US5474808A
Expired / Lapsed
US
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Method of seeding diamond
Assignee: POLARMETRICS Inc
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Filing: 1994-01-07
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Granted: 1995-12-12
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Expires: 2014-01-07
Abstract
Abstract Methods for seeding and growing diamond films on planar and non-planar surfaced substrates and also for patterning the diamond films include mixing submicron diameter diamond particles and binder particles in carriers such as photoresist or water, and applying the mixture to a substrate surface. Treatment of the substrate by chemical vapor deposition then removes the carrier and grows the dispersed diamond particles into a diamond film. Notably, diamond particles having an average size of 25 nanometers form a particularly desirable mixture since the particles do not tend to settle out of the mixture, and also since these particles result in smooth diamond films. The mixtures can be applied onto non-planar surfaces by spraying, dipping, or dispensing and jet writing, and can be applied to planar and non-planar surfaces as a complete coating, as a line, or as a pattern. Patterning of the mixture, either when applying the mixture to a substrate or after applying the mixture, allows the formation of novel structures.
Inventors
- 👤 Mohammad Aslam
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 23:41
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/04; C23C16/02; C23C16/0272; C23C16/22; C23C16/26; C23C16/27
Claims Analysis
Total Claims: 39
Claim 1
Independent Claim
60 words
A method of seeding for diamond film growth on a non-diamond substrate having a surface, comprising: providing a mixture including a photoresist, binder particles and an amount of diamond particles uniformly distributed in said photoresist; and applying said mixture in a line onto said non-diamond substrate surface, said line having a width not exceeding a width of about 7.5 microns.
Claim 2
Independent Claim
60 words
A method of seeding for diamond film growth on a non-diamond substrate having a surface, comprising: providing a mixture including a photoresist, binder particles and an amount of diamond particles uniformly distributed in said photoresist; and applying said mixture in a line onto said non-diamond substrate surface, said line having a width not exceeding a width of about 7.5 microns.
Claim 3
Dependent Claim
23 words
A method as defined in claim 1 including selecting diamond particles having an average particle diameter of not greater than about 0.1 microns.
Claim 4
Dependent Claim
23 words
A method as defined in claim 2 including selecting diamond particles having an average particle diameter of not greater than about 25 nanometers.
Claim 5
Dependent Claim
22 words
A method as defined in claim 1 including growing a diamond film from said diamond particles by a chemical vapor deposition process.
Claim 6
Dependent Claim
20 words
A method as defined in claim 1 wherein the step of providing binder particles includes providing a powder of Ti.
Claim 7
Dependent Claim
34 words
A method as defined in claim 1 including providing a second photoresist, mixing said binder particles with said second photoresist to form a second mixture, and applying said second mixture to said substrate surface.
Claim 8
Dependent Claim
29 words
A method as defined in claim 1 including a step of selectively removing said photoresist by photolithography to leave a pattern of said diamond particles on said substrate surface.
Claim 9
Dependent Claim
32 words
A method as defined in claim 1 including providing an ultrasonic nozzle spray device, and wherein the step of applying said mixture includes spraying said mixture with said ultrasonic nozzle spray device.
Claim 10
Dependent Claim
31 words
A method as defined in claim 1 wherein the step of applying said mixture includes dispensing said mixture in a pattern having a particular configuration for use in a micro circuit.
Claim 11
Dependent Claim
32 words
A method as defined in claim 9 wherein the step of dispensing includes providing an applicator and utilizing said applicator to apply a non-linear line of said mixture onto said substrate surface.
Claim 12
Dependent Claim
26 words
A method as defined in claim 9 wherein said step of applying includes forming a line having a width of not greater than about 30 microns.
Claim 13
Dependent Claim
14 words
A method as defined in claim 9 wherein said pattern includes a serpentine line.
Claim 14
Independent Claim
59 words
A method of seeding for diamond film growth, comprising: providing a photoresist; providing a supply of diamond particles; providing a supply of binder particles for promoting adhesion of diamond film to a substrate surface; ultrasonically mixing said diamond particles and said binder particles with said photoresist to form a uniform mixture; and applying said mixture to said substrate surface.
Claim 15
Independent Claim
59 words
A method of seeding for diamond film growth, comprising: providing a photoresist; providing a supply of diamond particles; providing a supply of binder particles for promoting adhesion of diamond film to a substrate surface; ultrasonically mixing said diamond particles and said binder particles with said photoresist to form a uniform mixture; and applying said mixture to said substrate surface.
Claim 16
Dependent Claim
16 words
A method as defined in claim 13 including selectively removing said photoresist to leave a pattern.
Claim 17
Dependent Claim
13 words
A method as defined in claim 13 wherein said binder particles include Ti.
Claim 18
Dependent Claim
26 words
A method as defined in claim 13 wherein said binder particles have an average particle size in the range of not greater than about 0.1 micron.
Claim 19
Independent Claim
51 words
A method comprising: providing a mixture of diamond particles, binder particles and a photoresist; providing an applicator configured to apply said mixture in a line; and applying said mixture in a line to a substrate surface by use of said applicator, said line having a width not exceeding about 75 microns.
Claim 20
Independent Claim
51 words
A method comprising: providing a mixture of diamond particles, binder particles and a photoresist; providing an applicator configured to apply said mixture in a line; and applying said mixture in a line to a substrate surface by use of said applicator, said line having a width not exceeding about 75 microns.
Claim 21
Dependent Claim
29 words
A method as defined in claim 17 wherein said step of applying includes dispensing said mixture in a line having a width of not greater than about 30 microns.
Claim 22
Dependent Claim
25 words
A method as defined in claim 18 including dispensing said mixture in a fine line having a width of not greater than about 3 microns.
Claim 23
Dependent Claim
32 words
A method as defined in claim 17 including drawing a pattern with said applicator and growing a diamond film in shape of said pattern by use of a chemical vapor deposition process.
Claim 24
Dependent Claim
27 words
A method as defined in claim 20 including applying said mixture in a second pattern by use of the applicator, said first and second patterns partially overlapping.
Claim 25
Dependent Claim
23 words
A method as defined in claim 17 wherein the step of applying includes spraying said material from said applicator onto said substrate surface.
Claim 26
Dependent Claim
26 words
A method as defined in claim 17 wherein said step of applying includes flowing said mixture in a stream from said applicator onto said substrate surface.
Claim 27
Dependent Claim
34 words
A method as defined in claim 17 including providing a positioning device attached to said applicator, and including controllingly moving said applicator by said positioning device to draw a pattern onto said substrate surface.
Claim 28
Dependent Claim
20 words
A method as defined in claim 24 wherein the step of applying includes applying said mixture in a serpentine pattern.
Claim 29
Dependent Claim
46 words
A method as defined in claim 17 including providing a positioning device and a controller operably connected to said positioning device for controlling said positioning device, and including the step of programming said controller to control the position of said applicator during the step of applying.
Claim 30
Independent Claim
48 words
A method of seeding for diamond film growth on a non-diamond substrate having a surface, comprising steps of: mixing diamond particles, binder particles and photoresist to form a uniform mixture; and spraying the mixture of diamond particles, binder particles and photoresist onto the surface of the non-diamond substrate.
Claim 31
Independent Claim
48 words
A method of seeding for diamond film growth on a non-diamond substrate having a surface, comprising steps of: mixing diamond particles, binder particles and photoresist to form a uniform mixture; and spraying the mixture of diamond particles, binder particles and photoresist onto the surface of the non-diamond substrate.
Claim 32
Dependent Claim
26 words
A method as defined in claim 27 wherein the step of spraying includes manipulating a spray nozzle to coat a non-planar, three-dimensional portion of the surface.
Claim 33
Dependent Claim
21 words
A method as defined in claim 28 wherein the step of spraying includes dispensing the mixture using an ultrasonic spray nozzle.
Claim 34
Dependent Claim
36 words
A method as defined in claim 29 including a step of selectively removing portions of the photoresist including any diamond particles in the selectively removed portions of the photoresist to form a pattern on the surface.
Claim 35
Dependent Claim
47 words
A method as defined in claim 30 including a step of growing the diamond particles into a doped diamond film bonded to the three-dimensional portion of the surface by the binder particles, the doped diamond film forming part of an electrically conductive device located on the surface.
Claim 36
Independent Claim
125 words
A method comprising steps of: providing a mixture of photoresist, diamond particles having particle size of less than about 25 nanometers and binder particles; ultrasonically agitating the mixture to assure uniformity; providing an applicator and a position controlling device including a controller for controlling the movement of the applicator; applying the mixture to a non-planar, three-dimensional surface of a non-diamond substrate in a line having a width of about 30 microns or less with the applicator; patterning the photoresist to leave a pattern of the mixture on the surface; and growing the diamond particles into a doped diamond film bonded to the three-dimensional surface of the non-diamond substrate by the binder particles, the diamond film forming part of an electrical device located on the surface.
Claim 37
Independent Claim
125 words
A method comprising steps of: providing a mixture of photoresist, diamond particles having particle size of less than about 25 nanometers and binder particles; ultrasonically agitating the mixture to assure uniformity; providing an applicator and a position controlling device including a controller for controlling the movement of the applicator; applying the mixture to a non-planar, three-dimensional surface of a non-diamond substrate in a line having a width of about 30 microns or less with the applicator; patterning the photoresist to leave a pattern of the mixture on the surface; and growing the diamond particles into a doped diamond film bonded to the three-dimensional surface of the non-diamond substrate by the binder particles, the diamond film forming part of an electrical device located on the surface.
Claim 38
Independent Claim
46 words
A method of seeding for diamond film growth on a non-diamond substrate having a surface, comprising steps of: mixing diamond particles, binder particles and photoresist to form a uniform mixture; and dipping the non-diamond substrate into the mixture to coat the surface of the non-diamond substrate.
Claim 39
Independent Claim
46 words
A method of seeding for diamond film growth on a non-diamond substrate having a surface, comprising steps of: mixing diamond particles, binder particles and photoresist to form a uniform mixture; and dipping the non-diamond substrate into the mixture to coat the surface of the non-diamond substrate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-12-11 | 1999-06-12 | 1999-12-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-12-11 | 2003-06-12 | 2003-12-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-12-11 | 2007-06-12 | 2007-12-12 | $7700.00 | Window Closed / Lapsed |