US5298286A
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US
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Method for fabricating diamond films on nondiamond substrates and related structures
Assignee: North Carolina State University
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Filing: 1992-11-09
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Granted: 1994-03-29
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Expires: 2012-11-09
Abstract
Abstract A method for making an oriented diamond film includes the steps of seeding a face of a nondiamond substrate with diamond particles, and orienting the diamond particles with respect to the substrate by heating the seeded substrate to a predetermined temperature and for a predetermined time to dissolve portions of the diamond particles into the substrate while suppressing graphite formation. Diamond may then be deposited onto the oriented diamond particles by CVD techniques to thereby form an oriented diamond film on the nondiamond substrate. The nondiamond substrate is preferably a single crystal transition metal capable of dissolving carbon. The transition metal is preferably selected from the group consisting of nickel, cobalt, chromium, magnesium, iron, and alloys thereof. For nickel as the substrate material, the temperature for orientation of the diamond particles is preferably about 1200° C., for a time period in the range of about 1 to 15 minutes, and, more preferably, about 1 to 5 minutes. Structures produced by the method are also disclosed and include the absence of a graphite layer between the diamond and the nondiamond substrate.
Inventors
- 👤 Peichun Yang
- 👤 Wei Zhu
- 👤 Jeffrey T. Glass
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 21:39
CPC Classifications
C; C30; C30B; C30B25/00; C30B25/02; C30B25/18; C23; C23C; C23C16/00; C23C16/02; C23C16/0209; C23C16/0272; C23C16/22; C23C16/26; C23C16/27; C30B29/00; C30B29/02; C30B29/04; Y; Y10; Y10T; Y10T428/00; Y10T428/24; Y10T428/24942; Y10T428/25; Y10T428/30; Y10T428/31504; Y10T428/31678
Claims Analysis
Total Claims: 54
Claim 1
Independent Claim
101 words
A method for forming an oriented diamond film on a nondiamond substrate, the method comprising steps of: providing a nondiamond substrate comprising a transition metal capable of dissolving carbon; forming a plurality of diamond seeds on a face of the substrate; heating the seeded substrate to a sufficient temperature and for a sufficient time period to dissolve portions of the diamond seeds into the face of the substrate and orient the diamond seeds with respect to the substrate while suppressing graphite formation; and depositing diamond onto the thus oriented diamond seeds to form an oriented diamond film on the nondiamond substrate.
Claim 2
Independent Claim
101 words
A method for forming an oriented diamond film on a nondiamond substrate, the method comprising steps of: providing a nondiamond substrate comprising a transition metal capable of dissolving carbon; forming a plurality of diamond seeds on a face of the substrate; heating the seeded substrate to a sufficient temperature and for a sufficient time period to dissolve portions of the diamond seeds into the face of the substrate and orient the diamond seeds with respect to the substrate while suppressing graphite formation; and depositing diamond onto the thus oriented diamond seeds to form an oriented diamond film on the nondiamond substrate.
Claim 3
Dependent Claim
26 words
A method according to claim 1 wherein the substrate transition metal is selected from the group consisting of nickel, cobalt, chromium, magnesium, iron, and alloys thereof.
Claim 4
Dependent Claim
23 words
A method according to claim 1 wherein the substrate transition metal is selected from the group consisting of nickel, cobalt, and alloys thereof.
Claim 5
Dependent Claim
40 words
A method according to claim 1 wherein the step of depositing diamond comprises exposing the substrate to a carbon and hydrogen containing gas while maintaining the substrate at a temperature to form a liquid metal-carbon-hydrogen layer on the diamond seeds.
Claim 6
Dependent Claim
43 words
A method according to claim 4 wherein the step of exposing the substrate to a carbon and hydrogen containing gas comprises exposing the substrate to the methane and hydrogen gas mixture including methane in the range of about 0.1 to 1.5% by mass.
Claim 7
Dependent Claim
38 words
A method according to claim 4 wherein the step of exposing the substrate to a carbon and hydrogen containing gas comprises exposing the substrate to same at a pressure in the range of about 10 to 150 Torr.
Claim 8
Dependent Claim
16 words
A method according to claim 1 wherein the nondiamond substrate is a single crystal nondiamond substrate.
Claim 9
Dependent Claim
27 words
A method according to claim 7 further comprising the step of continuing to deposit diamond onto the oriented diamond film to form a single crystal diamond film.
Claim 10
Dependent Claim
38 words
A method according to claim 7 wherein the single crystal nondiamond substrate is a single crystal nondiamond substrate having a low index plane oriented face selected from the group consisting of {100}, {111}, {120}, {112}, {114}, and {221}.
Claim 11
Dependent Claim
24 words
A method according to claim 1 wherein the predetermined time for heating the substrate is in the range of about 1 to 15 minutes.
Claim 12
Dependent Claim
24 words
A method according to claim 1 wherein the predetermined time for heating the substrate is in the range of about 1 to 5 minutes.
Claim 13
Dependent Claim
34 words
A method according to claim 1 wherein the step of forming the plurality of diamond seeds comprises depositing diamond particles not greater than about 6 μm in diameter on the face of the substrate.
Claim 14
Dependent Claim
30 words
A method according to claim 1 wherein the step of forming the plurality of diamond seeds comprises nucleating a plurality of diamond seeds on the face of the nondiamond substrate.
Claim 15
Dependent Claim
28 words
A method according to claim 1 further comprising the step of annealing the substrate after forming the plurality of diamond seeds and prior to orienting the diamond seeds.
Claim 16
Dependent Claim
37 words
A method according to claim 13 wherein the step of annealing the substrate comprises the step of heating the substrate at a temperature in the range of about 600° to 1000° C. in a hydrogen containing gas.
Claim 17
Dependent Claim
15 words
A method according to claim 1 wherein the nondiamond substrate is a polycrystalline nondiamond substrate.
Claim 18
Independent Claim
143 words
A method for forming a single crystal diamond film on a nondiamond substrate, the method comprising the steps of: providing a single crystal nondiamond substrate comprising a transition metal capable of dissolving carbon; forming a plurality of diamond seeds on a face of the substrate; orienting the diamond seeds with respect to the substrate by heating the seeded substrate to a predetermined temperature and for a predetermined time to dissolve portions of the diamond particles into the substrate while suppressing graphite formation; and heating the seeded substrate to a sufficient temperature and for a sufficient time period to dissolve portions of the diamond seeds into the face of the substrate and orient the diamond seeds with respect to the substrate while suppressing graphite formation; and depositing diamond onto the thus oriented diamond particles to form an oriented diamond film on the nondiamond substrate.
Claim 19
Independent Claim
143 words
A method for forming a single crystal diamond film on a nondiamond substrate, the method comprising the steps of: providing a single crystal nondiamond substrate comprising a transition metal capable of dissolving carbon; forming a plurality of diamond seeds on a face of the substrate; orienting the diamond seeds with respect to the substrate by heating the seeded substrate to a predetermined temperature and for a predetermined time to dissolve portions of the diamond particles into the substrate while suppressing graphite formation; and heating the seeded substrate to a sufficient temperature and for a sufficient time period to dissolve portions of the diamond seeds into the face of the substrate and orient the diamond seeds with respect to the substrate while suppressing graphite formation; and depositing diamond onto the thus oriented diamond particles to form an oriented diamond film on the nondiamond substrate.
Claim 20
Dependent Claim
23 words
A method according to claim 17 wherein the substrate transition metal is selected from the group consisting of nickel, cobalt, and alloys thereof.
Claim 21
Dependent Claim
40 words
A method according to claim 17 wherein the step of depositing diamond comprises exposing the substrate to a carbon and hydrogen containing gas while maintaining the substrate at a temperature to form a liquid metal-carbon-hydrogen layer on the diamond seeds.
Claim 22
Dependent Claim
42 words
A method according to claim 19 wherein the step of exposing the substrate to a carbon and hydrogen containing gas comprises exposing the substrate to a methane and hydrogen gas mixture including methane in the range of about 0.1to 1.5% by mass.
Claim 23
Dependent Claim
39 words
A method according to claim 19 wherein the step of exposing the substrate to a carbon and hydrogen containing gas comprises exposing the substrate to the gas at a pressure in the range of about 10 to 150 Torr.
Claim 24
Dependent Claim
39 words
A method according to claim 17 wherein the single crystal nondiamond substrate is a single crystal nondiamond substrate having a low index plane oriented face selected from the group consisting of {100}, {110}, {111}, {120}, {112}, {114}, and {221}.
Claim 25
Dependent Claim
24 words
A method according to claim 17 wherein the predetermined time for heating the substrate is in the range of about 1 to 15 minutes.
Claim 26
Dependent Claim
24 words
A method according to claim 17 wherein the predetermined time for heating the substrate is in the range of about 1 to 5 minutes.
Claim 27
Dependent Claim
34 words
A method according to claim 17 wherein the step of forming the plurality of diamond seeds comprises depositing diamond particles not greater than about 6 μm in diameter on the face of the substrate.
Claim 28
Dependent Claim
30 words
A method according to claim 17 wherein the step of forming the plurality of diamond seeds comprises nucleating a plurality of diamond seeds on the face of the nondiamond substrate.
Claim 29
Dependent Claim
28 words
A method according to claim 17 further comprising the step of annealing the substrate after forming the plurality of diamond seeds and prior to orienting the diamond seeds.
Claim 30
Dependent Claim
36 words
A method according to claim 27 wherein the step of annealing the substrate comprises the step of heating same at a temperature in the range of about 600° to 1000° C. in a hydrogen containing gas.
Claim 31
Independent Claim
73 words
A method for forming a diamond film on a nondiamond substrate, the method comprising the steps of: providing a nondiamond substrate comprising a transition metal capable of dissolving carbon; forming a plurality of diamond seeds on a face of the substrate; and heating the seeded substrate to a sufficient temperature and for a sufficient time period to dissolve portions of the diamond seeds into the face of the substrate while suppressing graphite formation.
Claim 32
Independent Claim
73 words
A method for forming a diamond film on a nondiamond substrate, the method comprising the steps of: providing a nondiamond substrate comprising a transition metal capable of dissolving carbon; forming a plurality of diamond seeds on a face of the substrate; and heating the seeded substrate to a sufficient temperature and for a sufficient time period to dissolve portions of the diamond seeds into the face of the substrate while suppressing graphite formation.
Claim 33
Dependent Claim
26 words
A method according to claim 29 wherein the substrate transition metal is selected from the group consisting of nickel, cobalt, chromium, magnesium, iron, and alloys thereof.
Claim 34
Dependent Claim
18 words
A method according to claim 29 further comprising the step of depositing diamond onto the thus seeded substrate.
Claim 35
Dependent Claim
40 words
A method according to claim 31 wherein the step of depositing diamond comprises exposing the substrate to a carbon and hydrogen containing gas while maintaining the substrate at a temperature to form a liquid metal-carbon-hydrogen layer on the diamond seeds.
Claim 36
Dependent Claim
43 words
A method according to claim 31 wherein the step of exposing the substrate to a carbon and hydrogen containing gas comprises exposing the substrate to the methane and hydrogen gas mixture including methane in the range of about 0.1 to 1.5% by mass.
Claim 37
Dependent Claim
38 words
A method according to claim 31 wherein the step of exposing the substrate to a carbon and hydrogen containing gas comprises exposing the substrate to same at a pressure in the range of about 10 to 150 Torr.
Claim 38
Dependent Claim
24 words
A method according to claim 29 wherein the predetermined time for heating the substrate is in the range of about 1 to 15 minutes.
Claim 39
Dependent Claim
24 words
A method according to claim 29 wherein the predetermined time for heating the substrate is in the range of about 1 to 5 minutes.
Claim 40
Dependent Claim
34 words
A method according to claim 29 wherein the step of forming the plurality of diamond seeds comprises depositing diamond particles not greater than about 6 μm in diameter on the face of the substrate.
Claim 41
Dependent Claim
30 words
A method according to claim 29 wherein the step of forming a plurality of diamond seeds comprises nucleating a plurality of diamond seeds on the face of the nondiamond substrate.
Claim 42
Dependent Claim
28 words
A method according to claim 29 further comprising the step of annealing the substrate after forming the plurality of diamond seeds and prior to orienting the diamond seeds.
Claim 43
Independent Claim
121 words
A method for forming an oriented diamond film on a nickel substrate, the method comprising the steps of: forming a plurality of diamond seeds on a face of the nickel substrate; orienting the diamond seeds with respect to the nickel substrate by heating the seeded nickel substrate to a temperature in the range of about 1100° to 1300° C. and for a time period in the range of about 1 to 15 minutes to dissolve portions of the diamond seeds into the face of the nickel substrate and orient the diamond seeds with respect to the nickel substrate while suppressing graphite formation; and depositing diamond onto the thus oriented diamond particles to form an oriented diamond film on the nickel substrate.
Claim 44
Independent Claim
121 words
A method for forming an oriented diamond film on a nickel substrate, the method comprising the steps of: forming a plurality of diamond seeds on a face of the nickel substrate; orienting the diamond seeds with respect to the nickel substrate by heating the seeded nickel substrate to a temperature in the range of about 1100° to 1300° C. and for a time period in the range of about 1 to 15 minutes to dissolve portions of the diamond seeds into the face of the nickel substrate and orient the diamond seeds with respect to the nickel substrate while suppressing graphite formation; and depositing diamond onto the thus oriented diamond particles to form an oriented diamond film on the nickel substrate.
Claim 45
Dependent Claim
40 words
A method according to claim 40 wherein the step of depositing diamond comprises exposing the substrate to a carbon and hydrogen containing gas while maintaining the substrate at a temperature to form a liquid nickel-carbon-hydrogen layer on the diamond seeds.
Claim 46
Dependent Claim
43 words
A method according to claim 40 wherein the step of exposing the substrate to a carbon and hydrogen containing gas comprises exposing the substrate to a methane and hydrogen gas mixture including methane in the range of about 0.1 to 1.5% by mass.
Claim 47
Dependent Claim
39 words
A method according to claim 41 wherein the step of exposing the substrate to a carbon and hydrogen containing gas comprises exposing the substrate to the gas at a pressure in the range of about 10 to 150 Torr.
Claim 48
Dependent Claim
14 words
A method according to claim 40 wherein the nondiamond substrate is single crystal nickel.
Claim 49
Dependent Claim
27 words
A method according to claim 44 further comprising the step of continuing to deposit diamond onto the oriented diamond film to form a single crystal diamond film.
Claim 50
Dependent Claim
24 words
A method according to claim 40 wherein the predetermined time for heating the substrate is in the range of about 1 to 15 minutes.
Claim 51
Dependent Claim
24 words
A method according to claim 40 wherein the predetermined time for heating the substrate is in the range of about 1 to 5 minutes.
Claim 52
Dependent Claim
28 words
A method according to claim 40 further comprising the step of annealing the substrate after forming the plurality of diamond seeds and prior to orienting the diamond seeds.
Claim 53
Dependent Claim
36 words
A method according to claim 48 wherein the step of annealing the substrate comprises the step of heating same at a temperature in the range of about 600° to 1000° C. in a hydrogen containing gas.
Claim 54
Dependent Claim
15 words
A method according to claim 40 wherein the nondiamond substrate is a polycrystalline nickel substrate.
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