US5474640A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for marking a substrate using ionized gas
Assignee: Applied Materials Inc
•
Filing: 1993-07-19
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Granted: 1995-12-12
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Expires: 2013-07-19
Abstract
Abstract An apparatus suitable for marking a substrate comprises a holder for holding a substrate and a ground for electrically grounding the substrate. At least one needle electrode has a tip located proximate to the substrate so that there is a gap between the substrate and the tip. A high voltage source provides a current to the electrode tip to ionize the gas in the gap so that the ionized gas can impinge upon and mark the substrate.
Inventors
- 👤 Yan Ye
- 👤 Anand Gupta
- 👤 Yuri Uritsky
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 19:33
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/06; H10P72/0614; H01; H01J; H01J37/00; H01J37/30; H01J37/304; H01J37/3045; H10W; H10W46/00; H10W46/501
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
103 words
An apparatus for marking a substrate, the apparatus comprising: (a) a holder for holding a substrate; (b) a ground for electrically grounding the substrate; (c ) at least one needle electrode having a tip located proximate to and spaced apart from the holder, so that when a substrate is held by the holder, the electrode tip and the substrate define a gap therebetween; and (d) a high voltage source for providing a current to the electrode tip for ionizing the gas in the gap so that the ionized gas can impinge upon and mark the substrate, substantially without depositing material on the substrate.
Claim 2
Independent Claim
103 words
An apparatus for marking a substrate, the apparatus comprising: (a) a holder for holding a substrate; (b) a ground for electrically grounding the substrate; (c ) at least one needle electrode having a tip located proximate to and spaced apart from the holder, so that when a substrate is held by the holder, the electrode tip and the substrate define a gap therebetween; and (d) a high voltage source for providing a current to the electrode tip for ionizing the gas in the gap so that the ionized gas can impinge upon and mark the substrate, substantially without depositing material on the substrate.
Claim 3
Dependent Claim
14 words
The apparatus of claim 1, wherein the ground contacts and electrically grounds the holder.
Claim 4
Dependent Claim
32 words
The apparatus of claim 1, wherein the holder has a hole therethrough, and wherein the ground comprises an electrically grounded pin that can contact the substrate through the hole in the holder.
Claim 5
Dependent Claim
20 words
The apparatus of claim 1, comprising a plurality of the needle electrodes for simultaneously forming multiple marks on the substrate.
Claim 6
Dependent Claim
17 words
The apparatus of claim 1, further comprising a gas delivery system for providing gas to the gap.
Claim 7
Dependent Claim
27 words
The apparatus of claim 5, wherein the gas delivery system can provide gas at a sufficiently high pressure to blow away contaminants formed by the marking process.
Claim 8
Dependent Claim
20 words
The apparatus of claim 6, wherein the gas delivery system comprises a nozzle that directs the gas into the gap.
Claim 9
Dependent Claim
17 words
The apparatus of claim 1, wherein the gap has a width of less than about 100 millimeters.
Claim 10
Dependent Claim
17 words
The apparatus of claim 8, wherein the gap has a width of less than about 10 millimeters.
Claim 11
Dependent Claim
23 words
The apparatus of claim 1, wherein the high voltage source can provide a voltage of from about 1000 volts to about 10,000 volts.
Claim 12
Dependent Claim
23 words
The apparatus of claim 10, wherein the high voltage source can provide a voltage of from about 2000 volts to about 6000 volts.
Claim 13
Dependent Claim
23 words
The apparatus of claim 10, wherein the high voltage source can provide a current of from about 1 microamp to about 50 microamps.
Claim 14
Dependent Claim
22 words
The apparatus of claim 12, wherein the high voltage source provides a current of from about 1 microamp to about 10 microamps.
Claim 15
Dependent Claim
21 words
The apparatus of claim 1, wherein the ionized gas impinges upon and marks the substrate by sputtering or etching the substrate.
Claim 16
Dependent Claim
19 words
The apparatus of claim 1, wherein the gap has a width of from about 1 to about 100 mm.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-12-11 | 1999-06-12 | 1999-12-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-12-11 | 2003-06-12 | 2003-12-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-12-11 | 2007-06-12 | 2007-12-12 | $7700.00 | Window Closed / Lapsed |