US5204210A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for the direct patterning of diamond films
Assignee: Xerox Corp
•
Filing: 1990-12-07
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Granted: 1993-04-20
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Expires: 2010-12-07
Abstract
Abstract A method of forming a patterned, poly-crystalline diamond film on a substrate is disclosed. First, a photoresist layer is applied to a substrate. A diamond powder layer is formed on the photoresist layer either through spray-coating, dip-coating, spin-coating using a diamond-powder suspension, and the like. The photoresist layer is exposed to electromagnetic radiation through a mask either before or after the diamond powder layer is applied. Then, the photoresist layer is developed, after which the substrate is heated causing the photoresist layer to carbonize. The substrate is exposed to a mixture of hydrogen-containing and carbon-containing gases which are decomposed in a processing apparatus. Hydrogen in this gas mixture etches away at the carbonized photoresist layer leaving behind the patterned diamond powder layer. Carbon in these carbon-containing gases combines with the diamond particles in the diamond powder layer to form diamond structures on the substrate.
Inventors
- 👤 Frank Jansen
- 👤 Mary A. Machonkin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 05:45
CPC Classifications
C; C23; C23C; C23C8/00; C23C8/02; C23C8/06; C23C8/08; C23C8/20; C23C8/22; G; G03; G03F; G03F7/00; G03F7/004; G03F7/0047
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
141 words
A method of forming a patterned, poly-crystalline diamond film on a substrate, comprising: applying to a substrate a photoresist layer; applying to said photoresist layer a diamond powder layer, said diamond powder layer including diamond particles; exposing said photoresist layer and said diamond powder layer to electromagnetic radiation through a mask; developing said photoresist layer sufficiently to form a developed photoresist layer; heating the substrate, developed photoresist layer, and diamond powder layer in a processing apparatus, said heating step causing said developed photoresist layer to carbonize; introducing a mixture of gases into said apparatus, said mixture of gases including carbon-containing and hydrogen-containing gases; and decomposing said mixture of gases in said apparatus, whereby hydrogen in said hydrogen-containing gases remove said carbonized photoresist layer, and whereby carbon in said carbon-containing gases combines with said diamond particles forming diamond structures on said substrate.
Claim 2
Independent Claim
141 words
A method of forming a patterned, poly-crystalline diamond film on a substrate, comprising: applying to a substrate a photoresist layer; applying to said photoresist layer a diamond powder layer, said diamond powder layer including diamond particles; exposing said photoresist layer and said diamond powder layer to electromagnetic radiation through a mask; developing said photoresist layer sufficiently to form a developed photoresist layer; heating the substrate, developed photoresist layer, and diamond powder layer in a processing apparatus, said heating step causing said developed photoresist layer to carbonize; introducing a mixture of gases into said apparatus, said mixture of gases including carbon-containing and hydrogen-containing gases; and decomposing said mixture of gases in said apparatus, whereby hydrogen in said hydrogen-containing gases remove said carbonized photoresist layer, and whereby carbon in said carbon-containing gases combines with said diamond particles forming diamond structures on said substrate.
Claim 3
Independent Claim
24 words
The method of claim wherein in said applying a diamond powder layer step, diamond powder is applied from a suspension thereof by spin coating.
Claim 4
Dependent Claim
25 words
The method of claim 1 wherein in said applying a diamond powder layer step, diamond powder is applied from a suspension thereof by dip coating.
Claim 5
Dependent Claim
25 words
The method of claim 1 wherein in said applying a diamond powder layer step, diamond powder is applied from a suspension thereof by spray coating.
Claim 6
Dependent Claim
16 words
The method of claim 1 wherein in said exposing step, said electromagnetic radiation is Ultra-Violet light.
Claim 7
Dependent Claim
47 words
The method of claim 1 wherein in said applying a diamond powder layer step, diamond particles are applied to the substrate in an amount of from about one to ten particles per square micron with an average particle diameter of from about 0.01 to about 0.4 microns.
Claim 8
Independent Claim
12 words
The method of claim wherein said processing apparatus is a deposition chamber.
Claim 9
Dependent Claim
12 words
The method of claim 1 wherein said hydrogen-containing gas is diatomic hydrogen.
Claim 10
Dependent Claim
24 words
The method of claim 1 wherein in said heating step, the substrate is heated to a temperature from about 400° to about 900° C.
Claim 11
Dependent Claim
20 words
The method of claim 1 wherein the thickness of said diamond structures is from about 0.1 to about 1000 microns.
Claim 12
Dependent Claim
31 words
The method of claim 1 wherein in said introducing a mixture step, said mixture of gases includes carbon-containing gases in a concentration from about 0.1 to about 3 percent by volume.
Claim 13
Independent Claim
134 words
A method of forming a patterned, poly-crystalline diamond film on a substrate, comprising: applying to a substrate a photoresist layer; exposing said photoresist layer to electromagnetic radiation through a mask; applying to said photoresist layer a diamond powder layer, said diamond powder layer including diamond particles; developing said photoresist layer sufficiently to form a developed photoresist layer; heating the substrate, developed photoresist layer, and diamond powder layer in a processing apparatus, said heating step causing said developed photoresist layer to carbonize; introducing a mixture of gases into said apparatus, said mixture of gases including carbon-containing and hydrogen-containing gases; and decomposing said mixture of gases in said apparatus, whereby said hydrogen-containing gases remove said carbonized photoresist layer, and whereby carbon in said carbon-containing gases combines with said diamond particles forming diamond structures on said substrate.
Claim 14
Independent Claim
134 words
A method of forming a patterned, poly-crystalline diamond film on a substrate, comprising: applying to a substrate a photoresist layer; exposing said photoresist layer to electromagnetic radiation through a mask; applying to said photoresist layer a diamond powder layer, said diamond powder layer including diamond particles; developing said photoresist layer sufficiently to form a developed photoresist layer; heating the substrate, developed photoresist layer, and diamond powder layer in a processing apparatus, said heating step causing said developed photoresist layer to carbonize; introducing a mixture of gases into said apparatus, said mixture of gases including carbon-containing and hydrogen-containing gases; and decomposing said mixture of gases in said apparatus, whereby said hydrogen-containing gases remove said carbonized photoresist layer, and whereby carbon in said carbon-containing gases combines with said diamond particles forming diamond structures on said substrate.
Claim 15
Dependent Claim
25 words
The method of claim 12 wherein in said applying a diamond powder layer step, diamond powder is applied from a suspension thereof by spin coating.
Claim 16
Dependent Claim
25 words
The method of claim 12 wherein in said applying a diamond powder layer step, diamond powder is applied from a suspension thereof by dip coating.
Claim 17
Dependent Claim
25 words
The method of claim 12 wherein in said applying a diamond powder layer step, diamond powder is applied from a suspension thereof by spray coating.
Claim 18
Dependent Claim
16 words
The method of claim 12 wherein in said exposing step, said electromagnetic radiation is Ultra-Violet light.
Claim 19
Dependent Claim
47 words
The method of claim 12 wherein in said applying a diamond powder layer step, diamond particles are applied to the substrate in an amount of from about one to ten particles per square micron with an average particle diameter of from about 0.01 to about 0.4 microns.
Claim 20
Dependent Claim
13 words
The method of claim 12 wherein said processing apparatus is a deposition chamber.
Claim 21
Dependent Claim
12 words
The method of claim 12 wherein said hydrogen-containing gas is diatomic hydrogen.
Claim 22
Dependent Claim
24 words
The method of claim 12 wherein in said heating step, the substrate is heated to a temperature from about 400° to about 900° C.
Claim 23
Dependent Claim
20 words
The method of claim 12 wherein the thickness of said diamond structures is from about 0.1 to about 1000 microns.
Claim 24
Independent Claim
112 words
A method of forming a continuous, poly-crystalline diamond film on a substrate, comprising: applying to a substrate a photoresist layer; applying to said photoresist layer a diamond powder layer, said diamond powder layer including diamond particles; heating the substrate, photoresist layer, and diamond powder layer in a processing apparatus, said heating step causing said photoresist layer to carbonize; introducing a mixture of gases into said apparatus, said mixture of gases including carbon-containing and hydrogen-containing gases; and decomposing said mixture of gases in said apparatus, whereby said hydrogen-containing gases remove said carbonized photoresist layer, and whereby carbon in said carbon-containing gases combines with said diamond particles forming a diamond film on said substrate.
Claim 25
Independent Claim
112 words
A method of forming a continuous, poly-crystalline diamond film on a substrate, comprising: applying to a substrate a photoresist layer; applying to said photoresist layer a diamond powder layer, said diamond powder layer including diamond particles; heating the substrate, photoresist layer, and diamond powder layer in a processing apparatus, said heating step causing said photoresist layer to carbonize; introducing a mixture of gases into said apparatus, said mixture of gases including carbon-containing and hydrogen-containing gases; and decomposing said mixture of gases in said apparatus, whereby said hydrogen-containing gases remove said carbonized photoresist layer, and whereby carbon in said carbon-containing gases combines with said diamond particles forming a diamond film on said substrate.
Claim 26
Independent Claim
149 words
A method of forming a patterned, poly-crystalline diamond film on a substrate, comprising: applying a photoresist layer to a silicon substrate; applying to said photoresist layer a diamond powder layer, said diamond powder layer formed from diamond particles having an average diameter of 0.1 microns; exposing said photoresist layer and diamond powder layer to Ultra-Violet light through a mask; developing said photoresist layer sufficiently to form a developed photoresist layer; heating the substrate, developed photoresist layer, and diamond powder layer in a deposition chamber, said heating step causing said developed photoresist layer to carbonize; introducing a mixture of gases into said chamber, said mixture of gases including a diatomic hydrogen gas and a hydrocarbon gas; and decomposing said mixture of gases in said chamber, whereby hydrogen removes said carbonized photoresist layer, and whereby carbon in said hydrocarbon gas combines with said diamond particles forming diamond structures on said substrate.
Claim 27
Independent Claim
149 words
A method of forming a patterned, poly-crystalline diamond film on a substrate, comprising: applying a photoresist layer to a silicon substrate; applying to said photoresist layer a diamond powder layer, said diamond powder layer formed from diamond particles having an average diameter of 0.1 microns; exposing said photoresist layer and diamond powder layer to Ultra-Violet light through a mask; developing said photoresist layer sufficiently to form a developed photoresist layer; heating the substrate, developed photoresist layer, and diamond powder layer in a deposition chamber, said heating step causing said developed photoresist layer to carbonize; introducing a mixture of gases into said chamber, said mixture of gases including a diatomic hydrogen gas and a hydrocarbon gas; and decomposing said mixture of gases in said chamber, whereby hydrogen removes said carbonized photoresist layer, and whereby carbon in said hydrocarbon gas combines with said diamond particles forming diamond structures on said substrate.
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