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US5496491A Expired / Lapsed US ⏱️ 0.0 years remaining

Organic stripping composition

Assignee: Ashland LLC
•
Filing: 1995-05-22
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Granted: 1996-03-05
•
Expires: 2015-05-22
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Abstract

Abstract Organic stripping composition for photoresists comprising organic polar solvents and basic amines which includes an inhibitor which forms a coordination complex with a metal.

Inventors

  • 👤 Irl E. Ward
  • 👤 Francis W. Michelotti

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-09 21:33
CPC Classifications
C; C09; C09D; C09D9/00; C09D9/005; G; G03; G03F; G03F7/00; G03F7/26; G03F7/42; G03F7/422; G03F7/425

Claims Analysis

Total Claims: 13
Claim 1
Independent Claim 122 words
In a stripping composition for photoresists wherein said stripping composition comprises an organic polar solvent and a basic amine, the improvement which comprises that said composition contains about 0.5 to 10% by weight of an inhibitor which is the dissolved salt reaction product of an alkanolamine and a reactant selected from the formula consisting of: ##STR6## wherein X represents C, O, N, or S, Y represents C, O, N, or S, R represents --OH, --NR"R", --SR", --NO, NO 2 or ##STR7## z is 0 or 1; R' represents --OH, --NR"R", --SR", --NO, NO 2 or ##STR8## G represents H, --OH and CO 2 R", lower alkyl or halo, R" represents H or lower alkyl, and R'" represents lower alkyl or lower alkoxy.
Claim 2
Dependent Claim 122 words
In a stripping composition for photoresists wherein said stripping composition comprises an organic polar solvent and a basic amine, the improvement which comprises that said composition contains about 0.5 to 10% by weight of an inhibitor which is the dissolved salt reaction product of an alkanolamine and a reactant selected from the formula consisting of: ##STR6## wherein X represents C, O, N, or S, Y represents C, O, N, or S, R represents --OH, --NR"R", --SR", --NO, NO 2 or ##STR7## z is 0 or 1; R' represents --OH, --NR"R", --SR", --NO, NO 2 or ##STR8## G represents H, --OH and CO 2 R", lower alkyl or halo, R" represents H or lower alkyl, and R'" represents lower alkyl or lower alkoxy.
Claim 3
Dependent Claim 22 words
The composition of claim 1 wherein said reactant is selected from the group consisting of: 8-amino-4H-chromene, 8-amino-4H-1-benzofuran, 1-hydroxy-8-dialkylaminonaphthalene anthranilic acid and, 1-hydroxy-8-dimethylaminonaphthalene.
Claim 4
Dependent Claim 25 words
The composition of claim 1 wherein said reactant is selected from the group consisting of: 8-hydroxy-4H-1-benzothiopyran, 8-hydroxy-4H-1-benzothiofuran, 8-methylthiochroman, 8-ditertbutylamino chromene, 1-tertbutoxy-8-nitronaphthalene, 8-alkylketoquinoline, 8-sulfhydrylquinoline, and 8-nitrosoquinoline.
Claim 5
Dependent Claim 7 words
The composition of claim 1 including water.
Claim 6
Dependent Claim 8 words
The composition of claim 1 which is non-aqueous.
Claim 7
Dependent Claim 16 words
The composition of claim 1 comprising about 50 to 98% by weight of said polar solvent.
Claim 8
Dependent Claim 15 words
The composition of claim 1 comprising about 1 to 49% by weight of said amine.
Claim 9
Dependent Claim 75 words
The composition of claim 1 wherein said organic polar solvent comprises an amide compound of the formula: ##STR9## and mixture thereof, wherein R is selected from the group consisting of hydrogen, lower alkyl and phenyl; R 1 and R 2 are selected from the group consisting of hydrogen and lower alkyl; and R and R 1 together with the keto and nitrogen group to which they are attached form a five or six membered ring.
Claim 10
Dependent Claim 27 words
The composition of claim 8 wherein said amide is selected from the group consisting of N, N-dimethyl acetamide, N-methyl acetamide, N, N-diethylacetamide, N, N-dimethylpropronamide, Nmethylpyrrolidinone, and N-ethyl-2-pyrrolidinone.
Claim 11
Dependent Claim 75 words
The composition of claim 1 wherein said amine comprises a compound of the formula: ##STR10## wherein R 3 is selected from the group consisting of --OH, --C 2 H 5 , --C 2 H 4 OH and --CH 2 CH(OH)CH 3 , R 4 is selected from the group consisting of hydrogen, alkanol and phenyl, and R 5 is selected from the group consisting of hydrogen, lower alkyl, alkanol and --C 2 H 4 OH.
Claim 12
Dependent Claim 27 words
The composition of claim 10 wherein said amine is selected from the group consisting of monoethanolamine, N-methyl aminoethanol, methylethylamine, morpholine, 1-amino-2-propanol, 2-(2-aminoethoxyethanol), 3-methoxypropylamine, 2-amino-picoline and bis (2-ethylhexyl)amine.
Claim 13
Dependent Claim 42 words
A process for removing a coating from a coated substrate comprising applying to said coated substrate a stripping effective amount of a stripping composition of claim 1, for a stripping effective period of time, and then removing the coating from the substrate.

References Cited (Backward Citations)

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US4539230A Cited
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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1999-03-05 1999-09-04 2000-03-05 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2003-03-05 2003-09-04 2004-03-05 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2007-03-05 2007-09-04 2008-03-05 $7700.00 Window Closed / Lapsed

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