US5082359A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Diamond films and method of growing diamond films on nondiamond substrates
Assignee: TEL Epion Inc
•
Filing: 1989-11-28
•
Granted: 1992-01-21
•
Expires: 2009-11-28
Abstract
Abstract A method of forming a polycrystalline film, such as a diamond, on a foreign substrate involves preparing the substrate before film deposition to define discrete nucleation sites. The substrate is prepared for film deposition by forming a pattern of irregularities in the surface thereof. The irregularities, typically craters, are arranged in a predetermined pattern which corresponds to that desired for the location of film crystals. The craters preferrably are of uniform, predetermined dimensions (in the sub-micron and micron size range) and are uniformly spaced apart by a predetermined distance. The craters may be formed by a number of techniques, including focused ion beam milling, laser vaporization, and chemical or plasma etching using a patterned photoresist. Once the substrate has been prepared the film may be deposited by a number of known techniques. Films prepared by this method are characterized by a regular surface pattern of crystals which may be arranged in virtually any desired pattern. Diamond film materials made by this technique may be used in many electrical, optical, thermal and other applications.
Inventors
- 👤 Allen R. Kirkpatrick
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 03:36
CPC Classifications
G02B1/105; C; C23; C23C; C23C16/00; C23C16/02; C23C16/0227; C23C16/0254; C23C16/0263; C23C16/0272; C23C16/22; C23C16/26; C23C16/27; C23C16/271; C30; C30B; C30B25/00; C30B25/02; C30B25/18; C30B29/00; C30B29/02; C30B29/04; G; G02; G02B; G02B1/00; G02B1/10; G02B1/14; Y; Y10; Y10T; Y10T428/00; Y10T428/30
Claims Analysis
Total Claims: 37
Claim 1
Independent Claim
73 words
A method of forming a diamond film on a nondiamond substrate, comprising the steps of: preparing a surface of a substrate for diamond film deposition by introducing to the surface of the substrate a plurality of minute surface irregularities in a predetermined pattern; applying at least one diamond seed particle within the irregularities, the seed particles having dimensions smaller than the irregularities; and depositing a diamond film on the surface of the substrate.
Claim 2
Independent Claim
73 words
A method of forming a diamond film on a nondiamond substrate, comprising the steps of: preparing a surface of a substrate for diamond film deposition by introducing to the surface of the substrate a plurality of minute surface irregularities in a predetermined pattern; applying at least one diamond seed particle within the irregularities, the seed particles having dimensions smaller than the irregularities; and depositing a diamond film on the surface of the substrate.
Claim 3
Dependent Claim
11 words
The method of claim 1 wherein the diamond film is polycrystalline.
Claim 4
Dependent Claim
11 words
The method of claim 2 wherein the surface irregularities are craters.
Claim 5
Dependent Claim
24 words
The method of claim 3 wherein the diamond film is comprised of crystals arranged in a predetermined pattern substantially corresponding to the cratering pattern.
Claim 6
Dependent Claim
15 words
The method of claim 4 wherein the diamond crystals coalesce to form a continuous film.
Claim 7
Dependent Claim
20 words
The method of claim 4 wherein the diamond film comprises a non-continuous film formed by a plurality of discrete crystals.
Claim 8
Dependent Claim
14 words
The method of claim 1 wherein the substrate is a single crystal silicon wafer.
Claim 9
Dependent Claim
15 words
The method of claim 3 wherein the craters are formed by focused ion beam milling.
Claim 10
Dependent Claim
13 words
The method of claim 3 wherein the craters are formed by laser vaporization.
Claim 11
Dependent Claim
19 words
The method of claim 3 wherein the craters are formed by chemical or plasma etching using a patterned photoresist.
Claim 12
Dependent Claim
18 words
The method of claim 3 wherein the craters range in diameter from about 0.05 to about 10 μm.
Claim 13
Dependent Claim
30 words
The method of claim 3 wherein the craters are formed in the substrate at a density ranging from about 10 4 to about 10 10 craters per cm 2 .
Claim 14
Dependent Claim
38 words
The method of claim 3 wherein the craters are seeded by applying to the cratered surface of the substrate a liquid within which is suspended fine diamond seed particles ranging in size from about 0.001 to 0.5 μm.
Claim 15
Dependent Claim
22 words
The method of claim 13 where in the diamond seed particles are selected from the group consisting of natural and synthetic diamond.
Claim 16
Dependent Claim
20 words
The method of claim 13 wherein the liquid is selected from the group consisting of alcohols, soaps, oils and water.
Claim 17
Dependent Claim
12 words
The method of claim 13 wherein the liquid is an aqueous solution.
Claim 18
Dependent Claim
18 words
The method of claim 1 wherein the diamond film is deposited using a filament-assisted chemical vapor deposition technique.
Claim 19
Dependent Claim
35 words
The method of claim 1 wherein the step of applying a diamond seed to the irregularities further includes the step of applying to the irregularity-containing substrate surface a liquid having dispersed therein fine diamond particles.
Claim 20
Dependent Claim
16 words
The method of claim 18 further including the step of removing liquid from the substrate surface.
Claim 21
Dependent Claim
28 words
The method of claim 18 further including the step of removing any excess of diamond particles which are not disposed in irregularities from the surface of the substrate.
Claim 22
Independent Claim
86 words
A method of forming a polycrystalline film on a foreign substrate, comprising the steps of: preparing a surface of a substrate for film deposition by introducing in the surface of the substrate a plurality of surface irregularities in a predetermined pattern; seeding the surface irregularities with a fine film precursor material to define film growth initiation sites, said film precursor material being identical to the film and having dimensions sufficiently small to fit within the irregularities; and depositing a film on the surface of the substrate.
Claim 23
Independent Claim
86 words
A method of forming a polycrystalline film on a foreign substrate, comprising the steps of: preparing a surface of a substrate for film deposition by introducing in the surface of the substrate a plurality of surface irregularities in a predetermined pattern; seeding the surface irregularities with a fine film precursor material to define film growth initiation sites, said film precursor material being identical to the film and having dimensions sufficiently small to fit within the irregularities; and depositing a film on the surface of the substrate.
Claim 24
Dependent Claim
96 words
A diamond-coated product comprising a substrate and a synthetic, polycrystalline diamond coating formed by a plurality of individual diamond crystals secured to at least a portion of the substrate, wherein the crystals which comprise the film are present on the substrate at a density ranging from about 10 4 to about 10 10 crystals per square centimeter and said crystals are formed on the substrate by creating a predetermined pattern of irregularities in the surface of the substrate, seeding the irregularities with a diamond seed material, and growing diamond crystals from the seed material by deposition.
Claim 25
Dependent Claim
96 words
A diamond-coated product comprising a substrate and a synthetic, polycrystalline diamond coating formed by a plurality of individual diamond crystals secured to at least a portion of the substrate, wherein the crystals which comprise the film are present on the substrate at a density ranging from about 10 4 to about 10 10 crystals per square centimeter and said crystals are formed on the substrate by creating a predetermined pattern of irregularities in the surface of the substrate, seeding the irregularities with a diamond seed material, and growing diamond crystals from the seed material by deposition.
Claim 26
Dependent Claim
19 words
The diamond film of claim 22 wherein the crystals range in size from about 0.1 to about 100 μm.
Claim 27
Dependent Claim
31 words
The diamond film of claim 23 wherein the crystals are discrete and are spaced apart from each other by a distance ranging from about less than 0.1 to about 100 μm.
Claim 28
Dependent Claim
23 words
The diamond film of claim 23 wherein the crystals coalesce to form a continuous film with a regular structure substantially free of voids.
Claim 29
Dependent Claim
13 words
The product of claim 22 wherein the substrate is an electrically conductive substrate.
Claim 30
Dependent Claim
13 words
The product of claim 22 wherein the substrate is an electrically insulating substrate.
Claim 31
Dependent Claim
13 words
The product of claim 22 wherein the substrate is a semiconductor material substrate.
Claim 32
Dependent Claim
11 words
The product of claim 22 wherein the substrate comprises a tool.
Claim 33
Dependent Claim
12 words
The product of claim 22 wherein the substrate is a transparent substrate.
Claim 34
Independent Claim
72 words
A method of forming a diamond lens product, comprising the steps of: preparing a surface of a substrate for diamond film deposition by introducing into the surface of the substrate a plurality of minute surface irregularities in a predetermined pattern; applying at least one diamond seed particle within the irregularities, the seed particles having dimensions smaller than the irregularities; and depositing an optical quality diamond film on the surface of the substrate.
Claim 35
Independent Claim
72 words
A method of forming a diamond lens product, comprising the steps of: preparing a surface of a substrate for diamond film deposition by introducing into the surface of the substrate a plurality of minute surface irregularities in a predetermined pattern; applying at least one diamond seed particle within the irregularities, the seed particles having dimensions smaller than the irregularities; and depositing an optical quality diamond film on the surface of the substrate.
Claim 36
Dependent Claim
17 words
The method of claim 31 further comprising the step of separating the diamond film from the substrate.
Claim 37
Dependent Claim
12 words
A diamond lens product prepared according to the method of claim 31.
References Cited (Backward Citations)
US4412980A
Cited
US4767517A
Cited
US4632817A
Cited
US4734339A
Cited
US4490229A
Cited
JPS61121859A
Cited
US4822466A
Cited
JPS6418991A
Cited
US4816291A
Cited
JPH01203293A
Cited
US4925701A
Cited
US4884785A
Cited
US4919974A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-01-20 | 1995-07-22 | 1996-01-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-01-20 | 1999-07-22 | 2000-01-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-01-20 | 2003-07-22 | 2004-01-21 | $7700.00 | Window Closed / Lapsed |