US5488350A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Diamond film structures and methods related to same
Assignee: Michigan State University
•
Filing: 1994-01-07
•
Granted: 1996-01-30
•
Expires: 2014-01-07
Abstract
Abstract Novel structures are provided including laminated layers of the diamond film in different patterns for conducting, generating and/or absorbing thermal energy. In particular, a thermal sensor/heater is shown including a doped electrically conductive diamond film layer encapsulated by layers of undoped electrically insulative layers on a silicon wafer. Also, a GaAs/Si on diamond laminate structure is provided in which the diamond film acts as a substrate and a heat sink. Notably, the diamond film structures are characterized by their high thermal conductivity, high chemical resistance, and high hardness/wear resistance due to the properties of the diamond films.
Inventors
- 👤 Mohammad Aslam
- 👤 James V. Beck
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 04:05
CPC Classifications
H; H01; H01C; H01C7/00; H01C7/04; H01C7/042; H01C7/048; H10; H10W; H10W40/00; H10W40/20; H10W40/25; H10W40/254
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
119 words
A method of heating and sensing temperature comprising steps of: providing a substrate including a surface and a temperature-sensitive structure attached to said surface, said temperature-sensitive structure including an electrically conductive diamond film having an electrical resistivity that characteristically changes in response to temperature change; applying an electrical source having a voltage to said temperature-sensitive structure in order to induce a current through said conductive diamond film to thereby heat said temperature-sensitive structure and the substrate surface to an elevated operating temperature; and determining one of an actual temperature and a relative temperature change based on said characteristic electrical resistivity of said conductive diamond film by sensing a change in one or both of said voltage and said current.
Claim 2
Independent Claim
119 words
A method of heating and sensing temperature comprising steps of: providing a substrate including a surface and a temperature-sensitive structure attached to said surface, said temperature-sensitive structure including an electrically conductive diamond film having an electrical resistivity that characteristically changes in response to temperature change; applying an electrical source having a voltage to said temperature-sensitive structure in order to induce a current through said conductive diamond film to thereby heat said temperature-sensitive structure and the substrate surface to an elevated operating temperature; and determining one of an actual temperature and a relative temperature change based on said characteristic electrical resistivity of said conductive diamond film by sensing a change in one or both of said voltage and said current.
Claim 3
Dependent Claim
40 words
A method as defined in claim 1 wherein said temperature-sensitive structure includes a second diamond film that is electrically non-conductive for communicating thermal energy across said substrate to provide a substantially uniform temperature over the area of said temperature-sensitive structure.
Claim 4
Dependent Claim
21 words
A method as defined in claim 1 including a step of embedding said diamond film in said surface of said substrate.
Claim 5
Dependent Claim
21 words
A method as defined in claim 1 including it step of forming said diamond film on said surface of said substrate.
Claim 6
Dependent Claim
43 words
A method as defined in claim 1 including steps of providing a controller operably connected to said electrical source for controlling the current induced in the step of applying an electrical source when heating said structure and surface to the elevated operating temperature.
Claim 7
Independent Claim
61 words
A method of heating and sensing temperature comprising steps of: heating a substrate to an elevated operating temperature by applying an electrical source having a voltage to an electrically conductive doped diamond film positioned on a surface of the substrate; and determining the temperature of the substrate at the surface by measuring a voltage differential across the conductive doped diamond film.
Claim 8
Independent Claim
61 words
A method of heating and sensing temperature comprising steps of: heating a substrate to an elevated operating temperature by applying an electrical source having a voltage to an electrically conductive doped diamond film positioned on a surface of the substrate; and determining the temperature of the substrate at the surface by measuring a voltage differential across the conductive doped diamond film.
Claim 9
Dependent Claim
21 words
A method as defined in claim 6 wherein the steps of heating the substrate and determining the temperature are conducted sequentially.
Claim 10
Dependent Claim
29 words
A method as defined in claim 7 including repeating the steps of heating the substrate and determining the temperature, until a stable operating temperature is achieved on the surface.
Claim 11
Dependent Claim
29 words
A method as defined in claim 8 including a step of applying the conductive doped diamond film to a selected area of the substrate surface in a predetermined pattern.
Claim 12
Dependent Claim
16 words
A method as defined in claim 6 wherein the operating temperature approaches 600° C. or greater.
Claim 13
Independent Claim
128 words
A method of heating and sensing temperature comprising steps of: applying an electrically conductive doped diamond film to an area of a substrate surface that requires heating to a predetermined minimum elevated operating temperature before use, the conductive doped diamond film defining a predetermined pattern and area configured to uniformly heat the area; heating the selected area of the substrate surface to a substantially elevated and stable operating temperature by applying an electrical source having a voltage to the electrically conductive doped diamond film; thereafter determining the temperature of the substrate at the surface by measuring a voltage differential across the conductive doped diamond film; and repeating the steps of heating and determining temperature at least once and until the elevated operating temperature is reached and has stabilized.
Claim 14
Independent Claim
128 words
A method of heating and sensing temperature comprising steps of: applying an electrically conductive doped diamond film to an area of a substrate surface that requires heating to a predetermined minimum elevated operating temperature before use, the conductive doped diamond film defining a predetermined pattern and area configured to uniformly heat the area; heating the selected area of the substrate surface to a substantially elevated and stable operating temperature by applying an electrical source having a voltage to the electrically conductive doped diamond film; thereafter determining the temperature of the substrate at the surface by measuring a voltage differential across the conductive doped diamond film; and repeating the steps of heating and determining temperature at least once and until the elevated operating temperature is reached and has stabilized.
References Cited (Backward Citations)
US3433684A
Cited
US4808009A
Cited
US4806900A
Cited
US4863529A
Cited
US5271971A
Cited
US4826784A
Cited
US5131963A
Cited
US4925701A
Cited
US5006203A
Cited
US4919974A
Cited
US5190823A
Cited
US5089802A
Cited
US5317302A
Cited
US5183530A
Cited
US5144380A
Cited
US5066938A
Cited
US5107317A
Cited
US5082359A
Cited
US5110577A
Cited
US5290592A
Cited
US5075094A
Cited
US5114696A
Cited
US5082522A
Cited
US5186973A
Cited
US5204210A
Cited
US5173761A
Cited
US5260141A
Cited
US5309000A
Cited
US5298286A
Cited
US5308661A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-01-29 | 1999-07-31 | 2000-01-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-01-29 | 2003-07-31 | 2004-01-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-01-29 | 2007-07-31 | 2008-01-30 | $7700.00 | Window Closed / Lapsed |