US5496491A
Expired / Lapsed
US
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Organic stripping composition
Assignee: Ashland LLC
•
Filing: 1995-05-22
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Granted: 1996-03-05
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Expires: 2015-05-22
Abstract
Abstract Organic stripping composition for photoresists comprising organic polar solvents and basic amines which includes an inhibitor which forms a coordination complex with a metal.
Inventors
- 👤 Irl E. Ward
- 👤 Francis W. Michelotti
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 21:25
CPC Classifications
C; C09; C09D; C09D9/00; C09D9/005; G; G03; G03F; G03F7/00; G03F7/26; G03F7/42; G03F7/422; G03F7/425
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
122 words
In a stripping composition for photoresists wherein said stripping composition comprises an organic polar solvent and a basic amine, the improvement which comprises that said composition contains about 0.5 to 10% by weight of an inhibitor which is the dissolved salt reaction product of an alkanolamine and a reactant selected from the formula consisting of: ##STR6## wherein X represents C, O, N, or S, Y represents C, O, N, or S, R represents --OH, --NR"R", --SR", --NO, NO 2 or ##STR7## z is 0 or 1; R' represents --OH, --NR"R", --SR", --NO, NO 2 or ##STR8## G represents H, --OH and CO 2 R", lower alkyl or halo, R" represents H or lower alkyl, and R'" represents lower alkyl or lower alkoxy.
Claim 2
Dependent Claim
122 words
In a stripping composition for photoresists wherein said stripping composition comprises an organic polar solvent and a basic amine, the improvement which comprises that said composition contains about 0.5 to 10% by weight of an inhibitor which is the dissolved salt reaction product of an alkanolamine and a reactant selected from the formula consisting of: ##STR6## wherein X represents C, O, N, or S, Y represents C, O, N, or S, R represents --OH, --NR"R", --SR", --NO, NO 2 or ##STR7## z is 0 or 1; R' represents --OH, --NR"R", --SR", --NO, NO 2 or ##STR8## G represents H, --OH and CO 2 R", lower alkyl or halo, R" represents H or lower alkyl, and R'" represents lower alkyl or lower alkoxy.
Claim 3
Dependent Claim
22 words
The composition of claim 1 wherein said reactant is selected from the group consisting of: 8-amino-4H-chromene, 8-amino-4H-1-benzofuran, 1-hydroxy-8-dialkylaminonaphthalene anthranilic acid and, 1-hydroxy-8-dimethylaminonaphthalene.
Claim 4
Dependent Claim
25 words
The composition of claim 1 wherein said reactant is selected from the group consisting of: 8-hydroxy-4H-1-benzothiopyran, 8-hydroxy-4H-1-benzothiofuran, 8-methylthiochroman, 8-ditertbutylamino chromene, 1-tertbutoxy-8-nitronaphthalene, 8-alkylketoquinoline, 8-sulfhydrylquinoline, and 8-nitrosoquinoline.
Claim 5
Dependent Claim
7 words
The composition of claim 1 including water.
Claim 6
Dependent Claim
8 words
The composition of claim 1 which is non-aqueous.
Claim 7
Dependent Claim
16 words
The composition of claim 1 comprising about 50 to 98% by weight of said polar solvent.
Claim 8
Dependent Claim
15 words
The composition of claim 1 comprising about 1 to 49% by weight of said amine.
Claim 9
Dependent Claim
75 words
The composition of claim 1 wherein said organic polar solvent comprises an amide compound of the formula: ##STR9## and mixture thereof, wherein R is selected from the group consisting of hydrogen, lower alkyl and phenyl; R 1 and R 2 are selected from the group consisting of hydrogen and lower alkyl; and R and R 1 together with the keto and nitrogen group to which they are attached form a five or six membered ring.
Claim 10
Dependent Claim
27 words
The composition of claim 8 wherein said amide is selected from the group consisting of N, N-dimethyl acetamide, N-methyl acetamide, N, N-diethylacetamide, N, N-dimethylpropronamide, Nmethylpyrrolidinone, and N-ethyl-2-pyrrolidinone.
Claim 11
Dependent Claim
75 words
The composition of claim 1 wherein said amine comprises a compound of the formula: ##STR10## wherein R 3 is selected from the group consisting of --OH, --C 2 H 5 , --C 2 H 4 OH and --CH 2 CH(OH)CH 3 , R 4 is selected from the group consisting of hydrogen, alkanol and phenyl, and R 5 is selected from the group consisting of hydrogen, lower alkyl, alkanol and --C 2 H 4 OH.
Claim 12
Dependent Claim
27 words
The composition of claim 10 wherein said amine is selected from the group consisting of monoethanolamine, N-methyl aminoethanol, methylethylamine, morpholine, 1-amino-2-propanol, 2-(2-aminoethoxyethanol), 3-methoxypropylamine, 2-amino-picoline and bis (2-ethylhexyl)amine.
Claim 13
Dependent Claim
42 words
A process for removing a coating from a coated substrate comprising applying to said coated substrate a stripping effective amount of a stripping composition of claim 1, for a stripping effective period of time, and then removing the coating from the substrate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-03-05 | 1999-09-04 | 2000-03-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-03-05 | 2003-09-04 | 2004-03-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-03-05 | 2007-09-04 | 2008-03-05 | $7700.00 | Window Closed / Lapsed |