim 27
Dependent Claim
20 words
A structure according to claim 25, wherein a diameter of the via hole is not larger than about 0.5 μm.
Claim 28
Dependent Claim
29 words
A structure according to claim 26, wherein the inner wall of the via hole is formed substantially at a right angle with respect to the surface of the substrate.
Claim 29
Dependent Claim
32 words
A structure according to claim 2, wherein an inner wall of the via hole is covered with one of a high melting point metal and the high melting point metal alloy film.
Claim 30
Dependent Claim
74 words
A structure according to claim 28, wherein said interlayer insulating film comprises a low dielectric constant insulating film having a dielectric constant lower than that of a silicon dioxide film; and said via hole is formed through said low dielectric constant insulating film, and said one of high melting point metal and high melting point metal alloy film on the inner wall of the via hole directly contacts the low dielectric constant insulating film.
Claim 31
Dependent Claim
25 words
A structure according to claim 29, wherein a portion of an upper surface of the upper metal wiring above the via hole is substantially flat.
Claim 32
Dependent Claim
26 words
A structure according to claim 2, wherein said interlayer insulating film has formed therein a recess and said upper metal wiring is provided in the recess.
Claim 33
Dependent Claim
45 words
A structure according to claim 31, wherein said upper metal wiring comprises one of the high melting point metal and the high melting point metal alloy film on side walls of one of the aluminum and the aluminum alloy film of the upper metal wiring.
Claim 34
Dependent Claim
26 words
A structure according to claim 3, wherein said interlayer insulating film has formed therein a recess and said upper metal wiring is provided in the recess.
Claim 35
Dependent Claim
45 words
A structure according to claim 33, wherein said upper metal wiring comprises one of the high melting point metal and the high melting point metal alloy film on side walls of one of the aluminum and the aluminum alloy film of the upper metal wiring.
Claim 36
Dependent Claim
23 words
A structure according to claim 4, wherein said plug directly contacts the interlayer insulating film at an inner wall of the via hole.
Claim 37
Dependent Claim
20 words
A structure according to claim 35, wherein a diameter of the via hole is not larger than about 0.5 μm.
Claim 38
Dependent Claim
29 words
A structure according to claim 36, wherein the inner wall of the via hole is formed substantially at a right angle with respect to the surface of the substrate.
Claim 39
Dependent Claim
47 words
A structure according to claim 4, wherein said lower metal wiring further comprises one of a high melting pint metal and a high melting point metal alloy film formed on side walls of one of the aluminum and the aluminum alloy film of the lower metal wiring.
Claim 40
Dependent Claim
32 words
A structure according to claim 38, wherein an inner wall of the via hole is covered with one of a high melting point metal and a high melting point metal alloy film.
Claim 41
Dependent Claim
94 words
A structure according to claim 39, wherein said one of high melting point metal and high melting point metal alloy film of the lower metal wiring formed adjacent to the interlayer insulating film, said one of high melting point metal and high melting point metal alloy film formed on the side walls of one of the aluminum and the aluminum alloy film of the lower metal wiring, and said one of high melting point metal and high melting point metal alloy film on the inner wall of the via hole constitute a single film.
Claim 42
Dependent Claim
32 words
A structure according to claim 4, wherein an inner wall of the via hole is covered with one of a high melting point metal and a high melting point metal alloy film.
Claim 43
Dependent Claim
25 words
A structure according to claim 41, wherein a portion of an upper surface of the upper metal wiring above the via hole is substantially flat.
Claim 44
Dependent Claim
74 words
A structure according to claim 41, wherein said interlayer insulating film comprises a low dielectric constant insulating film having a dielectric constant lower than that of a silicon dioxide film; and said via hole is formed through said low dielectric constant insulating film, and said one of high melting point metal and high melting point metal alloy film on the inner wall of the via hole directly contacts the low dielectric constant insulating film.
Claim 45
Dependent Claim
25 words
A structure according to claim 43, wherein a portion of an upper surface of the upper metal wiring above the via hole is substantially flat.
Claim 46
Dependent Claim
43 words
A structure according to claim 6, wherein said interlayer insulating film comprises a low dielectric constant insulating film having a dielectric constant lower than that of a silicon dioxide film; and said via hole is formed through said low dielectric constant insulating film.
Claim 47
Dependent Claim
25 words
A structure according to claim 45, wherein a portion of an upper surface of the upper metal wiring above the via hole is substantially flat.
Claim 48
Dependent Claim
25 words
A structure according to claim 45, wherein said plug directly contacts the low dielectric constant insulating film at an inner wall of the via hole.
Claim 49
Dependent Claim
62 words
A structure according to claim 6, wherein said upper metal wiring comprises one of the high melting point metal and the high melting point metal alloy film formed adjacent to the interlayer insulating film; and said upper end of the plug contacts the upper metal wiring partly by means of the interface of one of aluminum-aluminum, aluminum-aluminum alloy, and aluminum alloy-aluminum alloy.
Claim 50
Dependent Claim
23 words
A structure according to claim 48, wherein said plug directly contacts the interlayer insulating film at an inner wall of the via hole.
Claim 51
Dependent Claim
57 words
A structure according to claim 6, wherein said upper metal wiring comprises one of the high melting point metal and the high melting point metal alloy film formed adjacent to the interlayer insulating film; and said upper end of the plug indirectly contacts one of the aluminum and the aluminum alloy film of the upper metal wiring.
Claim 52
Dependent Claim
23 words
A structure according to claim 50, wherein said plug directly contacts the interlayer insulating film at an inner wall of the via hole.
Claim 53
Dependent Claim
56 words
A structure according to claim 7, wherein said lower metal wiring comprises one of the high melting point metal and the high melting point metal alloy film formed adjacent to the interlayer insulating film; and said lower end of the plug indirectly contacts one of aluminum and the aluminum alloy film of the lower metal wiring.
Claim 54
Dependent Claim
23 words
A structure according to claim 52, wherein said plug directly contacts the interlayer insulating film at an inner wall of the via hole.
Claim 55
Dependent Claim
33 words
A structure according to claim 7, wherein said upper end of the plug contacts the upper metal wiring partly by means of the interface of one of aluminum-aluminum, aluminum-aluminum alloy, and aluminum alloy-aluminum-alloy.
Claim 56
Dependent Claim
23 words
A structure according to claim 54, wherein said plug directly contacts the interlayer insulating film at an inner wall of the via hole.
Claim 57
Dependent Claim
23 words
A structure according to claim 7, wherein said plug directly contacts the interlayer insulating film at an inner wall of the via hole.
Claim 58
Dependent Claim
20 words
A structure according to claim 56, wherein a diameter of the via hole is not larger than about 0.5 μm.
Claim 59
Dependent Claim
29 words
A structure according to claim 57, wherein the inner wall of the via hole is formed substantially at a right angle with respect to the surface of the substrate.
Claim 60
Dependent Claim
25 words
A structure according to claim 7, wherein an inner wall of the via hole is covered with a plasma chemical vapor deposited silicon dioxide film.
Claim 61
Dependent Claim
21 words
A structure according to claim 59, wherein a portion of the upper metal wiring above the via hole is substantially flat.
Claim 62
Dependent Claim
29 words
A structure according to claim 60, wherein said inner wall of the via hole is formed substantially at a right angle with respect to the surface of the substrate.
Claim 63
Dependent Claim
62 words
A structure according to claim 8, wherein said upper metal wiring comprises one of the high melting point metal and the high melting point metal alloy film formed adjacent to the interlayer insulating film; and said upper end of the plug contacts the upper metal wiring partly by means of the interface of one of aluminum-aluminum, aluminum-aluminum alloy, and aluminum alloy-aluminum alloy.
Claim 64
Dependent Claim
23 words
A structure according to claim 62, wherein said plug directly contacts the interlayer insulating film at an inner wall of the via hole.
Claim 65
Dependent Claim
34 words
A structure according to claim 9, wherein said lower end of the plug contacts the lower metal wiring exclusively by means of the interface of one of aluminum-aluminum, aluminum-aluminum alloy, and aluminum alloy-aluminum alloy.
Claim 66
Dependent Claim
20 words
A structure according to claim 64, wherein a diameter of the via hole is not larger than about 0.5 μm.
Claim 67
Dependent Claim
29 words
A structure according to claim 65, wherein the inner wall of the via hole is formed substantially at a right angle with respect to the surface of the substrate.
Claim 68
Dependent Claim
34 words
A structure according to claim 64, wherein said upper end of the plug contacts the upper metal wiring partly by means of the interface of one of aluminum-aluminum, aluminum-aluminum alloy, and aluminum alloy-aluminum alloy.
Claim 69
Dependent Claim
23 words
A structure according to claim 67, wherein said plug directly contacts the interlayer insulating film at an inner wall of the via hole.
Claim 70
Dependent Claim
23 words
A structure according to claim 9, wherein said plug directly contacts the interlayer insulating film at an inner wall of the via hole.
Claim 71
Dependent Claim
20 words
A structure according to claim 69, wherein a diameter of the via hole is not larger than about 0.5 μm.
Claim 72
Dependent Claim
29 words
A structure according to claim 70, wherein the inner wall of the via hole is formed substantially at a right angle with respect to the surface of the substrate.
Claim 73
Dependent Claim
43 words
A structure according to claim 10, wherein said interlayer insulating film comprises a low dielectric constant insulating film having a dielectric constant lower than that of a silicon dioxide film, and said via hole is formed through said low dielectric constant insulating film.
Claim 74
Dependent Claim
25 words
A structure according to claim 72, wherein a portion of an upper surface of the upper metal wiring above the via hole is substantially flat.
Claim 75
Dependent Claim
37 words
A structure according to claim 72, wherein said one of high melting point metal and high melting point metal alloy film on the inner wall of the via hole directly contacts the low dielectric constant insulating film.
Claim 76
Dependent Claim
25 words
A structure according to claim 74, wherein a portion of an upper surface of the upper metal wiring above the via hole is substantially flat.
Claim 77
Dependent Claim
29 words
A structure according to claim 75, wherein the inner wall of the via hole is formed substantially at a right angle with respect to the surface of the substrate.
Claim 78
Dependent Claim
17 words
A structure according to claim 74, wherein said low dielectric constant insulating film is a polyimide film.
Claim 79
Dependent Claim
25 words
A structure according to claim 77, wherein a portion of an upper surface of the upper metal wiring above the via hole is substantially flat.
Claim 80
Dependent Claim
29 words
A structure according to claim 78, wherein the inner wall of the via hole is formed substantially at a right angle with respect to the surface of the substrate.
Claim 81
Dependent Claim
71 words
A structure according to claim 77, wherein said lower metal wiring comprises one of the high melting point metal and the high melting point metal alloy film formed adjacent to the interlayer insulating film, and further comprising one of a high-melting point metal and a high melting point metal alloy film formed on side walls of one of the aluminum film and the aluminum alloy film of the lower metal wiring.
Claim 82
Dependent Claim
97 words
A structure according to claim 80, wherein said one of high melting point metal and high melting point metal alloy film on the inner wall of the via hole, said one of high melting point metal and high melting point metal alloy film of the lower metal wiring formed adjacent to the interlayer insulating film, and said one of high melting point metal and high melting point metal alloy film formed on side walls of one of the aluminum and the aluminum alloy film of the lower metal wiring directly contact the low dielectric constant insulating film.
Claim 83
Dependent Claim
93 words
A structure according to claim 80, wherein said one of high melting point metal and high melting point metal alloy film on the inner wall of the via hole, said one of high melting point metal and high melting point metal alloy film of the lower metal wiring formed adjacent to the interlayer insulating film, and said one of high melting point metal and high melting point metal alloy film formed on side walls of one of the aluminum and the aluminum alloy film of the lower metal wiring constitute a single film.
Claim 84
Dependent Claim
28 words
A structure according to claim 80, wherein said lower end of the plug directly contacts one of the aluminum and aluminum alloy film of the lower metal wiring.
Claim 85
Dependent Claim
21 words
A structure according to claim 11, wherein said intralayer insulating film is formed as a part of the interlayer insulating film.
Claim 86
Dependent Claim
22 words
A structure according to claim 11, wherein said intralayer insulating film is formed as a different film from the interlayer insulating film.
Claim 87
Dependent Claim
23 words
A structure according to claim 84, wherein said plug directly contacts the interlayer insulating film at an inner wall of the via hole.
Claim 88
Dependent Claim
20 words
A structure according to claim 86, wherein a diameter of the via hole is not larger than about 0.5 μm.
Claim 89
Dependent Claim
29 words
A structure according to claim 87, wherein the inner wall of the via hole is formed substantially at a right angle with respect to the surface of the substrate.
Claim 90
Dependent Claim
63 words
A structure according to claim 84, wherein said plug directly contacts the interlayer insulating film at an inner wall of the via hole; and said upper metal wiring comprises one of the high melting point metal and the high melting point metal alloy film formed on side walls of one of the aluminum and the aluminum alloy film of the upper metal wiring.
Claim 91
Dependent Claim
57 words
A structure according to claim 85, wherein said upper metal wiring comprises one of the high melting point metal and the high melting point metal alloy film formed adjacent to the interlayer insulating film; and said upper end of the plug indirectly contacts one of the aluminum and the aluminum alloy film of the upper metal wiring.
Claim 92
Dependent Claim
57 words
A structure according to claim 85, wherein said upper metal wiring comprises one of the high melting point metal and the high melting point metal alloy film formed adjacent to the interlayer insulating film; and said upper end of the plug directly contacts one of the aluminum and the aluminum alloy film of the upper metal wiring.
Claim 93
Dependent Claim
34 words
A structure according to claim 91, wherein said upper end of the plug contacts the upper metal wiring partly by means of the interface of one of aluminum-aluminum, aluminum-aluminum alloy, and aluminum alloy-aluminum alloy.
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