US5006203A
Expired / Lapsed
US
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Diamond growth method
Assignee: Raytheon Co
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Filing: 1988-08-12
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Granted: 1991-04-09
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Expires: 2008-08-12
Abstract
Abstract Preferred embodiments first adjust reactor conditions to grow a diamondlike film (114) on a silicon substrate (102). Reactor conditions are then adjusted to etch the diamondlike film surface, providing a high density of diamond nucleation sites (108). Finally, the reactor conditions are adjusted to grow a uniform diamond film (116) on the conditioned diamondlike surface.
Inventors
- 👤 Andrew J. Purdes
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 14:58
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/26; C23C16/27; C23C16/271; C04; C04B; C04B41/00; C04B41/45; C04B41/50; C04B41/5001; C04B41/5002; C23C16/02; C23C16/0272; C30; C30B; C30B25/00; C30B25/02; C30B29/00; C30B29/02; C30B29/04; H; H10; H10P; H10P14/00; H10P14/20; H10P14/24; H10P14/29; H10P14/2901; H10P14/2902; H10P14/2905; H10P14/2922; H10P14/32; H10P14/3202; H10P14/3204; H10P14/3206; H10P14/34; H10P14/3402; H10P14/3404; H10P14/3406; H10P14/36; H10P14/38; Y; Y10; Y10S; Y10S427/00; Y10S427/103
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
34 words
A method of diamond film formation on a body, comprising the steps of: (a) forming a film of diamondlike material on a body; and (b) forming a film of diamond on said diamondlike material.
Claim 2
Independent Claim
34 words
A method of diamond film formation on a body, comprising the steps of: (a) forming a film of diamondlike material on a body; and (b) forming a film of diamond on said diamondlike material.
Claim 3
Dependent Claim
45 words
The method of claim 1, comprising the further step of: (a) after forming said film of diamondlike material of step (a) but prior to forming said film of diamond on said diamondlike material of step (b), etching said film of diamondlike material with atomic hydrogen.
Claim 4
Dependent Claim
21 words
The method of claim 2, wherein: (a) said forming of said diamond material is by pyrolysis of carbon-bearing material plus hydrogen.
Claim 5
Dependent Claim
21 words
The method of claim 2, wherein: (a) said forming of said diamondlike material is by pyrolysis of carbon-bearing material plus hydrogen.
Claim 6
Dependent Claim
24 words
The method of claim 1, further comprising the step of: (a) prior to step (a), abrading a surface of said body with diamond grit.
Claim 7
Dependent Claim
11 words
The method of claim 1, wherein: (a) said body is silicon.
Claim 8
Dependent Claim
40 words
A diamond film growth method, comprising the steps of: (a) growing a film of diamondlike material; (b) selectively removing graphitic-bonded material from a surface of said film of diamondlike material; and (c) growing a film of diamond on said surface.
Claim 9
Dependent Claim
40 words
A diamond film growth method, comprising the steps of: (a) growing a film of diamondlike material; (b) selectively removing graphitic-bonded material from a surface of said film of diamondlike material; and (c) growing a film of diamond on said surface.
Claim 10
Dependent Claim
16 words
The method of claim 7, wherein: (a) said selective removal is by etching with atomic hydrogen.
Claim 11
Dependent Claim
39 words
The method of claim 7, wherein: (a) said growing a film of diamondlike material is by pyrolysis of carbon-bearing material plus hydrogen; and (b) said growing a film of diamond material is by pyrolysis of carbon-bearing material plus hydrogen.
References Cited (Backward Citations)
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| 3.5 Years (Year 4) | 1994-04-08 | 1994-10-08 | 1995-04-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-04-08 | 1998-10-08 | 1999-04-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-04-08 | 2002-10-08 | 2003-04-09 | $7700.00 | Window Closed / Lapsed |