Patent US5556482A successfully refreshed from Google Patents.
US5556482A
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Method of stripping photoresist with composition containing inhibitor
Assignee: Air Products and Chemicals Inc
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Filing: 1995-07-11
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Granted: 1996-09-17
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Expires: 2015-07-11
Abstract
Abstract Organic stripping composition for photoresists comprising organic polar solvents and basic amines which includes an inhibitor which forms a coordination complex with a metal.
Inventors
- 👤 Irl E. Ward
- 👤 Francis W. Michelotti
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 21:46
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/26; G03F7/42; G03F7/422; G03F7/425; C; C09; C09D; C09D9/00; C09D9/005; C23; C23F; C23F11/00; C23F11/08; C23F11/10; C23G; C23G1/00; C23G1/14; C23G1/16; C23G1/18
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
80 words
In a process of stripping comprising the steps of applying a stripping composition containing an organic polar solvent and a basic amine to a substrate having a photoresist coating and removing said stripping composition and said photoresist coating from said substrate, the improvement wherein said composition is an admixture which further contains an effective inhibiting amount of the formula: ##STR6## wherein G is hydrogen and A and B are hydroxyl, and said polar solvent and said basic amine are different.
Claim 2
Dependent Claim
80 words
In a process of stripping comprising the steps of applying a stripping composition containing an organic polar solvent and a basic amine to a substrate having a photoresist coating and removing said stripping composition and said photoresist coating from said substrate, the improvement wherein said composition is an admixture which further contains an effective inhibiting amount of the formula: ##STR6## wherein G is hydrogen and A and B are hydroxyl, and said polar solvent and said basic amine are different.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-09-17 | 2000-03-18 | 2000-09-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-09-17 | 2004-03-18 | 2004-09-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-09-17 | 2008-03-18 | 2008-09-17 | $7700.00 | Window Closed / Lapsed |